DE69817652D1 - Akustische Verzögerungsleitung mit bewegbaren Trennscheiben - Google Patents

Akustische Verzögerungsleitung mit bewegbaren Trennscheiben

Info

Publication number
DE69817652D1
DE69817652D1 DE69817652T DE69817652T DE69817652D1 DE 69817652 D1 DE69817652 D1 DE 69817652D1 DE 69817652 T DE69817652 T DE 69817652T DE 69817652 T DE69817652 T DE 69817652T DE 69817652 D1 DE69817652 D1 DE 69817652D1
Authority
DE
Germany
Prior art keywords
delay line
movable cutting
cutting discs
acoustic delay
acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69817652T
Other languages
English (en)
Other versions
DE69817652T2 (de
Inventor
Eijiro Toyota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Publication of DE69817652D1 publication Critical patent/DE69817652D1/de
Application granted granted Critical
Publication of DE69817652T2 publication Critical patent/DE69817652T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/14—Vacuum chambers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Particle Accelerators (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE69817652T 1997-04-04 1998-04-03 Akustische Verzögerungsleitung mit bewegbaren Trennscheiben Expired - Fee Related DE69817652T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10084497A JP3190596B2 (ja) 1997-04-04 1997-04-04 Ｘ線リソグラフィ用ビームラインの音波衝撃遅延管路
JP10084497 1997-04-04

Publications (2)

Publication Number Publication Date
DE69817652D1 true DE69817652D1 (de) 2003-10-09
DE69817652T2 DE69817652T2 (de) 2004-07-01

Family

ID=14284635

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69817652T Expired - Fee Related DE69817652T2 (de) 1997-04-04 1998-04-03 Akustische Verzögerungsleitung mit bewegbaren Trennscheiben

Country Status (5)

Country Link
US (1) US6031889A (de)
EP (1) EP0869703B1 (de)
JP (1) JP3190596B2 (de)
CN (1) CN1147210C (de)
DE (1) DE69817652T2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103298236A (zh) * 2013-06-13 2013-09-11 无锡爱邦辐射技术有限公司 电子加速器安置扫描盒

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1051867A (de) * 1900-01-01
US5031199A (en) * 1990-06-05 1991-07-09 Wisconsin Alumni Research Foundation X-ray lithography beamline method and apparatus

Also Published As

Publication number Publication date
EP0869703A1 (de) 1998-10-07
EP0869703B1 (de) 2003-09-03
DE69817652T2 (de) 2004-07-01
JP3190596B2 (ja) 2001-07-23
CN1206200A (zh) 1999-01-27
CN1147210C (zh) 2004-04-21
JPH10282299A (ja) 1998-10-23
US6031889A (en) 2000-02-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee