DE69736999D1 - Automatisierte, nicht-visuelle Methode und System, um periodisch angeordnete Submikron-Objekte zu lokalisieren - Google Patents

Automatisierte, nicht-visuelle Methode und System, um periodisch angeordnete Submikron-Objekte zu lokalisieren

Info

Publication number
DE69736999D1
DE69736999D1 DE69736999T DE69736999T DE69736999D1 DE 69736999 D1 DE69736999 D1 DE 69736999D1 DE 69736999 T DE69736999 T DE 69736999T DE 69736999 T DE69736999 T DE 69736999T DE 69736999 D1 DE69736999 D1 DE 69736999D1
Authority
DE
Germany
Prior art keywords
locate
automated
periodically arranged
visual method
submicron objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69736999T
Other languages
English (en)
Other versions
DE69736999T2 (de
Inventor
Ernest Levine
Norbert Arnold
Klaus Hummler
Rainer Weiland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qimonda AG
International Business Machines Corp
Original Assignee
Infineon Technologies AG
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG, International Business Machines Corp filed Critical Infineon Technologies AG
Application granted granted Critical
Publication of DE69736999D1 publication Critical patent/DE69736999D1/de
Publication of DE69736999T2 publication Critical patent/DE69736999T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE69736999T 1996-03-29 1997-03-19 Automatisierte, nicht-visuelle Methode und System, um periodisch angeordnete Submikron-Objekte zu lokalisieren Expired - Fee Related DE69736999T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US626192 1996-03-29
US08/626,192 US5747802A (en) 1996-03-29 1996-03-29 Automated non-visual method of locating periodically arranged sub-micron objects

Publications (2)

Publication Number Publication Date
DE69736999D1 true DE69736999D1 (de) 2007-01-11
DE69736999T2 DE69736999T2 (de) 2007-10-18

Family

ID=24509351

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69736999T Expired - Fee Related DE69736999T2 (de) 1996-03-29 1997-03-19 Automatisierte, nicht-visuelle Methode und System, um periodisch angeordnete Submikron-Objekte zu lokalisieren

Country Status (7)

Country Link
US (1) US5747802A (de)
EP (1) EP0798774B1 (de)
JP (1) JP3884820B2 (de)
KR (1) KR970066636A (de)
CN (1) CN1095094C (de)
DE (1) DE69736999T2 (de)
TW (1) TW319883B (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7345786B2 (en) * 2003-02-18 2008-03-18 Xerox Corporation Method for color cast removal in scanned images
US7417234B2 (en) * 2004-05-17 2008-08-26 Massachusetts Institute Of Technology Spatial-phase locking of energy beams for determining two-dimensional location and beam shape

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4327292A (en) * 1980-05-13 1982-04-27 Hughes Aircraft Company Alignment process using serial detection of repetitively patterned alignment marks
JP2723508B2 (ja) * 1985-10-21 1998-03-09 日本電気株式会社 電子線直接描画のためのアライメント方法
US4885472A (en) * 1988-03-14 1989-12-05 The Perkin-Elmer Corporation Silicon grid as a reference and calibration standard in a particle beam lithography system
US5136169A (en) * 1991-04-05 1992-08-04 Massachusetts Institute Of Technology Energy beam locating
JPH0562638A (ja) * 1991-09-04 1993-03-12 Hitachi Ltd 集束イオンビーム装置
US5401972A (en) * 1993-09-02 1995-03-28 Schlumberger Technologies, Inc. Layout overlay for FIB operations

Also Published As

Publication number Publication date
DE69736999T2 (de) 2007-10-18
KR970066636A (ko) 1997-10-13
EP0798774B1 (de) 2006-11-29
EP0798774A2 (de) 1997-10-01
CN1165323A (zh) 1997-11-19
TW319883B (de) 1997-11-11
JPH109843A (ja) 1998-01-16
CN1095094C (zh) 2002-11-27
JP3884820B2 (ja) 2007-02-21
US5747802A (en) 1998-05-05
EP0798774A3 (de) 1998-06-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: INTERNATIONAL BUSINESS MACHINES CORP., ARMONK,, US

Owner name: QIMONDA AG, 81739 MUENCHEN, DE

8339 Ceased/non-payment of the annual fee