DE69823208D1 - Kraftaufnehmer für einen beschleunigungsmesser oder drehgeschwindigkeitssensor - Google Patents

Kraftaufnehmer für einen beschleunigungsmesser oder drehgeschwindigkeitssensor

Info

Publication number
DE69823208D1
DE69823208D1 DE69823208T DE69823208T DE69823208D1 DE 69823208 D1 DE69823208 D1 DE 69823208D1 DE 69823208 T DE69823208 T DE 69823208T DE 69823208 T DE69823208 T DE 69823208T DE 69823208 D1 DE69823208 D1 DE 69823208D1
Authority
DE
Germany
Prior art keywords
accelerometer
speed sensor
force transducer
transducer
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69823208T
Other languages
English (en)
Other versions
DE69823208T2 (de
Inventor
H Hulsing
Randy Sprague
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Application granted granted Critical
Publication of DE69823208D1 publication Critical patent/DE69823208D1/de
Publication of DE69823208T2 publication Critical patent/DE69823208T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G01L1/183—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)
DE69823208T 1997-08-14 1998-08-13 Kraftaufnehmer für einen beschleunigungsmesser oder drehgeschwindigkeitssensor Expired - Fee Related DE69823208T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US104844 1993-08-12
US5564697P 1997-08-14 1997-08-14
US55646P 1997-08-14
US09/104,844 US6161440A (en) 1997-08-14 1998-06-25 Low metalization creep sensor
PCT/US1998/016842 WO1999009384A1 (en) 1997-08-14 1998-08-13 Vibrating beam force-sensors, accelerometers, rate sensors and methods of forming the same

Publications (2)

Publication Number Publication Date
DE69823208D1 true DE69823208D1 (de) 2004-05-19
DE69823208T2 DE69823208T2 (de) 2005-04-28

Family

ID=26734472

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69823208T Expired - Fee Related DE69823208T2 (de) 1997-08-14 1998-08-13 Kraftaufnehmer für einen beschleunigungsmesser oder drehgeschwindigkeitssensor

Country Status (4)

Country Link
US (4) US6161440A (de)
EP (1) EP1004008B1 (de)
DE (1) DE69823208T2 (de)
WO (1) WO1999009384A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3498209B2 (ja) * 1999-10-25 2004-02-16 株式会社村田製作所 外力検知センサ装置
KR20050099520A (ko) * 2003-02-05 2005-10-13 브루넬 유니버시티 공진 센서 조립체
FR2851659B1 (fr) * 2003-02-24 2005-06-24 Sagem Capteur vibrant a ecran radiatif
US7481112B2 (en) * 2004-09-30 2009-01-27 University Of Southern California Silicon inertial sensors formed using MEMS
US7069790B1 (en) * 2005-05-17 2006-07-04 Honeywell International Inc. Systems and methods for measuring relative thermal expansion coefficient of low thermal coefficient of expansion materials
WO2010059433A2 (en) * 2008-11-07 2010-05-27 The Charles Stark Draper Laboratory, Inc. Mems dosimeter
FR2953025B1 (fr) * 2009-11-23 2012-06-08 Commissariat Energie Atomique Capteur de force resonant sensible a des micro-forces
GB201009062D0 (en) 2010-05-28 2010-07-14 Cambridge Entpr Ltd MEMS inertial sensor and method of inertial sensing
US8955382B2 (en) * 2011-03-10 2015-02-17 Honeywell International Inc. High performance double-ended tuning fork
CN105866470A (zh) * 2016-05-05 2016-08-17 中国工程物理研究院电子工程研究所 一种一体式石英双振梁加速度计
CN106525291A (zh) * 2016-11-09 2017-03-22 黄海 应力场仪及其使用方法
US11112246B2 (en) * 2019-06-14 2021-09-07 United States Government As Represented By The Secretary Of The Army Torsional oscillator micro electro mechanical systems accelerometer
US11493531B2 (en) 2019-11-07 2022-11-08 Honeywell International Inc. Resonator electrode configuration to avoid capacitive feedthrough for vibrating beam accelerometers
US11459231B2 (en) 2020-11-23 2022-10-04 United States Government As Represented By The Secretary Of The Army Microelectronic isolation system

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3136154A (en) 1958-11-20 1964-06-09 Douglas Aircraft Co Inc Fatigue monitor
US2990529A (en) 1959-07-13 1961-06-27 Bell Telephone Labor Inc Piezoresistive compensators
US3323092A (en) 1965-10-29 1967-05-30 Dow Chemical Co Strain gauge
JPS5142947B2 (de) 1971-09-28 1976-11-18
US4244225A (en) 1979-06-08 1981-01-13 Itt Industries, Inc. Mechanical resonator arrangements
US4679434A (en) 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
EP0239703B1 (de) * 1986-01-07 1991-06-05 THORN EMI plc Druckempfindlicher Durchflusssensor
FR2627592B1 (fr) * 1988-02-22 1990-07-27 Sagem Accelerometre pendulaire non asservi a poutre resonante
US4901570A (en) * 1988-11-21 1990-02-20 General Motors Corporation Resonant-bridge two axis microaccelerometer
FR2640045B1 (fr) * 1988-12-02 1991-03-08 Sagem Transducteur force-frequence a poutres vibrantes et accelerometre pendulaire en comportant application
US5005413A (en) 1989-02-27 1991-04-09 Sundstrand Data Control, Inc. Accelerometer with coplanar push-pull force transducers
DE3920645A1 (de) 1989-06-23 1991-01-10 Fraunhofer Ges Forschung Vorrichtung zur messung mechanischer kraefte und kraftwirkungen
US5221400A (en) 1990-12-11 1993-06-22 Delco Electronics Corporation Method of making a microaccelerometer having low stress bonds and means for preventing excessive z-axis deflection
US5265474A (en) * 1991-07-11 1993-11-30 Rockwell International Corporation Static electricity resistant accelerometer proof mass
US5763782A (en) * 1992-03-16 1998-06-09 British Technology Group Limited Micromechanical sensor
US5367217A (en) * 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer
US5456110A (en) 1993-11-12 1995-10-10 Alliedsignal Inc. Dual pendulum vibrating beam accelerometer
US5456111A (en) * 1994-01-24 1995-10-10 Alliedsignal Inc. Capacitive drive vibrating beam accelerometer
US5501103B1 (en) 1994-02-15 1998-08-04 Allied Signal Inc Two-port electromagnetic drive for a double-ended tuning fork
DE4431478B4 (de) 1994-09-03 2006-04-13 Robert Bosch Gmbh Aufhängung für mikromechanische Struktur und mikromechanischer Beschleunigungssensor
US5834646A (en) * 1995-04-12 1998-11-10 Sensonor Asa Force sensor device
GB2301671B (en) * 1995-05-30 1999-10-13 Allied Signal Inc Angular rate sensor electronic balance
US5752410A (en) * 1996-08-08 1998-05-19 The Charles Stark Draper Laboratory, Inc. Tunneling sensor with linear force rebalance and method for fabricating the same
US6035714A (en) * 1997-09-08 2000-03-14 The Regents Of The University Of Michigan Microelectromechanical capacitive accelerometer and method of making same

Also Published As

Publication number Publication date
EP1004008B1 (de) 2004-04-14
US6423564B1 (en) 2002-07-23
US6662657B2 (en) 2003-12-16
WO1999009384A1 (en) 1999-02-25
DE69823208T2 (de) 2005-04-28
EP1004008A1 (de) 2000-05-31
US20030041668A1 (en) 2003-03-06
US6161440A (en) 2000-12-19
US6435029B1 (en) 2002-08-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee