DE69826068D1 - Magnetron-Zerstäubungsvorrichtung mit rotierender Magnetanordnung - Google Patents

Magnetron-Zerstäubungsvorrichtung mit rotierender Magnetanordnung

Info

Publication number
DE69826068D1
DE69826068D1 DE69826068T DE69826068T DE69826068D1 DE 69826068 D1 DE69826068 D1 DE 69826068D1 DE 69826068 T DE69826068 T DE 69826068T DE 69826068 T DE69826068 T DE 69826068T DE 69826068 D1 DE69826068 D1 DE 69826068D1
Authority
DE
Germany
Prior art keywords
magnetron sputtering
magnet arrangement
sputtering device
rotating magnet
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69826068T
Other languages
English (en)
Other versions
DE69826068T2 (de
Inventor
David Ian Charles Pearson
Swie-In Tan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nordiko Technical Services Ltd
Original Assignee
Nordiko Technical Services Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nordiko Technical Services Ltd filed Critical Nordiko Technical Services Ltd
Publication of DE69826068D1 publication Critical patent/DE69826068D1/de
Application granted granted Critical
Publication of DE69826068T2 publication Critical patent/DE69826068T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
    • H01J37/3452—Magnet distribution
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
    • H01J37/3455—Movable magnets

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
DE69826068T 1997-06-12 1998-06-10 Magnetron-Zerstäubungsvorrichtung mit rotierender Magnetanordnung Expired - Lifetime DE69826068T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US874075 1986-06-13
US08/874,075 US5795451A (en) 1997-06-12 1997-06-12 Sputtering apparatus with a rotating magnet array

Publications (2)

Publication Number Publication Date
DE69826068D1 true DE69826068D1 (de) 2004-10-14
DE69826068T2 DE69826068T2 (de) 2005-09-29

Family

ID=25362929

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69826068T Expired - Lifetime DE69826068T2 (de) 1997-06-12 1998-06-10 Magnetron-Zerstäubungsvorrichtung mit rotierender Magnetanordnung

Country Status (4)

Country Link
US (1) US5795451A (de)
EP (1) EP0884761B1 (de)
JP (1) JPH1171670A (de)
DE (1) DE69826068T2 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9606920D0 (en) * 1996-04-02 1996-06-05 Applied Vision Ltd Magnet array for magnetrons
GB2340845B (en) * 1998-08-19 2001-01-31 Kobe Steel Ltd Magnetron sputtering apparatus
US6132575A (en) * 1998-09-28 2000-10-17 Alcatel Magnetron reactor for providing a high density, inductively coupled plasma source for sputtering metal and dielectric films
US6497802B2 (en) 1999-02-12 2002-12-24 Applied Materials, Inc. Self ionized plasma sputtering
US6183614B1 (en) 1999-02-12 2001-02-06 Applied Materials, Inc. Rotating sputter magnetron assembly
US6306265B1 (en) * 1999-02-12 2001-10-23 Applied Materials, Inc. High-density plasma for ionized metal deposition capable of exciting a plasma wave
US6290825B1 (en) 1999-02-12 2001-09-18 Applied Materials, Inc. High-density plasma source for ionized metal deposition
US6440282B1 (en) 1999-07-06 2002-08-27 Applied Materials, Inc. Sputtering reactor and method of using an unbalanced magnetron
US6132565A (en) * 1999-10-01 2000-10-17 Taiwan Semiconductor Manufacturing Company, Ltd Magnetron assembly equipped with traversing magnets and method of using
US8696875B2 (en) * 1999-10-08 2014-04-15 Applied Materials, Inc. Self-ionized and inductively-coupled plasma for sputtering and resputtering
US10047430B2 (en) 1999-10-08 2018-08-14 Applied Materials, Inc. Self-ionized and inductively-coupled plasma for sputtering and resputtering
US6398929B1 (en) * 1999-10-08 2002-06-04 Applied Materials, Inc. Plasma reactor and shields generating self-ionized plasma for sputtering
US6432285B1 (en) * 1999-10-15 2002-08-13 Cierra Photonics, Inc. Planar magnetron sputtering apparatus
ATE394789T1 (de) * 1999-11-15 2008-05-15 Lam Res Corp Behandlungsvorrichtungen
US6402903B1 (en) 2000-02-04 2002-06-11 Steag Hamatech Ag Magnetic array for sputtering system
US7067034B2 (en) * 2000-03-27 2006-06-27 Lam Research Corporation Method and apparatus for plasma forming inner magnetic bucket to control a volume of a plasma
US6632322B1 (en) * 2000-06-30 2003-10-14 Lam Research Corporation Switched uniformity control
US6352629B1 (en) * 2000-07-10 2002-03-05 Applied Materials, Inc. Coaxial electromagnet in a magnetron sputtering reactor
US6663754B2 (en) * 2001-04-13 2003-12-16 Applied Materials, Inc. Tubular magnet as center pole in unbalanced sputtering magnetron
US20030024478A1 (en) * 2001-08-06 2003-02-06 Anelva Corporation Surface processing apparatus
US7504006B2 (en) * 2002-08-01 2009-03-17 Applied Materials, Inc. Self-ionized and capacitively-coupled plasma for sputtering and resputtering
US20070108041A1 (en) * 2005-11-11 2007-05-17 Guo George X Magnetron source having increased usage life
KR100910673B1 (ko) * 2006-08-04 2009-08-04 어플라이드 머티어리얼스, 인코포레이티드 다중 마그네트론들, 특히 2 레벨 접지형 마그네트론들의집단 스캐닝
US8137517B1 (en) 2009-02-10 2012-03-20 Wd Media, Inc. Dual position DC magnetron assembly
US8517657B2 (en) 2010-06-30 2013-08-27 WD Media, LLC Corner chamber with heater
CN102315064B (zh) * 2010-07-02 2014-07-30 北京北方微电子基地设备工艺研究中心有限责任公司 一种磁控管及应用该磁控管的薄膜沉积处理设备
US20130240147A1 (en) * 2012-03-19 2013-09-19 Sang Ki Nam Methods and apparatus for selectively modulating azimuthal non-uniformity in a plasma processing system
US8674327B1 (en) 2012-05-10 2014-03-18 WD Media, LLC Systems and methods for uniformly implanting materials on substrates using directed magnetic fields
US9764093B2 (en) * 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
CN103854819B (zh) * 2014-03-22 2016-10-05 沈阳中北通磁科技股份有限公司 一种钕铁硼稀土永磁器件的混合镀膜方法
GB201815216D0 (en) 2018-09-18 2018-10-31 Spts Technologies Ltd Apparatus and a method of controlling thickness variation in a material layer formed using physical vapour deposition

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6289864A (ja) * 1985-06-27 1987-04-24 Matsushita Electric Ind Co Ltd マグネトロンスパツタ装置
JPH07108748B2 (ja) * 1985-07-05 1995-11-22 ミノルタ株式会社 複写機
JPS6260866A (ja) * 1985-08-02 1987-03-17 Fujitsu Ltd マグネトロンスパツタ装置
DE3619194A1 (de) * 1986-06-06 1987-12-10 Leybold Heraeus Gmbh & Co Kg Magnetron-zerstaeubungskatode fuer vakuum-beschichtungsanlagen
JPS63109163A (ja) * 1986-10-25 1988-05-13 Sumitomo Light Metal Ind Ltd スパツタリング装置
JP2627651B2 (ja) * 1988-10-17 1997-07-09 アネルバ株式会社 マグネトロンスパッタリング装置
DE69121446T2 (de) * 1990-03-30 1997-02-20 Applied Materials Inc Zerstäubungssystem
DE4039101C2 (de) * 1990-12-07 1998-05-28 Leybold Ag Ortsfeste Magnetron-Zerstäubungskathode für Vakuumbeschichtungsanlagen
US5194131A (en) * 1991-08-16 1993-03-16 Varian Associates, Inc. Apparatus and method for multiple ring sputtering from a single target
US5374343A (en) * 1992-05-15 1994-12-20 Anelva Corporation Magnetron cathode assembly
US5333726A (en) * 1993-01-15 1994-08-02 Regents Of The University Of California Magnetron sputtering source
US5496455A (en) * 1993-09-16 1996-03-05 Applied Material Sputtering using a plasma-shaping magnet ring

Also Published As

Publication number Publication date
EP0884761B1 (de) 2004-09-08
JPH1171670A (ja) 1999-03-16
EP0884761A1 (de) 1998-12-16
DE69826068T2 (de) 2005-09-29
US5795451A (en) 1998-08-18

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Legal Events

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