DE69806357D1 - Verfahren zur Herstellung fotowirksamer Coumarinderivate - Google Patents
Verfahren zur Herstellung fotowirksamer CoumarinderivateInfo
- Publication number
- DE69806357D1 DE69806357D1 DE69806357T DE69806357T DE69806357D1 DE 69806357 D1 DE69806357 D1 DE 69806357D1 DE 69806357 T DE69806357 T DE 69806357T DE 69806357 T DE69806357 T DE 69806357T DE 69806357 D1 DE69806357 D1 DE 69806357D1
- Authority
- DE
- Germany
- Prior art keywords
- photo
- preparation
- coumarin derivatives
- effective
- effective coumarin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D311/00—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only hetero atom, condensed with other rings
- C07D311/02—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only hetero atom, condensed with other rings ortho- or peri-condensed with carbocyclic rings or ring systems
- C07D311/04—Benzo[b]pyrans, not hydrogenated in the carbocyclic ring
- C07D311/42—Benzo[b]pyrans, not hydrogenated in the carbocyclic ring with oxygen or sulfur atoms in positions 2 and 4
- C07D311/56—Benzo[b]pyrans, not hydrogenated in the carbocyclic ring with oxygen or sulfur atoms in positions 2 and 4 without hydrogen atoms in position 3
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Furan Compounds (AREA)
- Plural Heterocyclic Compounds (AREA)
- Heterocyclic Carbon Compounds Containing A Hetero Ring Having Oxygen Or Sulfur (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/813,098 US5726296A (en) | 1997-03-07 | 1997-03-07 | Process for preparing photoactive coumarin derivatives |
PCT/US1998/003426 WO1998039317A1 (en) | 1997-03-07 | 1998-02-23 | Process for preparing photoactive coumarin derivatives |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69806357D1 true DE69806357D1 (de) | 2002-08-08 |
DE69806357T2 DE69806357T2 (de) | 2003-01-23 |
Family
ID=25211447
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69806357T Expired - Fee Related DE69806357T2 (de) | 1997-03-07 | 1998-02-23 | Verfahren zur Herstellung fotowirksamer Coumarinderivate |
Country Status (8)
Country | Link |
---|---|
US (1) | US5726296A (de) |
EP (1) | EP0968202B1 (de) |
JP (1) | JP2002504891A (de) |
KR (1) | KR100456687B1 (de) |
CN (1) | CN1254338A (de) |
DE (1) | DE69806357T2 (de) |
TW (1) | TW589304B (de) |
WO (1) | WO1998039317A1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10038201A1 (de) * | 2000-08-04 | 2002-02-14 | Siemens Axiva Gmbh & Co Kg | Neue Elektrolyte für Elektrolytkondensatoren und deren Verwendung |
EP1650200A4 (de) | 2003-07-11 | 2008-03-19 | Osaka Ind Promotion Org | Sulfonatverbindung und fluoreszenzsonde, bei der diese verwendet wird |
WO2005005401A1 (ja) | 2003-07-11 | 2005-01-20 | Osaka Industrial Promotion Organization | スルホン酸エステル化合物およびそれを用いた蛍光プローブ |
CN108630371B (zh) * | 2017-03-17 | 2020-03-27 | 有研稀土新材料股份有限公司 | 一种高热稳定性的稀土永磁材料、其制备方法及含有其的磁体 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB772517A (en) * | 1954-02-06 | 1957-04-17 | Kalle & Co Ag | Improvements in or relating to photo-mechanical reproduction |
US4211791A (en) * | 1975-09-23 | 1980-07-08 | Beecham Group Limited | Indanediones |
US4339552A (en) * | 1978-09-18 | 1982-07-13 | National Starch & Chemical Corporation | Vinyl ester aqueous adhesive emulsions including acrylamide |
US4588670A (en) * | 1985-02-28 | 1986-05-13 | American Hoechst Corporation | Light-sensitive trisester of O-quinone diazide containing composition for the preparation of a positive-acting photoresist |
DE3721851A1 (de) * | 1987-07-02 | 1989-01-12 | Bayer Ag | Herstellung von diazo- und azoverbindungen |
US4853315A (en) * | 1988-01-15 | 1989-08-01 | International Business Machines Corporation | O-quinone diazide sulfonic acid monoesters useful as sensitizers for positive resists |
JPH0261640A (ja) * | 1988-08-26 | 1990-03-01 | Toshiba Corp | 感光性組成物 |
JP2825543B2 (ja) * | 1989-08-23 | 1998-11-18 | 日本化薬株式会社 | ネガ型放射線感応性樹脂組成物 |
JP2571136B2 (ja) * | 1989-11-17 | 1997-01-16 | 日本ゼオン株式会社 | ポジ型レジスト組成物 |
JPH07199455A (ja) * | 1993-12-28 | 1995-08-04 | Tokyo Ohka Kogyo Co Ltd | ポジ型ホトレジスト組成物 |
US5541033A (en) * | 1995-02-01 | 1996-07-30 | Ocg Microelectronic Materials, Inc. | Selected o-quinonediazide sulfonic acid esters of phenolic compounds and their use in radiation-sensitive compositions |
-
1997
- 1997-03-07 US US08/813,098 patent/US5726296A/en not_active Expired - Fee Related
-
1998
- 1998-02-23 EP EP98906630A patent/EP0968202B1/de not_active Expired - Lifetime
- 1998-02-23 WO PCT/US1998/003426 patent/WO1998039317A1/en active IP Right Grant
- 1998-02-23 CN CN98803156A patent/CN1254338A/zh active Pending
- 1998-02-23 JP JP53704998A patent/JP2002504891A/ja active Pending
- 1998-02-23 KR KR10-1999-7008100A patent/KR100456687B1/ko not_active IP Right Cessation
- 1998-02-23 DE DE69806357T patent/DE69806357T2/de not_active Expired - Fee Related
- 1998-02-27 TW TW087102886A patent/TW589304B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR100456687B1 (ko) | 2004-11-10 |
US5726296A (en) | 1998-03-10 |
EP0968202B1 (de) | 2002-07-03 |
TW589304B (en) | 2004-06-01 |
JP2002504891A (ja) | 2002-02-12 |
KR20000076014A (ko) | 2000-12-26 |
EP0968202A1 (de) | 2000-01-05 |
WO1998039317A1 (en) | 1998-09-11 |
DE69806357T2 (de) | 2003-01-23 |
CN1254338A (zh) | 2000-05-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |