DE69824356D1 - Kathodisches Bogen-Beschichtungsgerät mit einer Vorrichtung zur Bogenführung - Google Patents

Kathodisches Bogen-Beschichtungsgerät mit einer Vorrichtung zur Bogenführung

Info

Publication number
DE69824356D1
DE69824356D1 DE69824356T DE69824356T DE69824356D1 DE 69824356 D1 DE69824356 D1 DE 69824356D1 DE 69824356 T DE69824356 T DE 69824356T DE 69824356 T DE69824356 T DE 69824356T DE 69824356 D1 DE69824356 D1 DE 69824356D1
Authority
DE
Germany
Prior art keywords
sheet
cathodic
guidance
coating device
sheet coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69824356T
Other languages
English (en)
Other versions
DE69824356T2 (de
Inventor
Russell A Beers
Tyrus E Royal
Subbiah Ramalingam
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/919,133 external-priority patent/US6009829A/en
Priority claimed from US08/919,132 external-priority patent/US6036828A/en
Application filed by United Technologies Corp filed Critical United Technologies Corp
Application granted granted Critical
Publication of DE69824356D1 publication Critical patent/DE69824356D1/de
Publication of DE69824356T2 publication Critical patent/DE69824356T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE1998624356 1997-08-30 1998-08-28 Kathodisches Bogen-Beschichtungsgerät mit einer Vorrichtung zur Bogenführung Expired - Lifetime DE69824356T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US919132 1997-08-30
US919133 1997-08-30
US08/919,133 US6009829A (en) 1997-08-30 1997-08-30 Apparatus for driving the arc in a cathodic arc coater
US08/919,132 US6036828A (en) 1997-08-30 1997-08-30 Apparatus for steering the arc in a cathodic arc coater

Publications (2)

Publication Number Publication Date
DE69824356D1 true DE69824356D1 (de) 2004-07-15
DE69824356T2 DE69824356T2 (de) 2005-02-17

Family

ID=27129764

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1998624356 Expired - Lifetime DE69824356T2 (de) 1997-08-30 1998-08-28 Kathodisches Bogen-Beschichtungsgerät mit einer Vorrichtung zur Bogenführung
DE1998637294 Expired - Lifetime DE69837294T2 (de) 1997-08-30 1998-08-28 Vorrichtung zur Bogenführung in einem kathodischen Bogen-Beschichtungsgerät

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE1998637294 Expired - Lifetime DE69837294T2 (de) 1997-08-30 1998-08-28 Vorrichtung zur Bogenführung in einem kathodischen Bogen-Beschichtungsgerät

Country Status (3)

Country Link
EP (2) EP0899773B1 (de)
DE (2) DE69824356T2 (de)
SG (1) SG67552A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ296094B6 (cs) * 2000-12-18 2006-01-11 Shm, S. R. O. Zarízení pro odparování materiálu k povlakování predmetu
BRPI0711644B1 (pt) * 2006-05-16 2019-03-19 Oerlikon Trading Ag, Trübbach Fonte de arco voltaico com um alvo e processo para a produção de peças revestidas por arco voltaico
US8088260B2 (en) * 2007-08-14 2012-01-03 United Technologies Corporation Puck for cathodic arc coating with continuous groove to control arc
EP3055441B1 (de) 2013-10-08 2022-01-12 Raytheon Technologies Corporation Vorrichtung und verfahren zur beschichtung eines werkstücks mittels kathodischer lichtbogenverdampfung
DE102022118927A1 (de) * 2022-07-28 2024-02-08 Rainer Cremer Verfahren zum Verdampfen einer Kathode in einem Vakuumlichtbogenverdampfer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT376460B (de) * 1982-09-17 1984-11-26 Kljuchko Gennady V Plasmalichtbogeneinrichtung zum auftragen von ueberzuegen
US4673477A (en) * 1984-03-02 1987-06-16 Regents Of The University Of Minnesota Controlled vacuum arc material deposition, method and apparatus
JPH0726203B2 (ja) * 1987-05-11 1995-03-22 松下電器産業株式会社 マグネトロンスパッタリング装置
US5269898A (en) * 1991-03-20 1993-12-14 Vapor Technologies, Inc. Apparatus and method for coating a substrate using vacuum arc evaporation

Also Published As

Publication number Publication date
EP1347491A1 (de) 2003-09-24
DE69824356T2 (de) 2005-02-17
DE69837294D1 (de) 2007-04-19
EP0899773B1 (de) 2004-06-09
EP0899773A2 (de) 1999-03-03
SG67552A1 (en) 1999-09-21
EP1347491B1 (de) 2007-03-07
EP0899773A3 (de) 2000-11-08
DE69837294T2 (de) 2007-12-20

Similar Documents

Publication Publication Date Title
DE69839066D1 (de) Vorrichtung zur Substratbeschichtung
DE69723380D1 (de) Vorrichtung zur beobachtung einer wandoberfläche
DE69820516D1 (de) Vorrichtung zur Begrenzung einer Flüssigkeitsströmung
DE69825955D1 (de) Gerät zur förderung einer flüssigkeit
DE69608120D1 (de) Vorrichtung zur verwendung in einer rohrleitung
DE69619439D1 (de) Vorrichtung zur Zerstäubung einer Flüssigkeit
DE59709349D1 (de) Vorrichtung zur Führung einer Materialbahn
DE69514580D1 (de) Vorrichtung zur Erkennung der Umgebung mit einer Vorrichtung zur Bildaufnahme
DE69731887D1 (de) Vorrichtung zur positionierung einer buchse
DE69714886D1 (de) Vorrichtung zur elektrostatischen Beschichtung
DE69621989D1 (de) System zur Beschichtung einer Platte
DE69622883D1 (de) Vorrichtung zur durschflusskontrolle einer kühlflüssigkeit
DE59709102D1 (de) Vorrichtung zur ermittlung einer drehrate
DE69818736D1 (de) Vorrichtung zur Positionierung einer Linse
DE19733379B4 (de) Vorrichtung zur Steuerung einer Bremsanlage
DE59901173D1 (de) Vorrichtung zur Beschichtung von Substraten in einer Vakuumkammer
DE69803388D1 (de) Verbesserung der steuerungsgenauigkeit einer impulsbetriebenen elektromechanischen vorrichtung
DE69835577D1 (de) Portable Vorrichtung zum Auftrag einer Beschichtung
DE69828158D1 (de) Vorrichtung zur steuerung einer matrixanzeigestelle
DE59803779D1 (de) Einrichtung zur beeinflussung einer beleuchtungseinrichtung
DE69928139D1 (de) Verwendung einer Vorrichtung zur Erhöhung der Feuchtigkeit
DE59709917D1 (de) Vorrichtung zur ermittlung einer drehrate
DE59606186D1 (de) Vorrichtung zum Beschichten einer Substratfläche
DE59502239D1 (de) Vorrichtung zur Befestigung einer biegsamen Druckform
DE59801374D1 (de) Druckanlage zur Beschichtung eines Flächenmaterials mit einer Paste

Legal Events

Date Code Title Description
8364 No opposition during term of opposition