DE69712654D1 - Tintenstrahlaufzeichnungskopf, Tintenstrahlaufzeichnungsgerät damit versehen und Herstellungsverfahren eines Tintenstrahlaufzeichnungskopfes - Google Patents

Tintenstrahlaufzeichnungskopf, Tintenstrahlaufzeichnungsgerät damit versehen und Herstellungsverfahren eines Tintenstrahlaufzeichnungskopfes

Info

Publication number
DE69712654D1
DE69712654D1 DE69712654T DE69712654T DE69712654D1 DE 69712654 D1 DE69712654 D1 DE 69712654D1 DE 69712654 T DE69712654 T DE 69712654T DE 69712654 T DE69712654 T DE 69712654T DE 69712654 D1 DE69712654 D1 DE 69712654D1
Authority
DE
Germany
Prior art keywords
ink jet
jet recording
recording head
manufacturing
apparatus provided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69712654T
Other languages
English (en)
Other versions
DE69712654T2 (de
Inventor
Tsutomu Hashizume
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69712654D1 publication Critical patent/DE69712654D1/de
Publication of DE69712654T2 publication Critical patent/DE69712654T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69712654T 1996-02-22 1997-02-21 Tintenstrahlaufzeichnungskopf, Tintenstrahlaufzeichnungsgerät damit versehen und Herstellungsverfahren eines Tintenstrahlaufzeichnungskopfes Expired - Lifetime DE69712654T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3525296 1996-02-22
JP8364596 1996-04-05

Publications (2)

Publication Number Publication Date
DE69712654D1 true DE69712654D1 (de) 2002-06-27
DE69712654T2 DE69712654T2 (de) 2002-09-05

Family

ID=26374206

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69712654T Expired - Lifetime DE69712654T2 (de) 1996-02-22 1997-02-21 Tintenstrahlaufzeichnungskopf, Tintenstrahlaufzeichnungsgerät damit versehen und Herstellungsverfahren eines Tintenstrahlaufzeichnungskopfes

Country Status (3)

Country Link
US (2) US6209992B1 (de)
EP (1) EP0791459B1 (de)
DE (1) DE69712654T2 (de)

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JP3763175B2 (ja) * 1997-02-28 2006-04-05 ソニー株式会社 プリンタ装置の製造方法
KR100540644B1 (ko) * 1998-02-19 2006-02-28 삼성전자주식회사 마이크로 엑츄에이터 제조방법
US6662418B1 (en) * 1999-07-13 2003-12-16 Samsung Electro-Mechanics Co., Ltd. Manufacturing method of ceramic device using mixture with photosensitive resin
JP2001171133A (ja) * 1999-12-10 2001-06-26 Samsung Electro Mech Co Ltd インクジェットプリンタヘッドの製造方法
US6638550B2 (en) * 2000-03-21 2003-10-28 Mars, Inc. Method for coating solid confectionery centers
WO2001075985A1 (fr) 2000-03-30 2001-10-11 Fujitsu Limited Actionneur piezoelectrique, son procede de fabrication et tete a jet d'encre dotee de cet actionneur
US6918019B2 (en) * 2001-10-01 2005-07-12 Britestream Networks, Inc. Network and networking system for small discontiguous accesses to high-density memory devices
US7052117B2 (en) 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
US7381341B2 (en) * 2002-07-04 2008-06-03 Seiko Epson Corporation Method of manufacturing liquid jet head
JP3783781B2 (ja) * 2002-07-04 2006-06-07 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
TW553837B (en) * 2002-09-23 2003-09-21 Nanodynamics Inc Piezoelectric inkjet head and formation method of vibration layer thereof
JP4241090B2 (ja) * 2003-02-28 2009-03-18 リコープリンティングシステムズ株式会社 インクジェットヘッド
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
US7259106B2 (en) * 2004-09-10 2007-08-21 Versatilis Llc Method of making a microelectronic and/or optoelectronic circuitry sheet
KR100654802B1 (ko) * 2004-12-03 2006-12-08 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
EP1836056B1 (de) 2004-12-30 2018-11-07 Fujifilm Dimatix, Inc. Tintenstrahldruck
US7654637B2 (en) * 2005-09-30 2010-02-02 Lexmark International, Inc Photoimageable nozzle members and methods relating thereto
KR100828362B1 (ko) * 2005-11-04 2008-05-08 삼성전자주식회사 잉크젯 프린트헤드용 히터 및 이 히터를 구비하는 잉크젯프린트헤드
JP2009517198A (ja) * 2005-11-28 2009-04-30 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 基板上に複数の物質を制御可能に放出するインクジェット装置、複数の物質同士を識別する方法、およびインクジェット装置の使用
US7552534B2 (en) * 2006-05-11 2009-06-30 Eastman Kodak Company Method of manufacturing an integrated orifice plate and electroformed charge plate
US7988247B2 (en) 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
US8178285B2 (en) * 2008-03-06 2012-05-15 Ngk Insulators, Ltd. Method for manufacturing piezoelectric/electrostrictive film type element
EP2477247A1 (de) * 2009-09-07 2012-07-18 NGK Insulators, Ltd. Verfahren zur herstellung piezoelektrischer/elektrostriktiver filmelemente
US9415349B2 (en) * 2014-02-28 2016-08-16 General Electric Company Porous membrane patterning technique
US20180204929A1 (en) * 2017-01-17 2018-07-19 Globalfoundries Inc. Metal gate formation using an energy removal film

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US3202094A (en) * 1961-10-02 1965-08-24 Little Inc A Metal stencils and process for making them
DE2828625C2 (de) * 1978-06-29 1980-06-19 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur galvanoplastischen Herstellung von Präzisionsflachteilen
US4373018A (en) * 1981-06-05 1983-02-08 Bell Telephone Laboratories, Incorporated Multiple exposure microlithography patterning method
US4770977A (en) * 1984-09-21 1988-09-13 Commissariat A L'energie Atomique Silicon-containing polymer and its use as a masking resin in a lithography process
US4672354A (en) * 1985-12-05 1987-06-09 Kulite Semiconductor Products, Inc. Fabrication of dielectrically isolated fine line semiconductor transducers and apparatus
US4922265A (en) * 1986-04-28 1990-05-01 Hewlett-Packard Company Ink jet printhead with self-aligned orifice plate and method of manufacture
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
EP0344513A3 (de) * 1988-05-31 1991-01-16 Siemens Aktiengesellschaft Verfahren zur Herstellung einer Steuerplatte für ein Lithographiegerät
EP0344515A3 (de) * 1988-05-31 1991-01-30 Siemens Aktiengesellschaft Verfahren zur Herstellung einer Strahlformblende für ein Lithographiegerät
DE69026765T2 (de) * 1989-07-11 1996-10-24 Ngk Insulators Ltd Einen piezoelektrischen/elektrostriktiven Film enthaltende piezoelektrischer/elektrostriktiver Antrieb
JPH03124449A (ja) * 1989-10-11 1991-05-28 Seiko Epson Corp 液体噴射ヘッド
JPH04184985A (ja) * 1990-11-20 1992-07-01 Canon Inc 圧電体変位素子の製造方法
US5265315A (en) * 1990-11-20 1993-11-30 Spectra, Inc. Method of making a thin-film transducer ink jet head
US5500988A (en) * 1990-11-20 1996-03-26 Spectra, Inc. Method of making a perovskite thin-film ink jet transducer
EP0492256B1 (de) * 1990-12-20 1996-08-14 Siemens Aktiengesellschaft Photolithographische Strukturerzeugung
JPH0550596A (ja) * 1991-08-28 1993-03-02 Tokyo Electric Co Ltd インクジエツトプリンタヘツド
JPH05177831A (ja) * 1991-12-27 1993-07-20 Rohm Co Ltd インクジェットプリントヘッド及びそれを備える電子機器
JP3379106B2 (ja) * 1992-04-23 2003-02-17 セイコーエプソン株式会社 液体噴射ヘッド
JP3178945B2 (ja) * 1992-08-25 2001-06-25 日本碍子株式会社 インクジェットプリントヘッド
EP0698490B1 (de) * 1994-08-25 1999-06-16 Seiko Epson Corporation Flüssigkeitsstrahlkopf
EP0704967B1 (de) * 1994-09-28 2001-08-08 Masao Takeuchi Akustische Oberflächenwellenanordnung
JP3503386B2 (ja) 1996-01-26 2004-03-02 セイコーエプソン株式会社 インクジェット式記録ヘッド及びその製造方法

Also Published As

Publication number Publication date
EP0791459A3 (de) 1998-04-15
US20010015001A1 (en) 2001-08-23
US6209992B1 (en) 2001-04-03
EP0791459A2 (de) 1997-08-27
DE69712654T2 (de) 2002-09-05
EP0791459B1 (de) 2002-05-22
US6334244B2 (en) 2002-01-01

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