DE69708733T2 - Elektrode zur Halterung einer Probe in einem Rasterelektronenmikroskop - Google Patents

Elektrode zur Halterung einer Probe in einem Rasterelektronenmikroskop

Info

Publication number
DE69708733T2
DE69708733T2 DE1997608733 DE69708733T DE69708733T2 DE 69708733 T2 DE69708733 T2 DE 69708733T2 DE 1997608733 DE1997608733 DE 1997608733 DE 69708733 T DE69708733 T DE 69708733T DE 69708733 T2 DE69708733 T2 DE 69708733T2
Authority
DE
Germany
Prior art keywords
electrode
sample
holding
electron microscope
scanning electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1997608733
Other languages
English (en)
Other versions
DE69708733D1 (de
Inventor
Rolf Nybom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE69708733D1 publication Critical patent/DE69708733D1/de
Publication of DE69708733T2 publication Critical patent/DE69708733T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2205—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling with filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G01N15/0618—Investigating concentration of particle suspensions by collecting particles on a support of the filter type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/24—Suction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N2001/028—Sampling from a surface, swabbing, vaporising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N2001/222—Other features
    • G01N2001/2223—Other features aerosol sampling devices
DE1997608733 1996-04-01 1997-03-27 Elektrode zur Halterung einer Probe in einem Rasterelektronenmikroskop Expired - Fee Related DE69708733T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9601247A SE517847C2 (sv) 1996-04-01 1996-04-01 Elektrod för uppbärning av ett prov i ett svepelektronmikroskop

Publications (2)

Publication Number Publication Date
DE69708733D1 DE69708733D1 (de) 2002-01-17
DE69708733T2 true DE69708733T2 (de) 2002-09-05

Family

ID=20402037

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1997608733 Expired - Fee Related DE69708733T2 (de) 1996-04-01 1997-03-27 Elektrode zur Halterung einer Probe in einem Rasterelektronenmikroskop

Country Status (3)

Country Link
EP (1) EP0800199B1 (de)
DE (1) DE69708733T2 (de)
SE (1) SE517847C2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011117134A1 (de) 2011-10-21 2013-04-25 Carl Zeiss Microscopy Gmbh Filterhalter zur korrelativen Partikelanalyse

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0227679A1 (de) * 1984-09-26 1987-07-08 ANDERSSON, Jan Peter Verfahren und vorrichtung zum auffangen und analysieren von teilchen
US4961916A (en) * 1988-06-02 1990-10-09 Irsst-Institut De Recherche En Sante Et En Securite Du Travail Du Quebec Sampling device

Also Published As

Publication number Publication date
EP0800199A2 (de) 1997-10-08
SE9601247L (sv) 1997-10-02
SE9601247D0 (sv) 1996-04-01
EP0800199A3 (de) 1998-04-22
EP0800199B1 (de) 2001-12-05
SE517847C2 (sv) 2002-07-23
DE69708733D1 (de) 2002-01-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee