DE69721000D1 - Aus Silizium mittels Mikromaterialbearbeitung hergestellter, flügelzellenartiger Mikrodurchflussmesser - Google Patents

Aus Silizium mittels Mikromaterialbearbeitung hergestellter, flügelzellenartiger Mikrodurchflussmesser

Info

Publication number
DE69721000D1
DE69721000D1 DE69721000T DE69721000T DE69721000D1 DE 69721000 D1 DE69721000 D1 DE 69721000D1 DE 69721000 T DE69721000 T DE 69721000T DE 69721000 T DE69721000 T DE 69721000T DE 69721000 D1 DE69721000 D1 DE 69721000D1
Authority
DE
Germany
Prior art keywords
vane
silicon
cell type
flow meters
type micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69721000T
Other languages
English (en)
Other versions
DE69721000T2 (de
Inventor
P Neukermans
G Slater
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xros Inc
Original Assignee
Xros Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xros Inc filed Critical Xros Inc
Application granted granted Critical
Publication of DE69721000D1 publication Critical patent/DE69721000D1/de
Publication of DE69721000T2 publication Critical patent/DE69721000T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
    • G01F1/28—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow by drag-force, e.g. vane type or impact flowmeter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
    • G01F1/22—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow by variable-area meters, e.g. rotameters
    • G01F1/26—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow by variable-area meters, e.g. rotameters of the valve type

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
DE69721000T 1996-01-22 1997-01-21 Aus Silizium mittels Mikromaterialbearbeitung hergestellter, flügelzellenartiger Mikrodurchflussmesser Expired - Fee Related DE69721000T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US1038696P 1996-01-22 1996-01-22
PCT/US1997/000875 WO1997026527A1 (en) 1996-01-22 1997-01-21 Vane-type micromachined silicon micro-flow meter

Publications (2)

Publication Number Publication Date
DE69721000D1 true DE69721000D1 (de) 2003-05-22
DE69721000T2 DE69721000T2 (de) 2003-11-13

Family

ID=21745529

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69721000T Expired - Fee Related DE69721000T2 (de) 1996-01-22 1997-01-21 Aus Silizium mittels Mikromaterialbearbeitung hergestellter, flügelzellenartiger Mikrodurchflussmesser

Country Status (5)

Country Link
US (1) US5895866A (de)
EP (1) EP0912883B1 (de)
JP (1) JP3580827B2 (de)
DE (1) DE69721000T2 (de)
WO (1) WO1997026527A1 (de)

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US20040073175A1 (en) * 2002-01-07 2004-04-15 Jacobson James D. Infusion system
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WO2005099410A2 (en) * 2004-04-12 2005-10-27 Siverta, Inc. Single-pole, double-throw mems switch
US9079762B2 (en) 2006-09-22 2015-07-14 Ethicon Endo-Surgery, Inc. Micro-electromechanical device
US7561317B2 (en) 2006-11-03 2009-07-14 Ethicon Endo-Surgery, Inc. Resonant Fourier scanning
US7713265B2 (en) 2006-12-22 2010-05-11 Ethicon Endo-Surgery, Inc. Apparatus and method for medically treating a tattoo
US8273015B2 (en) 2007-01-09 2012-09-25 Ethicon Endo-Surgery, Inc. Methods for imaging the anatomy with an anatomically secured scanner assembly
US8801606B2 (en) 2007-01-09 2014-08-12 Ethicon Endo-Surgery, Inc. Method of in vivo monitoring using an imaging system including scanned beam imaging unit
US7589316B2 (en) 2007-01-18 2009-09-15 Ethicon Endo-Surgery, Inc. Scanning beam imaging with adjustable detector sensitivity or gain
US8216214B2 (en) 2007-03-12 2012-07-10 Ethicon Endo-Surgery, Inc. Power modulation of a scanning beam for imaging, therapy, and/or diagnosis
US7995045B2 (en) 2007-04-13 2011-08-09 Ethicon Endo-Surgery, Inc. Combined SBI and conventional image processor
US8626271B2 (en) 2007-04-13 2014-01-07 Ethicon Endo-Surgery, Inc. System and method using fluorescence to examine within a patient's anatomy
US8160678B2 (en) 2007-06-18 2012-04-17 Ethicon Endo-Surgery, Inc. Methods and devices for repairing damaged or diseased tissue using a scanning beam assembly
US7982776B2 (en) 2007-07-13 2011-07-19 Ethicon Endo-Surgery, Inc. SBI motion artifact removal apparatus and method
US9125552B2 (en) 2007-07-31 2015-09-08 Ethicon Endo-Surgery, Inc. Optical scanning module and means for attaching the module to medical instruments for introducing the module into the anatomy
US7983739B2 (en) 2007-08-27 2011-07-19 Ethicon Endo-Surgery, Inc. Position tracking and control for a scanning assembly
US7925333B2 (en) 2007-08-28 2011-04-12 Ethicon Endo-Surgery, Inc. Medical device including scanned beam unit with operational control features
US7921731B2 (en) * 2007-12-03 2011-04-12 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Two-axis direct fluid shear stress sensor
US8050520B2 (en) 2008-03-27 2011-11-01 Ethicon Endo-Surgery, Inc. Method for creating a pixel image from sampled data of a scanned beam imager
US8332014B2 (en) 2008-04-25 2012-12-11 Ethicon Endo-Surgery, Inc. Scanned beam device and method using same which measures the reflectance of patient tissue
US8371160B2 (en) * 2009-12-16 2013-02-12 Meggitt (San Juan Capistrano), Inc. Weatherized direct-mount absolute pressure sensor
WO2012129101A1 (en) 2011-03-18 2012-09-27 Soneter, LLC Methods and apparatus for fluid flow measurement
JP6240468B2 (ja) * 2013-01-31 2017-11-29 株式会社フジクラ 流量検出センサ
JP6026963B2 (ja) * 2013-06-24 2016-11-16 株式会社フジクラ 流量センサ及び流量検出システム
WO2015198414A1 (ja) * 2014-06-25 2015-12-30 セイコーインスツル株式会社 圧力変化測定装置及び圧力変化測定方法
DE102015000064B3 (de) 2015-01-12 2016-03-31 Carl Von Ossietzky Universität Oldenburg Vorrichtung und Verfahren zum Bestimmen mindestens eines Parameters einer Strömung eines Fluids und deren Verwendung

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US5220835A (en) * 1991-09-12 1993-06-22 Ford Motor Company Torsion beam accelerometer
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DE4215722C2 (de) * 1992-05-13 1997-02-13 Bosch Gmbh Robert Sensorsubstrat mit einer Membran und Verfahren zu deren Herstellung
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US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
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US5663508A (en) * 1995-08-07 1997-09-02 Delco Electronics Corporation Silicon flow sensor

Also Published As

Publication number Publication date
EP0912883B1 (de) 2003-04-16
DE69721000T2 (de) 2003-11-13
US5895866A (en) 1999-04-20
WO1997026527A1 (en) 1997-07-24
JP3580827B2 (ja) 2004-10-27
JP2000504412A (ja) 2000-04-11
EP0912883A1 (de) 1999-05-06
EP0912883A4 (de) 1999-05-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee