DE69835037D1 - Infrarotempfindliches bolometer mit stabiler struktur - Google Patents
Infrarotempfindliches bolometer mit stabiler strukturInfo
- Publication number
- DE69835037D1 DE69835037D1 DE69835037T DE69835037T DE69835037D1 DE 69835037 D1 DE69835037 D1 DE 69835037D1 DE 69835037 T DE69835037 T DE 69835037T DE 69835037 T DE69835037 T DE 69835037T DE 69835037 D1 DE69835037 D1 DE 69835037D1
- Authority
- DE
- Germany
- Prior art keywords
- stable structure
- infrared sensitive
- sensitive bolometer
- bolometer
- infrared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/KR1998/000446 WO2000037907A1 (en) | 1998-12-18 | 1998-12-18 | Structurally stable infrared bolometer |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69835037D1 true DE69835037D1 (de) | 2006-08-03 |
DE69835037T2 DE69835037T2 (de) | 2006-10-12 |
Family
ID=19531219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69835037T Expired - Lifetime DE69835037T2 (de) | 1998-12-18 | 1998-12-18 | Infrarotempfindliches bolometer mit stabiler struktur |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1144967B1 (de) |
JP (1) | JP3866040B2 (de) |
DE (1) | DE69835037T2 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4528720B2 (ja) * | 2005-12-28 | 2010-08-18 | 株式会社東芝 | 赤外線検出素子およびその製造方法と赤外線カメラ |
JP5255873B2 (ja) * | 2008-03-17 | 2013-08-07 | 浜松ホトニクス株式会社 | 光検出器 |
JP5259430B2 (ja) | 2009-01-06 | 2013-08-07 | 浜松ホトニクス株式会社 | 光検出器 |
-
1998
- 1998-12-18 DE DE69835037T patent/DE69835037T2/de not_active Expired - Lifetime
- 1998-12-18 EP EP98959291A patent/EP1144967B1/de not_active Expired - Lifetime
- 1998-12-18 JP JP2000589917A patent/JP3866040B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1144967A1 (de) | 2001-10-17 |
JP2002533668A (ja) | 2002-10-08 |
EP1144967B1 (de) | 2006-06-21 |
DE69835037T2 (de) | 2006-10-12 |
JP3866040B2 (ja) | 2007-01-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |