DE69724632T2 - Zusammensetzung und methode zum polieren eines komposits - Google Patents

Zusammensetzung und methode zum polieren eines komposits Download PDF

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Publication number
DE69724632T2
DE69724632T2 DE69724632T DE69724632T DE69724632T2 DE 69724632 T2 DE69724632 T2 DE 69724632T2 DE 69724632 T DE69724632 T DE 69724632T DE 69724632 T DE69724632 T DE 69724632T DE 69724632 T2 DE69724632 T2 DE 69724632T2
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DE
Germany
Prior art keywords
silica
silicon nitride
compound
polishing
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69724632T
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German (de)
English (en)
Other versions
DE69724632D1 (de
Inventor
D. Sharath HOSALI
R. Anantha SETHURAMAN
Jiun-Fang Wang
Melboure Lee COOK
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Rodel Inc
Original Assignee
Rodel Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Rodel Inc filed Critical Rodel Inc
Application granted granted Critical
Publication of DE69724632D1 publication Critical patent/DE69724632D1/de
Publication of DE69724632T2 publication Critical patent/DE69724632T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/06—Planarisation of inorganic insulating materials
    • H10P95/062—Planarisation of inorganic insulating materials involving a dielectric removal step
    • H10P95/064—Planarisation of inorganic insulating materials involving a dielectric removal step the removal being chemical etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
DE69724632T 1996-09-27 1997-09-26 Zusammensetzung und methode zum polieren eines komposits Expired - Lifetime DE69724632T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US2727796P 1996-09-27 1996-09-27
US27277P 1996-09-27
US802829 1997-02-19
US08/802,829 US5738800A (en) 1996-09-27 1997-02-19 Composition and method for polishing a composite of silica and silicon nitride
PCT/US1997/017503 WO1998013218A1 (en) 1996-09-27 1997-09-26 Composition and method for polishing a composite

Publications (2)

Publication Number Publication Date
DE69724632D1 DE69724632D1 (de) 2003-10-09
DE69724632T2 true DE69724632T2 (de) 2004-06-03

Family

ID=26702262

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69724632T Expired - Lifetime DE69724632T2 (de) 1996-09-27 1997-09-26 Zusammensetzung und methode zum polieren eines komposits

Country Status (5)

Country Link
US (2) US5738800A (https=)
EP (1) EP0930978B1 (https=)
JP (1) JP4163752B2 (https=)
DE (1) DE69724632T2 (https=)
WO (1) WO1998013218A1 (https=)

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Also Published As

Publication number Publication date
JP2001501369A (ja) 2001-01-30
WO1998013218A1 (en) 1998-04-02
US5738800A (en) 1998-04-14
EP0930978A4 (en) 2001-05-02
US6042741A (en) 2000-03-28
JP4163752B2 (ja) 2008-10-08
EP0930978B1 (en) 2003-09-03
EP0930978A1 (en) 1999-07-28
DE69724632D1 (de) 2003-10-09

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