DE69710385D1 - Sensor für flüssige und gasförmige Medien - Google Patents

Sensor für flüssige und gasförmige Medien

Info

Publication number
DE69710385D1
DE69710385D1 DE69710385T DE69710385T DE69710385D1 DE 69710385 D1 DE69710385 D1 DE 69710385D1 DE 69710385 T DE69710385 T DE 69710385T DE 69710385 T DE69710385 T DE 69710385T DE 69710385 D1 DE69710385 D1 DE 69710385D1
Authority
DE
Germany
Prior art keywords
sensor
liquid
gaseous media
gaseous
media
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69710385T
Other languages
English (en)
Other versions
DE69710385T2 (de
Inventor
Masahiko Namerikawa
Kazuyoshi Shibata
Yukihisa Takeuchi
Shigeki Nakao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE69710385D1 publication Critical patent/DE69710385D1/de
Publication of DE69710385T2 publication Critical patent/DE69710385T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/222—Constructional or flow details for analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
    • G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
    • G01N11/16—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by measuring damping effect upon oscillatory body
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N9/00—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
    • G01N9/002—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity using variation of the resonant frequency of an element vibrating in contact with the material submitted to analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/015—Attenuation, scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02818—Density, viscosity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
DE69710385T 1996-05-22 1997-05-22 Sensor für flüssige und gasförmige Medien Expired - Fee Related DE69710385T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12749896 1996-05-22
JP8276510A JPH1038789A (ja) 1996-05-22 1996-10-18 流体センサ

Publications (2)

Publication Number Publication Date
DE69710385D1 true DE69710385D1 (de) 2002-03-21
DE69710385T2 DE69710385T2 (de) 2003-03-06

Family

ID=26463453

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69710385T Expired - Fee Related DE69710385T2 (de) 1996-05-22 1997-05-22 Sensor für flüssige und gasförmige Medien

Country Status (6)

Country Link
US (1) US5877411A (de)
EP (1) EP0809106B1 (de)
JP (1) JPH1038789A (de)
CN (1) CN1174988A (de)
DE (1) DE69710385T2 (de)
ID (1) ID16950A (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1164535A (ja) * 1997-08-20 1999-03-05 Ngk Insulators Ltd 流体中の固体粒子の検出方法及び粒子センサ
JP3648086B2 (ja) * 1998-03-27 2005-05-18 日本碍子株式会社 ＺｒＯ２磁器
US6200532B1 (en) * 1998-11-20 2001-03-13 Akzo Nobel Nv Devices and method for performing blood coagulation assays by piezoelectric sensing
US6523392B2 (en) * 2000-01-25 2003-02-25 Arizona Board Of Regents Microcantilever sensor
US20050103097A1 (en) * 2002-01-24 2005-05-19 Carsten Faltum Sensor
DE60335950D1 (de) * 2002-06-03 2011-03-17 Univ Arizona Hybride mikroauslegersensoren
US7395693B2 (en) * 2004-12-02 2008-07-08 The Arizona Board of Regents, a body corporate of the state of Arizona acting for Northern Arizona University Embedded piezoelectric microcantilever sensors
US7721590B2 (en) * 2003-03-21 2010-05-25 MEAS France Resonator sensor assembly
US7794657B2 (en) * 2003-06-03 2010-09-14 Cantimer, Inc. Phase change sensor
DE10345253B4 (de) * 2003-09-29 2006-08-17 Siemens Ag Verfahren zum Betreiben eines Zustandssensors für Flüssigkeiten
US7219537B2 (en) * 2003-12-22 2007-05-22 Vectron International, A Division Of Dover Electronics, Inc. Control of equivalent shear rate in acoustic wave sensors
US7007546B2 (en) * 2003-12-22 2006-03-07 Biode Inc. Measurement, compensation and control of equivalent shear rate in acoustic wave sensors
JP4164676B2 (ja) * 2003-12-25 2008-10-15 株式会社デンソー 力学量センサ素子構造及びその製造方法
KR20060105615A (ko) * 2005-03-31 2006-10-11 세이코 엡슨 가부시키가이샤 액체 검출 장치 및 그 제조 방법과, 액체 용기
WO2009064862A1 (en) * 2007-11-16 2009-05-22 Watlow Electric Manufacturing Company Moisture resistant layered sleeve heater and method of manufacture thereof
DE102008025127B4 (de) * 2008-05-26 2011-01-20 Continental Automotive Gmbh Zustandssensor
JP5829001B2 (ja) * 2009-08-31 2015-12-09 株式会社日本セラテック 圧電アクチュエータユニットおよびその製造方法、ならびに支持ケース
JP2011137639A (ja) * 2009-12-25 2011-07-14 Ulvac Japan Ltd フロースルーセル及びこれを使用した測定装置
US8100019B2 (en) 2010-04-07 2012-01-24 Mkt Engineering, Llc Cartridge fluid transducer
JP5051799B2 (ja) * 2010-06-30 2012-10-17 日本電波工業株式会社 感知装置
JP5051798B2 (ja) * 2010-06-30 2012-10-17 日本電波工業株式会社 感知装置
CN106404841A (zh) * 2016-08-24 2017-02-15 浙江朗德电子科技有限公司 一种传感器芯片结构
JP2021129464A (ja) * 2020-02-17 2021-09-02 住友ゴム工業株式会社 発電体

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3507145A (en) * 1966-11-25 1970-04-21 Gen Electric Indium sesquioxide thin film combustible gas detector
US3805592A (en) * 1970-08-20 1974-04-23 Itt Densitometer
US4193010A (en) * 1976-12-09 1980-03-11 Essex Transducers Corporation Sensor device using piezoelectric coating subjected to bending
US4312228A (en) * 1979-07-30 1982-01-26 Henry Wohltjen Methods of detection with surface acoustic wave and apparati therefor
US4361026A (en) * 1980-06-24 1982-11-30 Muller Richard S Method and apparatus for sensing fluids using surface acoustic waves
US4586382A (en) * 1982-09-29 1986-05-06 Schlumberger Technology Corporation Surface acoustic wave sensors
US4565942A (en) * 1983-07-01 1986-01-21 Murata Manufacturing Co., Ltd. Energy trapped piezoelectric resonator liquid sensor
US4741200A (en) * 1986-07-11 1988-05-03 Ford Motor Company Method and apparatus for measuring viscosity in a liquid utilizing a piezoelectric sensor
US4721874A (en) * 1986-10-06 1988-01-26 Emmert Sans W Apparatus and method for determining the viscosity of a fluid sample
US5212988A (en) * 1988-02-29 1993-05-25 The Reagents Of The University Of California Plate-mode ultrasonic structure including a gel
US5189914A (en) * 1988-02-29 1993-03-02 The Regents Of The University Of California Plate-mode ultrasonic sensor
JPH01180766U (de) * 1988-06-02 1989-12-26
JPH01311250A (ja) * 1988-06-08 1989-12-15 Seiko Instr Inc 流体粘度計測方法及び計測装置
US4993266A (en) * 1988-07-26 1991-02-19 Kabushiki Kaisha Toyota Chuo Kenkyusho Semiconductor pressure transducer
US5283037A (en) * 1988-09-29 1994-02-01 Hewlett-Packard Company Chemical sensor utilizing a surface transverse wave device
JPH02213743A (ja) * 1989-02-15 1990-08-24 Seiko Instr Inc 液体の物理的性質の測定装置
US5176140A (en) * 1989-08-14 1993-01-05 Olympus Optical Co., Ltd. Ultrasonic probe
JPH03148040A (ja) * 1989-11-06 1991-06-24 Izumi Denki Toyama Seisakusho:Kk 粘度測定装置
DE69221758T2 (de) * 1991-03-22 1998-01-02 Seiko Instr Inc Elektrochemische Messeinrichtung
US5374521A (en) * 1991-09-17 1994-12-20 Kipling; Arlin L. Acoustic reflection process for molecular sensing using a bulk acoustic wave quartz sensor
DE4293402C2 (de) * 1991-09-18 2001-12-06 Tadamasa Akutagawa Schwefelsäurekonzentrationssensor für Bleiakkumulatorbatterien
JP3323343B2 (ja) * 1994-04-01 2002-09-09 日本碍子株式会社 センサ素子及び粒子センサ
US5705399A (en) * 1994-05-20 1998-01-06 The Cooper Union For Advancement Of Science And Art Sensor and method for detecting predetermined chemical species in solution

Also Published As

Publication number Publication date
DE69710385T2 (de) 2003-03-06
EP0809106A1 (de) 1997-11-26
ID16950A (id) 1997-11-27
CN1174988A (zh) 1998-03-04
EP0809106B1 (de) 2002-02-13
JPH1038789A (ja) 1998-02-13
US5877411A (en) 1999-03-02

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication of lapse of patent is to be deleted
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee