DE69716161T2 - Abtastgerät für eine Sonde - Google Patents

Abtastgerät für eine Sonde

Info

Publication number
DE69716161T2
DE69716161T2 DE69716161T DE69716161T DE69716161T2 DE 69716161 T2 DE69716161 T2 DE 69716161T2 DE 69716161 T DE69716161 T DE 69716161T DE 69716161 T DE69716161 T DE 69716161T DE 69716161 T2 DE69716161 T2 DE 69716161T2
Authority
DE
Germany
Prior art keywords
probe
scanning device
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69716161T
Other languages
English (en)
Other versions
DE69716161D1 (de
Inventor
Yasutake Masatoshi
Sato Yukihiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SII NANOTECHNOLOGY INC., CHIBA, JP
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP08118014A external-priority patent/JP3128512B2/ja
Priority claimed from JP08118015A external-priority patent/JP3106239B2/ja
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Application granted granted Critical
Publication of DE69716161D1 publication Critical patent/DE69716161D1/de
Publication of DE69716161T2 publication Critical patent/DE69716161T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/02—Coarse scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
DE69716161T 1996-05-13 1997-05-13 Abtastgerät für eine Sonde Expired - Lifetime DE69716161T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP08118014A JP3128512B2 (ja) 1996-05-13 1996-05-13 プローブ走査装置
JP08118015A JP3106239B2 (ja) 1996-05-13 1996-05-13 プローブ走査装置

Publications (2)

Publication Number Publication Date
DE69716161D1 DE69716161D1 (de) 2002-11-14
DE69716161T2 true DE69716161T2 (de) 2003-06-05

Family

ID=26456028

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69716161T Expired - Lifetime DE69716161T2 (de) 1996-05-13 1997-05-13 Abtastgerät für eine Sonde

Country Status (1)

Country Link
DE (1) DE69716161T2 (de)

Also Published As

Publication number Publication date
DE69716161D1 (de) 2002-11-14

Similar Documents

Publication Publication Date Title
DE69627575D1 (de) Einführungsvorrichtung für eine transkutan-sonde
DE69630079D1 (de) Einführungsvorrichtung für eine transkutan-sonde
DE69502814T2 (de) Auflösungsprüfgerät
DE59611425D1 (de) Messfühler
DE69422092T2 (de) Rastersondenmikroskop
DE69528187T2 (de) Ultraschall-lipektomie sonde
DE59510271D1 (de) Messfühler
DE69822562D1 (de) Rastersondenmikroskop
DE69733815D1 (de) Sonde zur exkavation
DE69824909D1 (de) Rastersondenmikroskop
DE69709215T2 (de) Vorrichtung zur Unterstützung für eine Schiebetür
DE69515643T2 (de) Fühlerprobe
DE69601464T2 (de) Robuste spektroskopische sonde
DE69708751D1 (de) Messfühler
DE69617148D1 (de) Fühlerprobe
NO20002263L (no) Anordning for ikke-destruktiv testing
DE59705991D1 (de) Feststellvorrichtung für eine Linearbewegungseinheit
DE69823413D1 (de) Rastersondemikroskop
DE69412649T2 (de) Magnetoresistiver fühler
DE59713051D1 (de) Probe
NO941247L (no) Sondeanordning
DE69716161T2 (de) Abtastgerät für eine Sonde
DE69717170T2 (de) Pitot-statische sonde
DE59602587D1 (de) Mehrkoordinaten-Tastkopf
FI953850A (fi) Luotainsovitus

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SII NANOTECHNOLOGY INC., CHIBA, JP