DE69830736D1 - Dampfniederschlag-beschichtungsvorrichtung - Google Patents
Dampfniederschlag-beschichtungsvorrichtungInfo
- Publication number
- DE69830736D1 DE69830736D1 DE69830736T DE69830736T DE69830736D1 DE 69830736 D1 DE69830736 D1 DE 69830736D1 DE 69830736 T DE69830736 T DE 69830736T DE 69830736 T DE69830736 T DE 69830736T DE 69830736 D1 DE69830736 D1 DE 69830736D1
- Authority
- DE
- Germany
- Prior art keywords
- coating
- magnetic field
- vapor deposition
- field lines
- coating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Agricultural Chemicals And Associated Chemicals (AREA)
- Supports For Pipes And Cables (AREA)
- Power Steering Mechanism (AREA)
- Surface Treatment Of Glass (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9700158.0A GB9700158D0 (en) | 1997-01-07 | 1997-01-07 | Versatile coating deposition system |
GB9700158 | 1997-01-07 | ||
PCT/GB1998/000047 WO1998031041A1 (en) | 1997-01-07 | 1998-01-07 | Vapour deposition coating apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69830736D1 true DE69830736D1 (de) | 2005-08-04 |
DE69830736T2 DE69830736T2 (de) | 2006-05-18 |
Family
ID=10805582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69830736T Expired - Fee Related DE69830736T2 (de) | 1997-01-07 | 1998-01-07 | Dampfniederschlag-beschichtungsvorrichtung |
Country Status (8)
Country | Link |
---|---|
US (1) | US6383565B1 (de) |
EP (1) | EP1016121B1 (de) |
JP (1) | JP2001507756A (de) |
CN (1) | CN1243599A (de) |
AT (1) | ATE298928T1 (de) |
DE (1) | DE69830736T2 (de) |
GB (1) | GB9700158D0 (de) |
WO (1) | WO1998031041A1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2340845B (en) * | 1998-08-19 | 2001-01-31 | Kobe Steel Ltd | Magnetron sputtering apparatus |
JP4219566B2 (ja) * | 2001-03-30 | 2009-02-04 | 株式会社神戸製鋼所 | スパッタ装置 |
JP4812991B2 (ja) * | 2001-09-20 | 2011-11-09 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP2009531545A (ja) * | 2006-03-28 | 2009-09-03 | ナムローゼ・フェンノートシャップ・ベーカート・ソシエテ・アノニム | コーティング装置 |
DE102006020004B4 (de) * | 2006-04-26 | 2011-06-01 | Systec System- Und Anlagentechnik Gmbh & Co.Kg | Vorrichtung und Verfahren zur homogenen PVD-Beschichtung |
TW201144462A (en) * | 2010-06-10 | 2011-12-16 | Hon Hai Prec Ind Co Ltd | Coating device |
US9957609B2 (en) | 2011-11-30 | 2018-05-01 | Corning Incorporated | Process for making of glass articles with optical and easy-to-clean coatings |
US10077207B2 (en) | 2011-11-30 | 2018-09-18 | Corning Incorporated | Optical coating method, apparatus and product |
EP3696293A1 (de) | 2011-11-30 | 2020-08-19 | Corning Incorporated | Optisches beschichtungsverfahren, vorrichtung dafür und produkt damit |
CN102912297A (zh) * | 2012-10-22 | 2013-02-06 | 东莞市汇成真空科技有限公司 | 卧式滚筒真空镀膜机 |
CN114214596B (zh) * | 2021-11-09 | 2023-09-29 | 维达力实业(深圳)有限公司 | 磁控溅射镀膜腔室、镀膜机以及镀膜方法 |
CN114574830B (zh) * | 2022-03-11 | 2024-03-26 | 陕西理工大学 | 用于磁控溅射靶阴极的磁铁布置结构 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3905887A (en) | 1973-01-12 | 1975-09-16 | Coulter Information Systems | Thin film deposition method using segmented plasma |
JPS59172225A (ja) | 1983-03-18 | 1984-09-28 | Matsushita Electric Ind Co Ltd | 薄膜磁性体の作製法 |
US4871433A (en) * | 1986-04-04 | 1989-10-03 | Materials Research Corporation | Method and apparatus for improving the uniformity ion bombardment in a magnetron sputtering system |
JPS63262462A (ja) | 1987-04-17 | 1988-10-28 | Ube Ind Ltd | プラズマ制御マグネトロンスパツタリング装置及び方法 |
US4851095A (en) | 1988-02-08 | 1989-07-25 | Optical Coating Laboratory, Inc. | Magnetron sputtering apparatus and process |
DE4009151A1 (de) | 1990-03-22 | 1991-09-26 | Leybold Ag | Vorrichtung zum beschichten von substraten durch katodenzerstaeubung |
DE4038497C1 (de) * | 1990-12-03 | 1992-02-20 | Leybold Ag, 6450 Hanau, De | |
JP3343620B2 (ja) | 1992-04-09 | 2002-11-11 | アネルバ株式会社 | マグネトロンスパッタリングによる薄膜形成方法および装置 |
US5907220A (en) * | 1996-03-13 | 1999-05-25 | Applied Materials, Inc. | Magnetron for low pressure full face erosion |
-
1997
- 1997-01-07 GB GBGB9700158.0A patent/GB9700158D0/en active Pending
-
1998
- 1998-01-07 DE DE69830736T patent/DE69830736T2/de not_active Expired - Fee Related
- 1998-01-07 WO PCT/GB1998/000047 patent/WO1998031041A1/en active IP Right Grant
- 1998-01-07 US US09/341,072 patent/US6383565B1/en not_active Expired - Fee Related
- 1998-01-07 JP JP53064598A patent/JP2001507756A/ja not_active Ceased
- 1998-01-07 EP EP98900312A patent/EP1016121B1/de not_active Expired - Lifetime
- 1998-01-07 CN CN98801695A patent/CN1243599A/zh active Pending
- 1998-01-07 AT AT98900312T patent/ATE298928T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN1243599A (zh) | 2000-02-02 |
US20020050453A1 (en) | 2002-05-02 |
WO1998031041A1 (en) | 1998-07-16 |
DE69830736T2 (de) | 2006-05-18 |
JP2001507756A (ja) | 2001-06-12 |
ATE298928T1 (de) | 2005-07-15 |
EP1016121A1 (de) | 2000-07-05 |
US6383565B1 (en) | 2002-05-07 |
GB9700158D0 (en) | 1997-02-26 |
EP1016121B1 (de) | 2005-06-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69830736D1 (de) | Dampfniederschlag-beschichtungsvorrichtung | |
US5902461A (en) | Apparatus and method for enhancing uniformity of a metal film formed on a substrate with the aid of an inductively coupled plasma | |
US6026763A (en) | Thin-film deposition apparatus using cathodic arc discharge | |
Bohlmark et al. | Guiding the deposition flux in an ionized magnetron discharge | |
AU746645B2 (en) | Method and apparatus for deposition of biaxially textured coatings | |
US6497803B2 (en) | Unbalanced plasma generating apparatus having cylindrical symmetry | |
TWI267161B (en) | Wafer susceptor | |
US6545580B2 (en) | Electromagnetic field generator and method of operation | |
GB2347148A (en) | Enhanced macroparticle filter and cathode arc source | |
KR970067606A (ko) | 패러데이-스퍼터 실드를 갖는 유도 결합 플라즈마 반응기 | |
JPH05502971A (ja) | 低周波誘導型高周波プラズマ反応装置 | |
ATE139268T1 (de) | Einrichtung zum plasmagestützten elektronenstrahl-hochratebedampfen | |
RU2000127113A (ru) | Способ и устройство для осаждения двухосно текстурированных покрытий | |
CA2254677A1 (en) | Apparatus for sputtering or arc evaporation | |
Bilek et al. | A study of filter transport mechanisms in filtered cathodic vacuum arcs | |
ATE458261T1 (de) | Plasmabehandlungsgerät | |
Solov’ev et al. | Investigation of plasma characteristics in an unbalanced magnetron sputtering system | |
US6146508A (en) | Sputtering method and apparatus with small diameter RF coil | |
KR100341524B1 (ko) | 이온화된 금속 플라즈마 증착용 중심 코일 디자인 | |
ES2134538T3 (es) | Dispositivo para el recubrimiento de sustratos al vacio. | |
KR19980086991A (ko) | 고밀도 플라즈마를 위한 전력인가 실드 소오스 | |
EP0463303A2 (de) | Gerät zur Ionen-Plasma-Verarbeitung von Werkstückoberflächen | |
KR930001317A (ko) | 박막(薄膜) 형성장치 및 박막 형성 방법 | |
CZ278295B6 (en) | Process of sputtering layers and apparatus for making the same | |
CA2268659A1 (en) | Rectangular cathodic arc source and method of steering an arc spot |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |