DE69735148T2 - Verbesserung des Signal-Rauschverhältnisses eines 2. harmonischen Interferometers - Google Patents

Verbesserung des Signal-Rauschverhältnisses eines 2. harmonischen Interferometers Download PDF

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Publication number
DE69735148T2
DE69735148T2 DE69735148T DE69735148T DE69735148T2 DE 69735148 T2 DE69735148 T2 DE 69735148T2 DE 69735148 T DE69735148 T DE 69735148T DE 69735148 T DE69735148 T DE 69735148T DE 69735148 T2 DE69735148 T2 DE 69735148T2
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DE
Germany
Prior art keywords
optical
reflected
frequency
harmonic
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69735148T
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German (de)
English (en)
Other versions
DE69735148D1 (de
Inventor
Paul Mt View Zorabedian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
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Publication of DE69735148D1 publication Critical patent/DE69735148D1/de
Publication of DE69735148T2 publication Critical patent/DE69735148T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/0201—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
DE69735148T 1996-11-14 1997-06-19 Verbesserung des Signal-Rauschverhältnisses eines 2. harmonischen Interferometers Expired - Fee Related DE69735148T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/746,683 US5748313A (en) 1996-11-14 1996-11-14 Signal-to-noise ratio of second harmonic interferometers
US746683 1996-11-14

Publications (2)

Publication Number Publication Date
DE69735148D1 DE69735148D1 (de) 2006-04-13
DE69735148T2 true DE69735148T2 (de) 2006-07-20

Family

ID=25001886

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69735148T Expired - Fee Related DE69735148T2 (de) 1996-11-14 1997-06-19 Verbesserung des Signal-Rauschverhältnisses eines 2. harmonischen Interferometers

Country Status (5)

Country Link
US (1) US5748313A (enExample)
EP (1) EP0843152B1 (enExample)
JP (1) JPH10153403A (enExample)
DE (1) DE69735148T2 (enExample)
SG (1) SG54508A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022120607A1 (de) 2022-08-16 2024-02-22 Deutsches Zentrum für Luft- und Raumfahrt e.V. Optische Vorrichtung, System und Verfahren zur Dispersionsinterferometrie

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6157458A (en) * 1998-04-30 2000-12-05 Agilent Technologies Achromatic quarter wave plate for an air turbulence compensating inteferometer
US6014216A (en) * 1999-01-08 2000-01-11 Hewlett-Packard Company Architecture for air-turbulence-compensated dual-wavelength heterodyne interferometer
US6256102B1 (en) 1999-04-27 2001-07-03 University Of Central Florida Dual-beam low-coherence interferometer with improved signal-to-noise ratio
US6724486B1 (en) 1999-04-28 2004-04-20 Zygo Corporation Helium- Neon laser light source generating two harmonically related, single- frequency wavelengths for use in displacement and dispersion measuring interferometry
US6417927B2 (en) * 1999-04-28 2002-07-09 Zygo Corporation Method and apparatus for accurately compensating both long and short term fluctuations in the refractive index of air in an interferometer
EP1160627A3 (en) * 2000-06-01 2004-08-18 ASML Netherlands B.V. Lithographic apparatus, device manufacturing method, and device manufactured thereby
US7508487B2 (en) 2000-06-01 2009-03-24 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method, and device manufactured thereby
US6816264B1 (en) * 2001-12-21 2004-11-09 Itt Manufacturing Enterprises, Inc. Systems and methods for amplified optical metrology
TWI304157B (en) * 2002-11-27 2008-12-11 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
US7826063B2 (en) 2005-04-29 2010-11-02 Zygo Corporation Compensation of effects of atmospheric perturbations in optical metrology
US20070077071A1 (en) * 2005-09-30 2007-04-05 Mikhail Belenkiy System for measuring atmospheric turbulence
WO2008051232A2 (en) * 2006-10-25 2008-05-02 Zygo Corporation Compensation of effects of atmospheric perturbations in optical metrology
JP5276595B2 (ja) 2006-11-15 2013-08-28 ザイゴ コーポレーション リソグラフィツールにおいて使用される距離測定干渉計及びエンコーダ測定システム
US7894075B2 (en) 2006-12-11 2011-02-22 Zygo Corporation Multiple-degree of freedom interferometer with compensation for gas effects
WO2008073454A2 (en) 2006-12-11 2008-06-19 Zygo Corporation Multiple-degree of freedom interferometer with compensation for gas effects
CN101413783B (zh) 2008-07-23 2012-06-27 中国航空工业第一集团公司北京长城计量测试技术研究所 双频激光干涉测量装置
CN101614523B (zh) * 2009-08-10 2010-10-27 中国科学院长春光学精密机械与物理研究所 一种检测掠射筒状离轴非球面镜的多光束长轨干涉仪
GB201411206D0 (en) * 2014-06-24 2014-08-06 Sec Dep For Business Innovation & Skills The And Usw Commercial Services Ltd Dual laser frequency sweep interferometry system and method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5404222A (en) * 1994-01-14 1995-04-04 Sparta, Inc. Interferametric measuring system with air turbulence compensation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022120607A1 (de) 2022-08-16 2024-02-22 Deutsches Zentrum für Luft- und Raumfahrt e.V. Optische Vorrichtung, System und Verfahren zur Dispersionsinterferometrie
DE102022120607B4 (de) 2022-08-16 2024-08-01 Deutsches Zentrum für Luft- und Raumfahrt e.V. Optische Vorrichtung, System und Verfahren zur Dispersionsinterferometrie

Also Published As

Publication number Publication date
EP0843152B1 (en) 2006-01-25
EP0843152A3 (en) 2000-02-23
EP0843152A2 (en) 1998-05-20
JPH10153403A (ja) 1998-06-09
US5748313A (en) 1998-05-05
SG54508A1 (en) 1998-11-16
DE69735148D1 (de) 2006-04-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US

8339 Ceased/non-payment of the annual fee