DE69724746D1 - Kanalsystem für Ventilanlage - Google Patents

Kanalsystem für Ventilanlage

Info

Publication number
DE69724746D1
DE69724746D1 DE69724746T DE69724746T DE69724746D1 DE 69724746 D1 DE69724746 D1 DE 69724746D1 DE 69724746 T DE69724746 T DE 69724746T DE 69724746 T DE69724746 T DE 69724746T DE 69724746 D1 DE69724746 D1 DE 69724746D1
Authority
DE
Germany
Prior art keywords
channel
valve
valve system
channel system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69724746T
Other languages
English (en)
Other versions
DE69724746T2 (de
Inventor
David K Biegelsen
Warren B Jackson
Patrick C P Cheung
Mark H Yim
Andrew A Berlin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Application granted granted Critical
Publication of DE69724746D1 publication Critical patent/DE69724746D1/de
Publication of DE69724746T2 publication Critical patent/DE69724746T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
    • B32B3/10—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a discontinuous layer, i.e. formed of separate pieces of material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0011—Gate valves or sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0036—Operating means specially adapted for microvalves operated by temperature variations
    • F16K99/0038—Operating means specially adapted for microvalves operated by temperature variations using shape memory alloys
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0046—Electric operating means therefor using magnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2201/00—Properties
    • C08L2201/12—Shape memory
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K2099/0069—Bistable microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0076—Fabrication methods specifically adapted for microvalves using electrical discharge machining [EDM], milling or drilling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0078—Fabrication methods specifically adapted for microvalves using moulding or stamping
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Metallurgy (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Micromachines (AREA)
  • Magnetically Actuated Valves (AREA)
DE69724746T 1996-11-27 1997-11-26 Kanalsystem für Ventilanlage Expired - Fee Related DE69724746T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US757358 1985-07-22
US08/757,358 US6123316A (en) 1996-11-27 1996-11-27 Conduit system for a valve array

Publications (2)

Publication Number Publication Date
DE69724746D1 true DE69724746D1 (de) 2003-10-16
DE69724746T2 DE69724746T2 (de) 2004-03-25

Family

ID=25047509

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69724746T Expired - Fee Related DE69724746T2 (de) 1996-11-27 1997-11-26 Kanalsystem für Ventilanlage

Country Status (4)

Country Link
US (1) US6123316A (de)
EP (1) EP0846875B1 (de)
JP (1) JPH10169827A (de)
DE (1) DE69724746T2 (de)

Families Citing this family (95)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5839722A (en) * 1996-11-26 1998-11-24 Xerox Corporation Paper handling system having embedded control structures
US6935724B2 (en) 1997-07-15 2005-08-30 Silverbrook Research Pty Ltd Ink jet nozzle having actuator with anchor positioned between nozzle chamber and actuator connection point
US7556356B1 (en) 1997-07-15 2009-07-07 Silverbrook Research Pty Ltd Inkjet printhead integrated circuit with ink spread prevention
US7195339B2 (en) 1997-07-15 2007-03-27 Silverbrook Research Pty Ltd Ink jet nozzle assembly with a thermal bend actuator
US7468139B2 (en) 1997-07-15 2008-12-23 Silverbrook Research Pty Ltd Method of depositing heater material over a photoresist scaffold
US6648453B2 (en) * 1997-07-15 2003-11-18 Silverbrook Research Pty Ltd Ink jet printhead chip with predetermined micro-electromechanical systems height
US6682174B2 (en) 1998-03-25 2004-01-27 Silverbrook Research Pty Ltd Ink jet nozzle arrangement configuration
US6855264B1 (en) 1997-07-15 2005-02-15 Kia Silverbrook Method of manufacture of an ink jet printer having a thermal actuator comprising an external coil spring
US6712453B2 (en) 1997-07-15 2004-03-30 Silverbrook Research Pty Ltd. Ink jet nozzle rim
US7465030B2 (en) 1997-07-15 2008-12-16 Silverbrook Research Pty Ltd Nozzle arrangement with a magnetic field generator
US7337532B2 (en) 1997-07-15 2008-03-04 Silverbrook Research Pty Ltd Method of manufacturing micro-electromechanical device having motion-transmitting structure
DK1065378T3 (da) * 1999-06-28 2002-07-29 California Inst Of Techn Elastomere mikropumpe- og mikroventilsystemer
AU7854700A (en) * 1999-10-04 2001-05-10 Nanostream, Inc. Modular microfluidic devices comprising sandwiched stencils
KR100343211B1 (ko) * 1999-11-04 2002-07-10 윤종용 웨이퍼 레벨 진공 패키징이 가능한 ｍｅｍｓ의 구조물의제작방법
US20020112961A1 (en) * 1999-12-02 2002-08-22 Nanostream, Inc. Multi-layer microfluidic device fabrication
US6561208B1 (en) 2000-04-14 2003-05-13 Nanostream, Inc. Fluidic impedances in microfluidic system
EP1283957B1 (de) * 2000-05-25 2005-10-26 Debiotech S.A. Microbearbeitete fluidische vorrichtung und herstellungsverfahren
US6581640B1 (en) * 2000-08-16 2003-06-24 Kelsey-Hayes Company Laminated manifold for microvalve
US6676106B2 (en) 2000-12-28 2004-01-13 Xerox Corporation Flap structure for electrostatic or magnetic applications and method for making same
US6626417B2 (en) * 2001-02-23 2003-09-30 Becton, Dickinson And Company Microfluidic valve and microactuator for a microvalve
AU2002303933A1 (en) * 2001-05-31 2002-12-09 Rochester Institute Of Technology Fluidic valves, agitators, and pumps and methods thereof
US20020186263A1 (en) * 2001-06-07 2002-12-12 Nanostream, Inc. Microfluidic fraction collectors
US6981522B2 (en) * 2001-06-07 2006-01-03 Nanostream, Inc. Microfluidic devices with distributing inputs
US7674361B2 (en) * 2003-09-24 2010-03-09 Microfabrica Inc. Micro-turbines, roller bearings, bushings, and design of hollow closed structures and fabrication methods for creating such structures
US7498714B2 (en) * 2003-09-24 2009-03-03 Microfabrica Inc. Multi-layer three-dimensional structures having features smaller than a minimum feature size associated with the formation of individual layers
US7025324B1 (en) 2002-01-04 2006-04-11 Massachusetts Institute Of Technology Gating apparatus and method of manufacture
US7001526B1 (en) * 2002-02-28 2006-02-21 Hla Ngwe Tin Optical isomer separation method
US6637476B2 (en) 2002-04-01 2003-10-28 Protedyne Corporation Robotically manipulable sample handling tool
US7867193B2 (en) * 2004-01-29 2011-01-11 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
TW590982B (en) * 2002-09-27 2004-06-11 Agnitio Science & Technology I Micro-fluid driving device
US6883774B2 (en) * 2002-10-21 2005-04-26 Lockheed Martin Corporation Microelectromechanical high pressure gas microvalve
US6774337B2 (en) * 2002-10-21 2004-08-10 Lockheed Martin Corporation Method for protecting the diaphragm and extending the life of SiC and/or Si MEMS microvalves
US7474180B2 (en) * 2002-11-01 2009-01-06 Georgia Tech Research Corp. Single substrate electromagnetic actuator
TW553734B (en) * 2002-11-18 2003-09-21 Rossmax Int Ltd Air pressure adjustment device
US6807892B2 (en) * 2002-12-30 2004-10-26 Xerox Corporation Pneumatic actuator with elastomeric membrane and low-power electrostatic flap valve arrangement
US8072302B2 (en) * 2003-02-27 2011-12-06 University Of Washington Through Its Center For Commercialization Inchworm actuator based on shape memory alloy composite diaphragm
US7280016B2 (en) * 2003-02-27 2007-10-09 University Of Washington Design of membrane actuator based on ferromagnetic shape memory alloy composite for synthetic jet actuator
US7249529B2 (en) * 2003-03-28 2007-07-31 Protedyne Corporation Robotically manipulable sample handling tool
FR2856046B1 (fr) * 2003-06-16 2005-07-29 Biomerieux Sa Microvanne fluidique a ouverture par commande electrique
US20050098750A1 (en) * 2003-11-06 2005-05-12 Daniel Sobek Electrostatic sealing device and method of use thereof
US8011388B2 (en) * 2003-11-24 2011-09-06 Microstaq, INC Thermally actuated microvalve with multiple fluid ports
US7867194B2 (en) 2004-01-29 2011-01-11 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
US8581308B2 (en) 2004-02-19 2013-11-12 Rochester Institute Of Technology High temperature embedded charge devices and methods thereof
US7204472B2 (en) * 2004-03-12 2007-04-17 Gm Global Technology Operations, Inc. Active pressure relief valves and methods of use
US7422191B2 (en) * 2004-06-14 2008-09-09 The Board Of Trustees Of The Leland Stanford Junior University Bistable miniature valve
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
US7331655B2 (en) * 2005-05-19 2008-02-19 Xerox Corporation Fluid coupler and a device arranged with the same
KR20080044263A (ko) * 2005-09-09 2008-05-20 코닌클리케 필립스 일렉트로닉스 엔.브이. 마이크로시스템 제작 방법, 그러한 마이크로시스템, 그러한마이크로시스템을 포함하는 포일의 스택, 그러한마이크로시스템을 포함하는 전자 디바이스, 및 그러한 전자디바이스의 사용
CN101258102B (zh) * 2005-09-09 2011-09-14 皇家飞利浦电子股份有限公司 一种制造设有间隔的微型系统的方法
NL1030081C2 (nl) * 2005-09-30 2007-04-02 Stork Veco Bv Zeefmateriaal uit metaal en werkwijze voor de vervaardiging daarvan.
CN101617155B (zh) * 2006-12-15 2012-03-21 麦克罗斯塔克公司 微阀装置
US9046192B2 (en) 2007-01-31 2015-06-02 The Charles Stark Draper Laboratory, Inc. Membrane-based fluid control in microfluidic devices
DE112008000862T5 (de) * 2007-03-30 2010-03-11 Microstaq, Inc., Austin Vorgesteuertes Mikroschieberventil
CN101668973B (zh) * 2007-03-31 2013-03-13 盾安美斯泰克公司(美国) 先导式滑阀
US8586176B2 (en) * 2007-11-02 2013-11-19 University Of Washington Shape memory alloy fibers and shape memory polymer fibers and films and their composites for reversible shape changes
US8561963B2 (en) * 2007-12-19 2013-10-22 Palo Alto Research Center Incorporated Electrostatically addressable microvalves
US20090223648A1 (en) * 2008-03-07 2009-09-10 James Scott Martin Heat exchanger with variable heat transfer properties
JP2011530683A (ja) 2008-08-09 2011-12-22 マイクラスタック、インク 改良型のマイクロバルブ・デバイス
US8113482B2 (en) * 2008-08-12 2012-02-14 DunAn Microstaq Microvalve device with improved fluid routing
DE102008054222A1 (de) * 2008-10-31 2010-09-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikroventil in keramischer Mehrlagentechnik sowie dessen Verwendung
CN102308131B (zh) 2008-12-06 2014-01-08 盾安美斯泰克有限公司 流体流动控制组件
WO2010117874A2 (en) 2009-04-05 2010-10-14 Microstaq, Inc. Method and structure for optimizing heat exchanger performance
CN102575782B (zh) 2009-08-17 2014-04-09 盾安美斯泰克股份有限公司 微型机械装置和控制方法
WO2011094302A2 (en) 2010-01-28 2011-08-04 Microstaq, Inc. Process for reconditioning semiconductor surface to facilitate bonding
CN102792419B (zh) 2010-01-28 2015-08-05 盾安美斯泰克股份有限公司 高温选择性融合接合的工艺与构造
EP2355145A1 (de) * 2010-02-10 2011-08-10 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Druckunterstützte selbstausrichtende Anordnung
US8996141B1 (en) 2010-08-26 2015-03-31 Dunan Microstaq, Inc. Adaptive predictive functional controller
JP6162047B2 (ja) 2011-02-02 2017-07-12 ザ チャールズ スターク ドレイパー ラボラトリー インク 薬物送達装置
DE102012200983A1 (de) 2011-12-23 2013-06-27 Continental Automotive Gmbh Sensorelement mit Luftdruckmessung
US8925793B2 (en) 2012-01-05 2015-01-06 Dunan Microstaq, Inc. Method for making a solder joint
US9140613B2 (en) 2012-03-16 2015-09-22 Zhejiang Dunan Hetian Metal Co., Ltd. Superheat sensor
JP5975117B2 (ja) * 2013-01-28 2016-08-23 株式会社島津製作所 ガス圧力コントローラ
US10086370B2 (en) * 2013-02-08 2018-10-02 Infineon Technologies Ag Microfluidic device and method
US9441753B2 (en) 2013-04-30 2016-09-13 Boston Dynamics Printed circuit board electrorheological fluid valve
CN103487959B (zh) * 2013-10-15 2015-12-02 深圳市华星光电技术有限公司 真空吸附力可调的转写辊及用该转写辊的薄膜贴附方法
US9188375B2 (en) 2013-12-04 2015-11-17 Zhejiang Dunan Hetian Metal Co., Ltd. Control element and check valve assembly
EP3203079B1 (de) 2016-01-29 2021-05-19 Microjet Technology Co., Ltd Piezoelektrischer aktuator
US10615329B2 (en) 2016-01-29 2020-04-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US9976673B2 (en) * 2016-01-29 2018-05-22 Microjet Technology Co., Ltd. Miniature fluid control device
EP3203078B1 (de) 2016-01-29 2021-05-26 Microjet Technology Co., Ltd Pneumatische miniaturvorrichtung
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
EP3203080B1 (de) 2016-01-29 2021-09-22 Microjet Technology Co., Ltd Pneumatische miniaturvorrichtung
US10451051B2 (en) 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
US10487821B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature fluid control device
US10584695B2 (en) 2016-01-29 2020-03-10 Microjet Technology Co., Ltd. Miniature fluid control device
US10388849B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
US20170232513A1 (en) * 2016-02-12 2017-08-17 The Boeing Company Systems and methods for biaxial symmetric canted holes
DE102016214883B4 (de) * 2016-08-10 2022-03-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Ventil aus einem keramischen Werkstoff und ein Verfahren zu seiner Herstellung
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
US20190142111A1 (en) * 2017-11-10 2019-05-16 Head Technology Gmbh Liner for sports shoes
US11725749B2 (en) * 2020-11-02 2023-08-15 The Regents Of The University Of California Passive microfluidic valves
WO2023122349A2 (en) * 2021-12-23 2023-06-29 Dloc Biosystems, Inc. Human-on-chip operating system

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3243181A (en) * 1963-12-23 1966-03-29 Pitney Bowes Inc Sheet handling device
US3422411A (en) * 1965-07-21 1969-01-14 Ex Cell O Corp Pneumatic movement of data member
GB1173302A (en) * 1966-07-20 1969-12-10 Rolls Royce Mixing Device and Mixing Method for Fluids
US3405977A (en) * 1966-08-04 1968-10-15 Sperry Rand Corp All-fluid unit record accelerator
US3414331A (en) * 1967-02-09 1968-12-03 Rapistan Inc Valve for air film conveyors
US3437335A (en) * 1967-06-16 1969-04-08 Sperry Rand Corp Fluid document transporter
US3550964A (en) * 1969-03-14 1970-12-29 Us Army Flueric transport system
US3881701A (en) * 1973-09-17 1975-05-06 Aerojet General Co Fluid mixer reactor
US3918706A (en) * 1974-06-24 1975-11-11 Ibm Pneumatic sheet transport and alignment mechanism
US3991786A (en) * 1975-09-22 1976-11-16 American Standard, Inc. Fluid circuit plate for a circuit module for fluid distribution
US4618292A (en) * 1977-02-28 1986-10-21 International Business Machines Corporation Controls for semiconductor wafer orientor
DD222187A3 (de) * 1982-03-22 1985-05-08 Textima Veb K Verfahren und vorrichtung zum positionieren textiler flaechengebilde
US4493548A (en) * 1982-03-26 1985-01-15 Eastman Kodak Company Apparatus for supporting flexible members
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve
US4874273A (en) * 1987-03-16 1989-10-17 Hitachi, Ltd. Apparatus for holding and/or conveying articles by fluid
JPH01214554A (ja) * 1988-02-22 1989-08-28 Canon Inc シート位置決め装置
US4986942A (en) * 1988-03-22 1991-01-22 Outboard Marine Corporation Method for forming ported cylinder sleeve liner foam pattern
JPH0243418A (ja) * 1988-08-03 1990-02-14 Kubota Ltd フロントローダの姿勢制御装置
GB8823815D0 (en) * 1988-10-11 1988-11-16 Molins Plc Pneumatic web feeding
EP0518524B1 (de) * 1991-05-30 1996-09-04 Hitachi, Ltd. Ventil und seine Verwendung in einer Vorrichtung hergestellt aus Halbleitermaterial
GB2275903A (en) * 1992-04-30 1994-09-14 Brian Edwin Jones Load sensing and conveying system
DE4221089A1 (de) * 1992-06-26 1994-01-05 Bosch Gmbh Robert Mikroventil
DE4308276C2 (de) * 1993-03-16 1997-09-04 Heidelberger Druckmasch Ag Leiteinrichtung für einen Bogen
US5640995A (en) * 1995-03-14 1997-06-24 Baxter International Inc. Electrofluidic standard module and custom circuit board assembly

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DE69724746T2 (de) 2004-03-25
EP0846875A3 (de) 1999-01-13
EP0846875B1 (de) 2003-09-10
US6123316A (en) 2000-09-26
JPH10169827A (ja) 1998-06-26
EP0846875A2 (de) 1998-06-10

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