TW358881B - Probe scanning apparatus for probe microscope - Google Patents

Probe scanning apparatus for probe microscope

Info

Publication number
TW358881B
TW358881B TW086117060A TW86117060A TW358881B TW 358881 B TW358881 B TW 358881B TW 086117060 A TW086117060 A TW 086117060A TW 86117060 A TW86117060 A TW 86117060A TW 358881 B TW358881 B TW 358881B
Authority
TW
Taiwan
Prior art keywords
probe
scanning apparatus
sample surface
core
microscope
Prior art date
Application number
TW086117060A
Other languages
Chinese (zh)
Inventor
Akira Inoue
Original Assignee
Seiko Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP08302026A external-priority patent/JP3106242B2/en
Application filed by Seiko Instr Inc filed Critical Seiko Instr Inc
Application granted granted Critical
Publication of TW358881B publication Critical patent/TW358881B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

A probe scanning apparatus for probe microscope, for measuring form or physical property of the sample surface by approaching or contacting the sample surface, including: core, being flexibly supported and driven in at least the z-axis direction, in perpendicular to the sample surface; probe, boosted by the shift amplifier for being supported in the margin of the sample surface from the core for amplification of shift along the movement of the core; where the probe scanning apparatus having the consonance rate amplified.
TW086117060A 1996-11-13 1997-11-13 Probe scanning apparatus for probe microscope TW358881B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08302026A JP3106242B2 (en) 1996-11-13 1996-11-13 Probe microscope

Publications (1)

Publication Number Publication Date
TW358881B true TW358881B (en) 1999-05-21

Family

ID=17904015

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086117060A TW358881B (en) 1996-11-13 1997-11-13 Probe scanning apparatus for probe microscope

Country Status (4)

Country Link
KR (1) KR100527967B1 (en)
AT (1) ATE233891T1 (en)
DE (1) DE69719458T2 (en)
TW (1) TW358881B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100761059B1 (en) * 2006-09-29 2007-09-21 파크시스템스 주식회사 Scanning probe microscope being able to measure samples having overhang structure

Also Published As

Publication number Publication date
DE69719458D1 (en) 2003-04-10
KR100527967B1 (en) 2006-03-27
KR19980042329A (en) 1998-08-17
ATE233891T1 (en) 2003-03-15
DE69719458T2 (en) 2003-10-02

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