DE69714123D1 - Feldemissionselektronenquelle und seine Herstellungsverfahren - Google Patents

Feldemissionselektronenquelle und seine Herstellungsverfahren

Info

Publication number
DE69714123D1
DE69714123D1 DE69714123T DE69714123T DE69714123D1 DE 69714123 D1 DE69714123 D1 DE 69714123D1 DE 69714123 T DE69714123 T DE 69714123T DE 69714123 T DE69714123 T DE 69714123T DE 69714123 D1 DE69714123 D1 DE 69714123D1
Authority
DE
Germany
Prior art keywords
field emission
manufacturing processes
electron source
emission electron
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69714123T
Other languages
English (en)
Other versions
DE69714123T2 (de
Inventor
Keisuke Koga
Yoshikazu Hori
Takehito Yoshida
Yuka Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69714123D1 publication Critical patent/DE69714123D1/de
Application granted granted Critical
Publication of DE69714123T2 publication Critical patent/DE69714123T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H01J2201/30426—Coatings on the emitter surface, e.g. with low work function materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
DE69714123T 1996-04-15 1997-04-15 Feldemissionselektronenquelle und seine Herstellungsverfahren Expired - Lifetime DE69714123T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9260296 1996-04-15
JP50997 1997-01-07

Publications (2)

Publication Number Publication Date
DE69714123D1 true DE69714123D1 (de) 2002-08-29
DE69714123T2 DE69714123T2 (de) 2002-11-07

Family

ID=26333504

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69714123T Expired - Lifetime DE69714123T2 (de) 1996-04-15 1997-04-15 Feldemissionselektronenquelle und seine Herstellungsverfahren
DE69738805T Expired - Lifetime DE69738805D1 (de) 1996-04-15 1997-04-15 Feldemissionselektronenquelle und ihr Herstellungsverfahren
DE69730143T Expired - Lifetime DE69730143T2 (de) 1996-04-15 1997-04-15 Feldemissionselektronenquelle und sein Herstellungsverfahren

Family Applications After (2)

Application Number Title Priority Date Filing Date
DE69738805T Expired - Lifetime DE69738805D1 (de) 1996-04-15 1997-04-15 Feldemissionselektronenquelle und ihr Herstellungsverfahren
DE69730143T Expired - Lifetime DE69730143T2 (de) 1996-04-15 1997-04-15 Feldemissionselektronenquelle und sein Herstellungsverfahren

Country Status (4)

Country Link
US (2) US5925891A (de)
EP (3) EP0939418B1 (de)
KR (1) KR100442982B1 (de)
DE (3) DE69714123T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU8041698A (en) * 1998-02-27 1999-09-15 Isle Bright Limited Field emitter and method for producing the same
US6120857A (en) * 1998-05-18 2000-09-19 The Regents Of The University Of California Low work function surface layers produced by laser ablation using short-wavelength photons
US6465941B1 (en) * 1998-12-07 2002-10-15 Sony Corporation Cold cathode field emission device and display
US6692323B1 (en) * 2000-01-14 2004-02-17 Micron Technology, Inc. Structure and method to enhance field emission in field emitter device
US6822379B2 (en) * 2002-10-01 2004-11-23 Hewlett-Packard Development Company, L.P. Emission device and method for forming
US7169128B2 (en) * 2003-08-04 2007-01-30 Bioquiddity, Inc. Multichannel fluid delivery device
CN100530517C (zh) * 2004-12-08 2009-08-19 鸿富锦精密工业（深圳）有限公司 场发射照明光源
TWI246355B (en) * 2004-12-17 2005-12-21 Hon Hai Prec Ind Co Ltd Field emission type light source and backlight module using the same
US7329595B2 (en) * 2005-04-26 2008-02-12 Lucent Technologies Inc. Deposition of carbon-containing layers using vitreous carbon source
US7598104B2 (en) * 2006-11-24 2009-10-06 Agency For Science, Technology And Research Method of forming a metal contact and passivation of a semiconductor feature
US7741764B1 (en) 2007-01-09 2010-06-22 Chien-Min Sung DLC emitter devices and associated methods
JP2008202642A (ja) * 2007-02-16 2008-09-04 Matsushita Electric Ind Co Ltd 流体軸受装置、それを備えたスピンドルモータ、記録再生装置、及び軸受部品の製造方法
US8828520B2 (en) * 2008-07-01 2014-09-09 Alcatel Lucent Micro-posts having improved uniformity and a method of manufacture thereof
EP2819165B1 (de) * 2013-06-26 2018-05-30 Nexperia B.V. Feldemissionsvorrichtung und Herstellungsverfahren
US10083812B1 (en) * 2015-12-04 2018-09-25 Applied Physics Technologies, Inc. Thermionic-enhanced field emission electron source composed of transition metal carbide material with sharp emitter end-form

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3581151A (en) * 1968-09-16 1971-05-25 Bell Telephone Labor Inc Cold cathode structure comprising semiconductor whisker elements
US4663559A (en) * 1982-09-17 1987-05-05 Christensen Alton O Field emission device
DE68913419T2 (de) * 1988-03-25 1994-06-01 Thomson Csf Herstellungsverfahren von feldemissions-elektronenquellen und anwendung zur herstellung von emitter-matrizen.
DE69033677T2 (de) * 1989-09-04 2001-05-23 Canon K.K., Tokio/Tokyo Elektronenemissionselement- und Herstellungsverfahren desselben
US5312514A (en) * 1991-11-07 1994-05-17 Microelectronics And Computer Technology Corporation Method of making a field emitter device using randomly located nuclei as an etch mask
US5141460A (en) * 1991-08-20 1992-08-25 Jaskie James E Method of making a field emission electron source employing a diamond coating
KR960009127B1 (en) * 1993-01-06 1996-07-13 Samsung Display Devices Co Ltd Silicon field emission emitter and the manufacturing method
EP0691032A1 (de) * 1993-03-11 1996-01-10 Fed Corporation Emitterspitzensstruktur und feldemissionsvorrichtung mis solcher struktur, und verfahren zu ihrer herstellung
KR950701764A (ko) * 1993-03-11 1995-04-28 오가 노리오 형광막 형성방법 및 형광막 형성용 전사재
US5532177A (en) * 1993-07-07 1996-07-02 Micron Display Technology Method for forming electron emitters
DE69422234T2 (de) * 1993-07-16 2000-06-15 Matsushita Electric Industrial Co., Ltd. Verfahren zur Herstellung einer Feldemissionsanordnung
US5583393A (en) * 1994-03-24 1996-12-10 Fed Corporation Selectively shaped field emission electron beam source, and phosphor array for use therewith
US5608283A (en) * 1994-06-29 1997-03-04 Candescent Technologies Corporation Electron-emitting devices utilizing electron-emissive particles which typically contain carbon
EP0706196B1 (de) * 1994-10-05 2000-03-01 Matsushita Electric Industrial Co., Ltd. Elektronenemissionskathode; eine Elektronenemissionsvorrichtung, eine flache Anzeigevorrichtung, eine damit versehene thermoelektrische Kühlvorrichtung, und ein Verfahren zur Herstellung dieser Elektronenemissionskathode
FR2726689B1 (fr) * 1994-11-08 1996-11-29 Commissariat Energie Atomique Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence

Also Published As

Publication number Publication date
DE69730143T2 (de) 2004-12-09
KR100442982B1 (ko) 2004-09-18
EP0939418A3 (de) 2000-12-13
US5897790A (en) 1999-04-27
EP0938122A2 (de) 1999-08-25
EP0802555A3 (de) 1998-05-27
EP0802555A2 (de) 1997-10-22
DE69738805D1 (de) 2008-08-14
DE69730143D1 (de) 2004-09-09
EP0939418A2 (de) 1999-09-01
DE69714123T2 (de) 2002-11-07
US5925891A (en) 1999-07-20
EP0939418B1 (de) 2008-07-02
EP0938122B1 (de) 2004-08-04
EP0802555B1 (de) 2002-07-24
KR980005140A (ko) 1998-03-30
EP0938122A3 (de) 2000-12-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP