DE69730429D1 - Verfahren zum kontinuierlichen beschichten eines sich bewegenden substrats mit einem metalldampf - Google Patents

Verfahren zum kontinuierlichen beschichten eines sich bewegenden substrats mit einem metalldampf

Info

Publication number
DE69730429D1
DE69730429D1 DE69730429T DE69730429T DE69730429D1 DE 69730429 D1 DE69730429 D1 DE 69730429D1 DE 69730429 T DE69730429 T DE 69730429T DE 69730429 T DE69730429 T DE 69730429T DE 69730429 D1 DE69730429 D1 DE 69730429D1
Authority
DE
Germany
Prior art keywords
metal vapor
moving substrate
continuously coating
coating
continuously
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69730429T
Other languages
English (en)
Other versions
DE69730429T2 (de
Inventor
Robert Colin
Marios Economopoulos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre de Recherches Metallurgiques CRM ASBL
Original Assignee
Centre de Recherches Metallurgiques CRM ASBL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre de Recherches Metallurgiques CRM ASBL filed Critical Centre de Recherches Metallurgiques CRM ASBL
Publication of DE69730429D1 publication Critical patent/DE69730429D1/de
Application granted granted Critical
Publication of DE69730429T2 publication Critical patent/DE69730429T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE69730429T 1996-06-13 1997-06-09 Verfahren zum kontinuierlichen beschichten eines sich bewegenden substrats mit einem metalldampf Expired - Lifetime DE69730429T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
BE9600542A BE1010351A6 (fr) 1996-06-13 1996-06-13 Procede et dispositif pour revetir en continu un substrat en mouvement au moyen d'une vapeur metallique.
BE9600542 1996-06-13
PCT/BE1997/000066 WO1997047782A1 (fr) 1996-06-13 1997-06-09 Procede et dispositif pour revetir en continu un substrat en mouvement au moyen d'une vapeur metallique

Publications (2)

Publication Number Publication Date
DE69730429D1 true DE69730429D1 (de) 2004-09-30
DE69730429T2 DE69730429T2 (de) 2005-09-15

Family

ID=3889808

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69730429T Expired - Lifetime DE69730429T2 (de) 1996-06-13 1997-06-09 Verfahren zum kontinuierlichen beschichten eines sich bewegenden substrats mit einem metalldampf

Country Status (4)

Country Link
EP (1) EP0909342B1 (de)
BE (1) BE1010351A6 (de)
DE (1) DE69730429T2 (de)
WO (1) WO1997047782A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1174526A1 (de) * 2000-07-17 2002-01-23 Nederlandse Organisatie voor Toegepast Natuurwetenschappelijk Onderzoek TNO Kontinuierliches Abscheiden aus der Gasphase
DE102004041855B4 (de) * 2004-04-27 2007-09-13 Von Ardenne Anlagentechnik Gmbh Vorrichtung und Verfahren zur kontinuierlichen thermischen Vakuumbeschichtung
EP1972699A1 (de) * 2007-03-20 2008-09-24 ArcelorMittal France Verfahren zur Beschichtung eines Substrats unter Vakuum
EP2048261A1 (de) 2007-10-12 2009-04-15 ArcelorMittal France Industrieller Dampferzeuger zum Aufbringen einer Legierungsschicht auf einem Metallband
EP2199425A1 (de) 2008-12-18 2010-06-23 ArcelorMittal France Industrieller Dampferzeuger zum Aufbringen einer Legierungsschicht auf einem Metallband (II)
DE102009019146B4 (de) * 2009-04-29 2014-07-24 THEVA DüNNSCHICHTTECHNIK GMBH Verfahren und Vorrichtung zur Hochratenbeschichtung durch Hochdruckverdampfen
US10011905B2 (en) 2011-01-14 2018-07-03 Arcelormittal Investigacion Y Desarrollo Sl Automatic supply device for an industrial metal vapor generator
UA117592C2 (uk) 2013-08-01 2018-08-27 Арселорміттал Пофарбований оцинкований сталевий лист та спосіб його виготовлення
WO2018020296A1 (en) 2016-07-27 2018-02-01 Arcelormittal Apparatus and method for vacuum deposition
WO2019116082A1 (en) 2017-12-14 2019-06-20 Arcelormittal Vacuum deposition facility and method for coating a substrate
WO2019116081A1 (en) * 2017-12-14 2019-06-20 Arcelormittal Vacuum deposition facility and method for coating a substrate
WO2019239184A1 (en) * 2018-06-13 2019-12-19 Arcelormittal Vacuum deposition facility and method for coating a substrate
WO2019239186A1 (en) * 2018-06-13 2019-12-19 Arcelormittal Vacuum deposition facility and method for coating a substrate
WO2019239185A1 (en) * 2018-06-13 2019-12-19 Arcelormittal Vacuum deposition facility and method for coating a substrate
WO2019239192A1 (en) * 2018-06-15 2019-12-19 Arcelormittal Vacuum deposition facility and method for coating a substrate
WO2023062410A1 (en) 2021-10-14 2023-04-20 Arcelormittal Vapour nozzle for pvd
WO2023067371A1 (en) 2021-10-19 2023-04-27 Arcelormittal Surface preparation for jvd

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1164034A (fr) * 1956-12-27 1958-10-06 Perfectionnements aux creusets pour le dépôt de couches métallisées
JPS6353259A (ja) * 1986-08-22 1988-03-07 Mitsubishi Electric Corp 薄膜形成方法
DE4225169C2 (de) * 1992-07-30 1994-09-22 Juergen Dipl Phys Dr Gspann Vorrichtung und Verfahren zur Erzeugung von Agglomeratstrahlen
WO1996035822A1 (fr) * 1995-05-10 1996-11-14 Centre De Recherches Metallurgiques - Centrum Voor Research In De Metallurgie Dispositif et installation pour revetir une bande d'acier

Also Published As

Publication number Publication date
EP0909342A1 (de) 1999-04-21
EP0909342B1 (de) 2004-08-25
BE1010351A6 (fr) 1998-06-02
DE69730429T2 (de) 2005-09-15
WO1997047782A1 (fr) 1997-12-18

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Legal Events

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