DE69817652D1 - Akustische Verzögerungsleitung mit bewegbaren Trennscheiben - Google Patents
Akustische Verzögerungsleitung mit bewegbaren TrennscheibenInfo
- Publication number
- DE69817652D1 DE69817652D1 DE69817652T DE69817652T DE69817652D1 DE 69817652 D1 DE69817652 D1 DE 69817652D1 DE 69817652 T DE69817652 T DE 69817652T DE 69817652 T DE69817652 T DE 69817652T DE 69817652 D1 DE69817652 D1 DE 69817652D1
- Authority
- DE
- Germany
- Prior art keywords
- delay line
- movable cutting
- cutting discs
- acoustic delay
- acoustic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/14—Vacuum chambers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Particle Accelerators (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10084497A JP3190596B2 (ja) | 1997-04-04 | 1997-04-04 | X線リソグラフィ用ビームラインの音波衝撃遅延管路 |
JP10084497 | 1997-04-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69817652D1 true DE69817652D1 (de) | 2003-10-09 |
DE69817652T2 DE69817652T2 (de) | 2004-07-01 |
Family
ID=14284635
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69817652T Expired - Fee Related DE69817652T2 (de) | 1997-04-04 | 1998-04-03 | Akustische Verzögerungsleitung mit bewegbaren Trennscheiben |
Country Status (5)
Country | Link |
---|---|
US (1) | US6031889A (de) |
EP (1) | EP0869703B1 (de) |
JP (1) | JP3190596B2 (de) |
CN (1) | CN1147210C (de) |
DE (1) | DE69817652T2 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103298236A (zh) * | 2013-06-13 | 2013-09-11 | 无锡爱邦辐射技术有限公司 | 电子加速器安置扫描盒 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1051867A (de) * | 1900-01-01 | |||
US5031199A (en) * | 1990-06-05 | 1991-07-09 | Wisconsin Alumni Research Foundation | X-ray lithography beamline method and apparatus |
-
1997
- 1997-04-04 JP JP10084497A patent/JP3190596B2/ja not_active Expired - Fee Related
-
1998
- 1998-03-27 US US09/049,229 patent/US6031889A/en not_active Expired - Fee Related
- 1998-04-03 DE DE69817652T patent/DE69817652T2/de not_active Expired - Fee Related
- 1998-04-03 EP EP98106180A patent/EP0869703B1/de not_active Expired - Lifetime
- 1998-04-04 CN CNB981092934A patent/CN1147210C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0869703B1 (de) | 2003-09-03 |
US6031889A (en) | 2000-02-29 |
DE69817652T2 (de) | 2004-07-01 |
CN1147210C (zh) | 2004-04-21 |
JPH10282299A (ja) | 1998-10-23 |
EP0869703A1 (de) | 1998-10-07 |
JP3190596B2 (ja) | 2001-07-23 |
CN1206200A (zh) | 1999-01-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |