DE69738279D1 - Vertikale Positionierung eines optoelektronischen Bauelements auf einem Träger in Bezug auf einen, auf diesem Träger integrierten optischer Leiter - Google Patents

Vertikale Positionierung eines optoelektronischen Bauelements auf einem Träger in Bezug auf einen, auf diesem Träger integrierten optischer Leiter

Info

Publication number
DE69738279D1
DE69738279D1 DE69738279T DE69738279T DE69738279D1 DE 69738279 D1 DE69738279 D1 DE 69738279D1 DE 69738279 T DE69738279 T DE 69738279T DE 69738279 T DE69738279 T DE 69738279T DE 69738279 D1 DE69738279 D1 DE 69738279D1
Authority
DE
Germany
Prior art keywords
carrier
respect
optoelectronic component
vertical positioning
optical conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69738279T
Other languages
English (en)
Other versions
DE69738279T2 (de
Inventor
Gilles Grand
Pierre Gidon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69738279D1 publication Critical patent/DE69738279D1/de
Publication of DE69738279T2 publication Critical patent/DE69738279T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4234—Passive alignment along the optical axis and active alignment perpendicular to the optical axis
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12178—Epitaxial growth

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
DE69738279T 1996-06-06 1997-06-04 Vertikale Positionierung eines optoelektronischen Bauelements auf einem Träger in Bezug auf einen, auf diesem Träger integrierten optischer Leiter Expired - Lifetime DE69738279T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9606999A FR2749672B1 (fr) 1996-06-06 1996-06-06 Positionnement vertical d'un composant optoelectronique sur un support, en regard d'un guide optique integre a ce support
FR9606999 1996-06-06

Publications (2)

Publication Number Publication Date
DE69738279D1 true DE69738279D1 (de) 2007-12-27
DE69738279T2 DE69738279T2 (de) 2008-09-11

Family

ID=9492774

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69738279T Expired - Lifetime DE69738279T2 (de) 1996-06-06 1997-06-04 Vertikale Positionierung eines optoelektronischen Bauelements auf einem Träger in Bezug auf einen, auf diesem Träger integrierten optischer Leiter

Country Status (5)

Country Link
US (1) US6009218A (de)
EP (1) EP0811863B1 (de)
JP (1) JPH1073734A (de)
DE (1) DE69738279T2 (de)
FR (1) FR2749672B1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2985830B2 (ja) 1997-05-19 1999-12-06 日本電気株式会社 光モジュール及びその製造方法
JP4129071B2 (ja) * 1998-03-20 2008-07-30 富士通株式会社 半導体部品および半導体実装装置
US6217232B1 (en) * 1998-03-24 2001-04-17 Micron Technology, Inc. Method and apparatus for aligning an optic fiber with an opto-electronic device
JP4652507B2 (ja) * 1998-12-25 2011-03-16 古河電気工業株式会社 光導波路回路とその製造方法
US6614966B2 (en) 2000-03-22 2003-09-02 Matsushita Electric Industrial Co., Ltd. Optical waveguide device integrated module and method of manufacturing the same
KR100326317B1 (ko) * 2000-07-06 2002-03-08 윤종용 실리카 미세 구조물의 제작 방법
US6640021B2 (en) 2001-12-11 2003-10-28 International Business Machines Corporation Fabrication of a hybrid integrated circuit device including an optoelectronic chip
DE10208463B4 (de) * 2002-02-27 2012-04-05 Osram Opto Semiconductors Gmbh Halbleiterlaservorrichtung und Verfahren zu deren Herstellung
JP2007057972A (ja) * 2005-08-25 2007-03-08 Nec Electronics Corp 光モジュール
US11181688B2 (en) 2009-10-13 2021-11-23 Skorpios Technologies, Inc. Integration of an unprocessed, direct-bandgap chip into a silicon photonic device
US9923105B2 (en) 2013-10-09 2018-03-20 Skorpios Technologies, Inc. Processing of a direct-bandgap chip after bonding to a silicon photonic device
KR20220024797A (ko) * 2019-07-25 2022-03-03 교세라 가부시키가이샤 광회로 기판 및 그것을 사용한 전자 부품 실장 구조체

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2694841B1 (fr) * 1992-08-14 1994-09-09 Commissariat Energie Atomique Procédé d'hybridation et de positionnement d'un composant opto-électronique et application de ce procédé au positionnement de ce composant par rapport à un guide optique intégré.
JP3117107B2 (ja) * 1993-08-03 2000-12-11 シャープ株式会社 光集積回路素子の組立構造
SE513183C2 (sv) * 1994-03-18 2000-07-24 Ericsson Telefon Ab L M Förfarande för framställning av en optokomponent samt kapslad optokomponent

Also Published As

Publication number Publication date
DE69738279T2 (de) 2008-09-11
FR2749672B1 (fr) 1998-07-03
EP0811863A1 (de) 1997-12-10
JPH1073734A (ja) 1998-03-17
EP0811863B1 (de) 2007-11-14
FR2749672A1 (fr) 1997-12-12
US6009218A (en) 1999-12-28

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