DE69706827T2 - Wellenlängenmessgerät und eine Einrichtung zur Regelung der Wellenlänge einer Lichtquelle - Google Patents

Wellenlängenmessgerät und eine Einrichtung zur Regelung der Wellenlänge einer Lichtquelle

Info

Publication number
DE69706827T2
DE69706827T2 DE69706827T DE69706827T DE69706827T2 DE 69706827 T2 DE69706827 T2 DE 69706827T2 DE 69706827 T DE69706827 T DE 69706827T DE 69706827 T DE69706827 T DE 69706827T DE 69706827 T2 DE69706827 T2 DE 69706827T2
Authority
DE
Germany
Prior art keywords
wavelength
regulating
light source
measuring device
wavelength measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69706827T
Other languages
English (en)
Other versions
DE69706827D1 (de
Inventor
Edgar Leckel
Emmerich Mueller
Clemens Rueck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Application granted granted Critical
Publication of DE69706827D1 publication Critical patent/DE69706827D1/de
Publication of DE69706827T2 publication Critical patent/DE69706827T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J9/0246—Measuring optical wavelength
DE69706827T 1997-05-02 1997-05-02 Wellenlängenmessgerät und eine Einrichtung zur Regelung der Wellenlänge einer Lichtquelle Expired - Fee Related DE69706827T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP97107247A EP0875743B1 (de) 1997-05-02 1997-05-02 Wellenlängenmessgerät und eine Einrichtung zur Regelung der Wellenlänge einer Lichtquelle

Publications (2)

Publication Number Publication Date
DE69706827D1 DE69706827D1 (de) 2001-10-25
DE69706827T2 true DE69706827T2 (de) 2002-03-28

Family

ID=8226759

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69706827T Expired - Fee Related DE69706827T2 (de) 1997-05-02 1997-05-02 Wellenlängenmessgerät und eine Einrichtung zur Regelung der Wellenlänge einer Lichtquelle

Country Status (4)

Country Link
US (1) US6043883A (de)
EP (1) EP0875743B1 (de)
JP (1) JPH10339668A (de)
DE (1) DE69706827T2 (de)

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Also Published As

Publication number Publication date
EP0875743A1 (de) 1998-11-04
EP0875743B1 (de) 2001-09-19
DE69706827D1 (de) 2001-10-25
US6043883A (en) 2000-03-28
JPH10339668A (ja) 1998-12-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D.STAATES DELA

8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US

8339 Ceased/non-payment of the annual fee