DE69719458D1 - Abtastgerät für Probenmikroskop - Google Patents

Abtastgerät für Probenmikroskop

Info

Publication number
DE69719458D1
DE69719458D1 DE69719458T DE69719458T DE69719458D1 DE 69719458 D1 DE69719458 D1 DE 69719458D1 DE 69719458 T DE69719458 T DE 69719458T DE 69719458 T DE69719458 T DE 69719458T DE 69719458 D1 DE69719458 D1 DE 69719458D1
Authority
DE
Germany
Prior art keywords
sample surface
core
probe
scanning device
scanning apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69719458T
Other languages
English (en)
Other versions
DE69719458T2 (de
Inventor
Akira Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Science Corp
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP08302026A external-priority patent/JP3106242B2/ja
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Publication of DE69719458D1 publication Critical patent/DE69719458D1/de
Application granted granted Critical
Publication of DE69719458T2 publication Critical patent/DE69719458T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
DE69719458T 1996-11-13 1997-11-13 Abtastgerät für Probenmikroskop Expired - Lifetime DE69719458T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08302026A JP3106242B2 (ja) 1996-11-13 1996-11-13 プローブ顕微鏡

Publications (2)

Publication Number Publication Date
DE69719458D1 true DE69719458D1 (de) 2003-04-10
DE69719458T2 DE69719458T2 (de) 2003-10-02

Family

ID=17904015

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69719458T Expired - Lifetime DE69719458T2 (de) 1996-11-13 1997-11-13 Abtastgerät für Probenmikroskop

Country Status (4)

Country Link
KR (1) KR100527967B1 (de)
AT (1) ATE233891T1 (de)
DE (1) DE69719458T2 (de)
TW (1) TW358881B (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100761059B1 (ko) * 2006-09-29 2007-09-21 파크시스템스 주식회사 오버행 샘플 측정이 가능한 주사 탐침 현미경

Also Published As

Publication number Publication date
KR100527967B1 (ko) 2006-03-27
KR19980042329A (ko) 1998-08-17
TW358881B (en) 1999-05-21
ATE233891T1 (de) 2003-03-15
DE69719458T2 (de) 2003-10-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SII NANO TECHNOLOGY INC., CHIBA, JP