DE69709817T2 - Feldemissionselektronenkanone mit individuell gesteuerten Kathodensegmenten - Google Patents

Feldemissionselektronenkanone mit individuell gesteuerten Kathodensegmenten

Info

Publication number
DE69709817T2
DE69709817T2 DE69709817T DE69709817T DE69709817T2 DE 69709817 T2 DE69709817 T2 DE 69709817T2 DE 69709817 T DE69709817 T DE 69709817T DE 69709817 T DE69709817 T DE 69709817T DE 69709817 T2 DE69709817 T2 DE 69709817T2
Authority
DE
Germany
Prior art keywords
field emission
electron gun
individually controlled
emission electron
cathode segments
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69709817T
Other languages
English (en)
Other versions
DE69709817D1 (de
Inventor
Hideo Makishima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Application granted granted Critical
Publication of DE69709817D1 publication Critical patent/DE69709817D1/de
Publication of DE69709817T2 publication Critical patent/DE69709817T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
DE69709817T 1996-09-27 1997-09-29 Feldemissionselektronenkanone mit individuell gesteuerten Kathodensegmenten Expired - Fee Related DE69709817T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25642696A JP2907150B2 (ja) 1996-09-27 1996-09-27 冷陰極電子銃およびこれを用いた電子ビーム装置

Publications (2)

Publication Number Publication Date
DE69709817D1 DE69709817D1 (de) 2002-02-28
DE69709817T2 true DE69709817T2 (de) 2002-09-05

Family

ID=17292507

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69709817T Expired - Fee Related DE69709817T2 (de) 1996-09-27 1997-09-29 Feldemissionselektronenkanone mit individuell gesteuerten Kathodensegmenten

Country Status (4)

Country Link
US (1) US5977719A (de)
EP (1) EP0833359B1 (de)
JP (1) JP2907150B2 (de)
DE (1) DE69709817T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015207484A1 (de) * 2015-04-23 2016-10-27 Carl Zeiss Microscopy Gmbh Hochspannungsversorgungseinheit und Schaltungsanordnung zur Erzeugung einer Hochspannung für ein Teilchenstrahlgerät

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6323831B1 (en) * 1997-09-17 2001-11-27 Kabushiki Kaisha Toshiba Electron emitting device and switching circuit using the same
JP3147227B2 (ja) 1998-09-01 2001-03-19 日本電気株式会社 冷陰極電子銃
US6060840A (en) * 1999-02-19 2000-05-09 Motorola, Inc. Method and control circuit for controlling an emission current in a field emission display
US6255768B1 (en) * 1999-07-19 2001-07-03 Extreme Devices, Inc. Compact field emission electron gun and focus lens
JP3293605B2 (ja) 1999-09-29 2002-06-17 日本電気株式会社 集束電極付電界放出型冷陰極搭載電子銃
US6429596B1 (en) * 1999-12-31 2002-08-06 Extreme Devices, Inc. Segmented gate drive for dynamic beam shape correction in field emission cathodes
US6392355B1 (en) * 2000-04-25 2002-05-21 Mcnc Closed-loop cold cathode current regulator
JP2002313213A (ja) * 2001-04-10 2002-10-25 Matsushita Electric Ind Co Ltd 冷陰極カソードの駆動方法および駆動装置ならびにその応用装置
FR2828956A1 (fr) * 2001-06-11 2003-02-28 Pixtech Sa Protection locale d'une grille d'ecran plat a micropointes
EP1274111B1 (de) 2001-07-06 2005-09-07 ICT, Integrated Circuit Testing GmbH Elektronenemissionsvorrichtung
DE60127677T2 (de) * 2001-10-05 2007-12-27 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Elektronenstrahlvorrrichtung mit Mehrfachstrahl
EP1426997A1 (de) * 2002-12-06 2004-06-09 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh Feldemissionsstrahlenquelle und Strahlstromsteuerverfahren
KR20070012134A (ko) * 2005-07-22 2007-01-25 삼성에스디아이 주식회사 집속 전극을 갖는 전자방출소자 및 그 제조방법
FR2921514A1 (fr) * 2007-12-19 2009-03-27 Thomson Licensing Sas Panneau d'affichage ou d'eclairage a effet de champ, ou l'une des electrodes de commande est alimentee par un pont resistif diviseur.
CN104934280B (zh) * 2015-05-26 2017-05-10 电子科技大学 一种外置式栅控冷阴极阵列电子枪

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5103145A (en) * 1990-09-05 1992-04-07 Raytheon Company Luminance control for cathode-ray tube having field emission cathode
JP2629521B2 (ja) * 1992-06-05 1997-07-09 双葉電子工業株式会社 電子銃及び陰極線管
US5359256A (en) * 1992-07-30 1994-10-25 The United States Of America As Represented By The Secretary Of The Navy Regulatable field emitter device and method of production thereof
JP3195170B2 (ja) * 1994-09-16 2001-08-06 アルプス電気株式会社 電界放射陰極装置
US5578906A (en) * 1995-04-03 1996-11-26 Motorola Field emission device with transient current source
US5552677A (en) * 1995-05-01 1996-09-03 Motorola Method and control circuit precharging a plurality of columns prior to enabling a row of a display
US5700175A (en) * 1996-04-08 1997-12-23 Industrial Technology Research Institute Field emission device with auto-activation feature

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015207484A1 (de) * 2015-04-23 2016-10-27 Carl Zeiss Microscopy Gmbh Hochspannungsversorgungseinheit und Schaltungsanordnung zur Erzeugung einer Hochspannung für ein Teilchenstrahlgerät
US9953804B2 (en) 2015-04-23 2018-04-24 Carl Zeiss Microscopy Gmbh High-voltage supply unit and circuit arrangement for generating a high voltage for a particle beam apparatus
DE102015207484B4 (de) 2015-04-23 2022-11-03 Carl Zeiss Microscopy Gmbh Hochspannungsversorgungseinheit und Schaltungsanordnung zur Erzeugung einer Hochspannung für ein Teilchenstrahlgerät sowie Teilchenstrahlgerät

Also Published As

Publication number Publication date
JP2907150B2 (ja) 1999-06-21
EP0833359A2 (de) 1998-04-01
EP0833359B1 (de) 2002-01-02
JPH10106430A (ja) 1998-04-24
DE69709817D1 (de) 2002-02-28
US5977719A (en) 1999-11-02
EP0833359A3 (de) 1998-09-30

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee