DE69818253D1 - Mikromechanischer beschleunigungsmesser mit kapazitivem resonator - Google Patents
Mikromechanischer beschleunigungsmesser mit kapazitivem resonatorInfo
- Publication number
- DE69818253D1 DE69818253D1 DE69818253T DE69818253T DE69818253D1 DE 69818253 D1 DE69818253 D1 DE 69818253D1 DE 69818253 T DE69818253 T DE 69818253T DE 69818253 T DE69818253 T DE 69818253T DE 69818253 D1 DE69818253 D1 DE 69818253D1
- Authority
- DE
- Germany
- Prior art keywords
- micromechanical
- accelerator
- capacitive resonator
- resonator
- capacitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/006—Details of instruments used for thermal compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9706332A FR2763694B1 (fr) | 1997-05-23 | 1997-05-23 | Micro-accelerometre a resonateur capacitif |
FR9706332 | 1997-05-23 | ||
PCT/FR1998/000997 WO1998053328A1 (fr) | 1997-05-23 | 1998-05-19 | Micro-accelerometre a resonateur capacitif |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69818253D1 true DE69818253D1 (de) | 2003-10-23 |
DE69818253T2 DE69818253T2 (de) | 2004-06-24 |
Family
ID=9507180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69818253T Expired - Fee Related DE69818253T2 (de) | 1997-05-23 | 1998-05-19 | Mikromechanischer beschleunigungsmesser mit kapazitivem resonator |
Country Status (6)
Country | Link |
---|---|
US (1) | US6311556B1 (de) |
EP (1) | EP0983517B1 (de) |
DE (1) | DE69818253T2 (de) |
FR (1) | FR2763694B1 (de) |
NO (1) | NO995730L (de) |
WO (1) | WO1998053328A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104698222A (zh) * | 2015-02-15 | 2015-06-10 | 东南大学 | 三轴单片集成谐振电容式硅微加速度计及其加工方法 |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10038099A1 (de) * | 2000-08-04 | 2002-02-21 | Bosch Gmbh Robert | Mikromechanisches Bauelement |
FI113704B (fi) * | 2001-03-21 | 2004-05-31 | Vti Technologies Oy | Menetelmä piianturin valmistamiseksi sekä piianturi |
FR2834055B1 (fr) * | 2001-12-20 | 2004-02-13 | Thales Sa | Capteur inertiel micro-usine pour la mesure de mouvements de rotation |
FR2838423B1 (fr) * | 2002-04-12 | 2005-06-24 | Thales Sa | Procede de fabrication d'une microstructure comportant une cavite sous vide et microstructure correspondante |
US6959583B2 (en) * | 2002-04-30 | 2005-11-01 | Honeywell International Inc. | Passive temperature compensation technique for MEMS devices |
DE10235370A1 (de) * | 2002-08-02 | 2004-02-12 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
US7004030B2 (en) * | 2002-09-27 | 2006-02-28 | Oki Electric Industry Co., Ltd. | Acceleration sensor |
US6865944B2 (en) * | 2002-12-16 | 2005-03-15 | Honeywell International Inc. | Methods and systems for decelerating proof mass movements within MEMS structures |
US6817244B2 (en) * | 2003-01-06 | 2004-11-16 | Honeywell International Inc. | Methods and systems for actively controlling movement within MEMS structures |
US6718825B1 (en) | 2003-01-17 | 2004-04-13 | Honeywell International Inc. | Methods and systems for reducing stick-down within MEMS structures |
US6860151B2 (en) * | 2003-02-07 | 2005-03-01 | Honeywell International Inc. | Methods and systems for controlling movement within MEMS structures |
US6978673B2 (en) * | 2003-02-07 | 2005-12-27 | Honeywell International, Inc. | Methods and systems for simultaneously fabricating multi-frequency MEMS devices |
FR2856789B1 (fr) * | 2003-06-27 | 2005-08-26 | Thales Sa | Gyrometre a masse vibrante |
EP1617178B1 (de) * | 2004-07-12 | 2017-04-12 | STMicroelectronics Srl | Mikroelektromechanische Struktur mit elektrisch isolierten Gebieten und Verfahren zu ihrer Herstellung |
US20070163346A1 (en) * | 2006-01-18 | 2007-07-19 | Honeywell International Inc. | Frequency shifting of rotational harmonics in mems devices |
FR2898884B1 (fr) * | 2006-03-27 | 2008-05-02 | Commissariat Energie Atomique | Micro-capteur inertiel resonant a epaisseur variable realise en technologies de surface |
FR2906038B1 (fr) | 2006-09-19 | 2008-11-28 | Commissariat Energie Atomique | Accelerometre a poutre resonante avec bras de levier articule en rotation |
FR2924813B1 (fr) * | 2007-12-11 | 2011-06-24 | Memscap | Accelerometre pendulaire et procede de fabrication de celui-ci |
US8011247B2 (en) * | 2008-06-26 | 2011-09-06 | Honeywell International Inc. | Multistage proof-mass movement deceleration within MEMS structures |
US8187902B2 (en) | 2008-07-09 | 2012-05-29 | The Charles Stark Draper Laboratory, Inc. | High performance sensors and methods for forming the same |
FR2941533B1 (fr) | 2009-01-23 | 2011-03-11 | Commissariat Energie Atomique | Capteur inertiel ou resonnant en technologie de surface, a detection hors plan par jauge de contrainte. |
FR2941525B1 (fr) | 2009-01-23 | 2011-03-25 | Commissariat Energie Atomique | Gyrometre en technologie de surface, a detection hors plan par jauge de contrainte. |
US9903718B2 (en) * | 2015-05-28 | 2018-02-27 | Invensense, Inc. | MEMS device mechanical amplitude control |
EP3147258A1 (de) * | 2015-09-22 | 2017-03-29 | AT & S Austria Technologie & Systemtechnik Aktiengesellschaft | Verbindungspaneel für elektronische bauelemente |
FR3048781B1 (fr) * | 2016-03-11 | 2018-03-16 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Accelerometre lineaire amorti |
US10895457B2 (en) | 2018-03-08 | 2021-01-19 | Analog Devices, Inc. | Differential z-axis resonant accelerometry |
US10866258B2 (en) | 2018-07-20 | 2020-12-15 | Honeywell International Inc. | In-plane translational vibrating beam accelerometer with mechanical isolation and 4-fold symmetry |
CN111960374B (zh) * | 2020-06-05 | 2023-10-03 | 东南大学 | 一种pt对称垂动微机电系统 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8418914D0 (en) * | 1984-07-25 | 1984-08-30 | Standard Telephones Cables Ltd | Transducer |
US4805456A (en) * | 1987-05-19 | 1989-02-21 | Massachusetts Institute Of Technology | Resonant accelerometer |
GB2215053B (en) * | 1988-02-13 | 1991-09-11 | Stc Plc | Transducer device |
US4945765A (en) * | 1988-08-31 | 1990-08-07 | Kearfott Guidance & Navigation Corp. | Silicon micromachined accelerometer |
US4881408A (en) * | 1989-02-16 | 1989-11-21 | Sundstrand Data Control, Inc. | Low profile accelerometer |
DE4213135A1 (de) * | 1992-04-21 | 1993-10-28 | Bosch Gmbh Robert | Beschleunigungssensor und Verfahren zu dessen Herstellung |
US5996411A (en) * | 1996-11-25 | 1999-12-07 | Alliedsignal Inc. | Vibrating beam accelerometer and method for manufacturing the same |
-
1997
- 1997-05-23 FR FR9706332A patent/FR2763694B1/fr not_active Expired - Fee Related
-
1998
- 1998-05-19 EP EP98925744A patent/EP0983517B1/de not_active Expired - Lifetime
- 1998-05-19 WO PCT/FR1998/000997 patent/WO1998053328A1/fr active IP Right Grant
- 1998-05-19 US US09/424,221 patent/US6311556B1/en not_active Expired - Fee Related
- 1998-05-19 DE DE69818253T patent/DE69818253T2/de not_active Expired - Fee Related
-
1999
- 1999-11-22 NO NO995730A patent/NO995730L/no not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104698222A (zh) * | 2015-02-15 | 2015-06-10 | 东南大学 | 三轴单片集成谐振电容式硅微加速度计及其加工方法 |
CN104698222B (zh) * | 2015-02-15 | 2017-06-16 | 东南大学 | 三轴单片集成谐振电容式硅微加速度计及其加工方法 |
Also Published As
Publication number | Publication date |
---|---|
WO1998053328A1 (fr) | 1998-11-26 |
FR2763694A1 (fr) | 1998-11-27 |
DE69818253T2 (de) | 2004-06-24 |
US6311556B1 (en) | 2001-11-06 |
NO995730L (no) | 2000-01-21 |
FR2763694B1 (fr) | 1999-07-30 |
NO995730D0 (no) | 1999-11-22 |
EP0983517A1 (de) | 2000-03-08 |
EP0983517B1 (de) | 2003-09-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |