DE69835037D1 - Infrarotempfindliches bolometer mit stabiler struktur - Google Patents

Infrarotempfindliches bolometer mit stabiler struktur

Info

Publication number
DE69835037D1
DE69835037D1 DE69835037T DE69835037T DE69835037D1 DE 69835037 D1 DE69835037 D1 DE 69835037D1 DE 69835037 T DE69835037 T DE 69835037T DE 69835037 T DE69835037 T DE 69835037T DE 69835037 D1 DE69835037 D1 DE 69835037D1
Authority
DE
Germany
Prior art keywords
stable structure
infrared sensitive
sensitive bolometer
bolometer
infrared
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69835037T
Other languages
English (en)
Other versions
DE69835037T2 (de
Inventor
Sang B Ju
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WiniaDaewoo Co Ltd
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Priority claimed from PCT/KR1998/000446 external-priority patent/WO2000037907A1/en
Application granted granted Critical
Publication of DE69835037D1 publication Critical patent/DE69835037D1/de
Publication of DE69835037T2 publication Critical patent/DE69835037T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE69835037T 1998-12-18 1998-12-18 Infrarotempfindliches bolometer mit stabiler struktur Expired - Lifetime DE69835037T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR1998/000446 WO2000037907A1 (en) 1998-12-18 1998-12-18 Structurally stable infrared bolometer

Publications (2)

Publication Number Publication Date
DE69835037D1 true DE69835037D1 (de) 2006-08-03
DE69835037T2 DE69835037T2 (de) 2006-10-12

Family

ID=19531219

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69835037T Expired - Lifetime DE69835037T2 (de) 1998-12-18 1998-12-18 Infrarotempfindliches bolometer mit stabiler struktur

Country Status (3)

Country Link
EP (1) EP1144967B1 (de)
JP (1) JP3866040B2 (de)
DE (1) DE69835037T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4528720B2 (ja) * 2005-12-28 2010-08-18 株式会社東芝 赤外線検出素子およびその製造方法と赤外線カメラ
JP5255873B2 (ja) 2008-03-17 2013-08-07 浜松ホトニクス株式会社 光検出器
JP5259430B2 (ja) * 2009-01-06 2013-08-07 浜松ホトニクス株式会社 光検出器

Also Published As

Publication number Publication date
DE69835037T2 (de) 2006-10-12
EP1144967A1 (de) 2001-10-17
EP1144967B1 (de) 2006-06-21
JP3866040B2 (ja) 2007-01-10
JP2002533668A (ja) 2002-10-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition