DE69808723D1 - Anordnung mit verformbarem Spiegel - Google Patents

Anordnung mit verformbarem Spiegel

Info

Publication number
DE69808723D1
DE69808723D1 DE69808723T DE69808723T DE69808723D1 DE 69808723 D1 DE69808723 D1 DE 69808723D1 DE 69808723 T DE69808723 T DE 69808723T DE 69808723 T DE69808723 T DE 69808723T DE 69808723 D1 DE69808723 D1 DE 69808723D1
Authority
DE
Germany
Prior art keywords
arrangement
deformable mirror
deformable
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69808723T
Other languages
English (en)
Other versions
DE69808723T2 (de
Inventor
Yong-Seop Yoon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of DE69808723D1 publication Critical patent/DE69808723D1/de
Publication of DE69808723T2 publication Critical patent/DE69808723T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
DE69808723T 1997-12-31 1998-07-03 Anordnung mit verformbarem Spiegel Expired - Fee Related DE69808723T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019970082105A KR100263891B1 (ko) 1997-12-31 1997-12-31 가동미러장치

Publications (2)

Publication Number Publication Date
DE69808723D1 true DE69808723D1 (de) 2002-11-21
DE69808723T2 DE69808723T2 (de) 2003-02-27

Family

ID=19530751

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69808723T Expired - Fee Related DE69808723T2 (de) 1997-12-31 1998-07-03 Anordnung mit verformbarem Spiegel

Country Status (6)

Country Link
US (1) US5978128A (de)
EP (1) EP0927903B1 (de)
JP (1) JP2941788B2 (de)
KR (1) KR100263891B1 (de)
CN (1) CN1105933C (de)
DE (1) DE69808723T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6178033B1 (en) * 1999-03-28 2001-01-23 Lucent Technologies Micromechanical membrane tilt-mirror switch
KR100349941B1 (ko) * 2000-09-29 2002-08-24 삼성전자 주식회사 광 스위칭을 위한 마이크로 액추에이터 및 그 제조방법
US6343178B1 (en) 2000-11-07 2002-01-29 Integrated Micromachines, Inc. Micromachined voltage controlled optical attenuator
KR100464320B1 (ko) * 2002-11-19 2004-12-31 삼성전자주식회사 마이크로미러 액츄에이터 및 그 제조방법
US6876484B2 (en) * 2003-03-24 2005-04-05 Lucent Technologies Inc. Deformable segmented MEMS mirror
CN100368862C (zh) * 2004-01-16 2008-02-13 侯继东 一种可调反射式装置
CN100434962C (zh) * 2004-03-24 2008-11-19 德克萨斯仪器股份有限公司 具有中心脊部和周界棘状突起以减少挠曲的扭转铰接镜组件
DE112005003758B4 (de) * 2005-11-25 2011-12-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Auslenkbares mikromechanisches Element
KR101177167B1 (ko) * 2006-12-12 2012-08-24 엔엑스피 비 브이 Ｍｅｍｓ 디바이스, 전자 디바이스, ｍｅｍｓ 디바이스 제조 방법 및 전자 디바이스 동작 방법
US8491121B2 (en) * 2007-10-09 2013-07-23 Elbit Systems Of America, Llc Pupil scan apparatus
CN101515065B (zh) * 2009-02-26 2011-05-04 中国科学院光电技术研究所 一种基于杠杆放大原理的静电驱动mems变形镜
US8982480B2 (en) 2009-12-29 2015-03-17 Elbit Systems Of America, Llc System and method for adjusting a projected image
US8905547B2 (en) 2010-01-04 2014-12-09 Elbit Systems Of America, Llc System and method for efficiently delivering rays from a light source to create an image
CN103257448B (zh) * 2012-12-28 2016-06-08 清华大学 变形镜
JP6507500B2 (ja) * 2014-07-01 2019-05-08 セイコーエプソン株式会社 光学デバイスおよび画像表示装置
US11408788B2 (en) * 2020-03-31 2022-08-09 Toyota Research Institute, Inc. Variable geometry and stiffness control for fluid filled sensor
CN114690400B (zh) * 2020-12-29 2023-05-02 极米科技股份有限公司 一种静电力驱动方式的振镜
CN115236850B (zh) * 2021-04-23 2024-03-15 成都极米科技股份有限公司 一种控制振镜实现2倍和4倍像素点提升的方法及投影仪

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4317611A (en) * 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
US5526172A (en) * 1993-07-27 1996-06-11 Texas Instruments Incorporated Microminiature, monolithic, variable electrical signal processor and apparatus including same
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US5696619A (en) * 1995-02-27 1997-12-09 Texas Instruments Incorporated Micromechanical device having an improved beam
US5629794A (en) * 1995-05-31 1997-05-13 Texas Instruments Incorporated Spatial light modulator having an analog beam for steering light
US5739941A (en) * 1995-07-20 1998-04-14 Texas Instruments Incorporated Non-linear hinge for micro-mechanical device
US5774604A (en) * 1996-10-23 1998-06-30 Texas Instruments Incorporated Using an asymmetric element to create a 1XN optical switch
KR100259151B1 (ko) * 1997-08-26 2000-06-15 윤종용 비대칭강성구조를 갖는 광 경로 변환 액츄에이터 및 그의 구동방법

Also Published As

Publication number Publication date
CN1105933C (zh) 2003-04-16
EP0927903A3 (de) 2000-08-23
DE69808723T2 (de) 2003-02-27
JPH11202224A (ja) 1999-07-30
EP0927903B1 (de) 2002-10-16
JP2941788B2 (ja) 1999-08-30
KR19990061815A (ko) 1999-07-26
KR100263891B1 (ko) 2000-08-16
CN1221889A (zh) 1999-07-07
EP0927903A2 (de) 1999-07-07
US5978128A (en) 1999-11-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee