DE69706213D1 - Druckmessgerät und Verfahren zu seiner Herstellung - Google Patents

Druckmessgerät und Verfahren zu seiner Herstellung

Info

Publication number
DE69706213D1
DE69706213D1 DE69706213T DE69706213T DE69706213D1 DE 69706213 D1 DE69706213 D1 DE 69706213D1 DE 69706213 T DE69706213 T DE 69706213T DE 69706213 T DE69706213 T DE 69706213T DE 69706213 D1 DE69706213 D1 DE 69706213D1
Authority
DE
Germany
Prior art keywords
production
measuring device
pressure measuring
pressure
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69706213T
Other languages
English (en)
Other versions
DE69706213T2 (de
Inventor
Erick Lee Sokn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SSI Technologies LLC
Original Assignee
SSI Technologies LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/628,376 external-priority patent/US5874679A/en
Application filed by SSI Technologies LLC filed Critical SSI Technologies LLC
Application granted granted Critical
Publication of DE69706213D1 publication Critical patent/DE69706213D1/de
Publication of DE69706213T2 publication Critical patent/DE69706213T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining
    • Y10T29/49908—Joining by deforming
    • Y10T29/49915—Overedge assembling of seated part
    • Y10T29/49917—Overedge assembling of seated part by necking in cup or tube wall
    • Y10T29/49918—At cup or tube end
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining
    • Y10T29/49908—Joining by deforming
    • Y10T29/49925—Inward deformation of aperture or hollow body wall
    • Y10T29/49927—Hollow body is axially joined cup or tube

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE69706213T 1996-04-04 1997-04-03 Druckmessgerät und Verfahren zu seiner Herstellung Expired - Fee Related DE69706213T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/628,376 US5874679A (en) 1996-04-04 1996-04-04 Pressure sensor package and method of making the same
US08/728,661 US5811684A (en) 1996-04-04 1996-10-10 Pressure sensor package and method of making the same

Publications (2)

Publication Number Publication Date
DE69706213D1 true DE69706213D1 (de) 2001-09-27
DE69706213T2 DE69706213T2 (de) 2002-05-16

Family

ID=27090693

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69706213T Expired - Fee Related DE69706213T2 (de) 1996-04-04 1997-04-03 Druckmessgerät und Verfahren zu seiner Herstellung

Country Status (4)

Country Link
US (1) US5996419A (de)
EP (1) EP0800070B1 (de)
JP (1) JPH1038735A (de)
DE (1) DE69706213T2 (de)

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US6289106B1 (en) 1997-08-08 2001-09-11 Hong Long Industrial Co., Ltd. Cap and center pole apparatus and method of coupling
US6311561B1 (en) 1997-12-22 2001-11-06 Rosemount Aerospace Inc. Media compatible pressure sensor
US6076409A (en) * 1997-12-22 2000-06-20 Rosemount Aerospace, Inc. Media compatible packages for pressure sensing devices
DE69922727T2 (de) * 1998-03-31 2005-12-15 Hitachi, Ltd. Kapazitiver Druckwandler
US6874377B2 (en) * 1999-11-10 2005-04-05 Honeywell International Inc. Sensor package for flush mounting of a sensor
US6907789B2 (en) * 2002-05-06 2005-06-21 Honeywell International Inc. Sensor package
US7100452B2 (en) * 2004-12-15 2006-09-05 Honeywell International Inc. Surface acoustic wave multiple sense element
US7726197B2 (en) * 2006-04-26 2010-06-01 Honeywell International Inc. Force sensor package and method of forming same
JP2008089421A (ja) * 2006-10-02 2008-04-17 Alps Electric Co Ltd 圧力センサのパッケージ
US7765872B2 (en) * 2008-11-19 2010-08-03 Honeywell International Inc. Flow sensor apparatus and method with media isolated electrical connections
US7886609B2 (en) * 2009-05-06 2011-02-15 Freescale Semiconductor, Inc. Pressure sensor package
US8327715B2 (en) * 2009-07-02 2012-12-11 Honeywell International Inc. Force sensor apparatus
US8378435B2 (en) 2010-12-06 2013-02-19 Wai Yew Lo Pressure sensor and method of assembling same
US8316725B2 (en) 2010-12-15 2012-11-27 Honeywell International Inc. Force sensor
CN102589753B (zh) 2011-01-05 2016-05-04 飞思卡尔半导体公司 压力传感器及其封装方法
US8356514B2 (en) 2011-01-13 2013-01-22 Honeywell International Inc. Sensor with improved thermal stability
CN105769199B (zh) * 2011-02-16 2019-10-25 艾尔弗雷德·伊·曼科学研究基金会 可植入的分流系统和相关联的压力传感器
US8590387B2 (en) * 2011-03-31 2013-11-26 DePuy Synthes Products, LLC Absolute capacitive micro pressure sensor
EP2557405A1 (de) * 2011-08-09 2013-02-13 Schrader S.A.S. Vorrichtung für die Druckmessung in einem Behälter
US8640552B2 (en) 2011-09-06 2014-02-04 Honeywell International Inc. MEMS airflow sensor die incorporating additional circuitry on the die
US9029999B2 (en) 2011-11-23 2015-05-12 Freescale Semiconductor, Inc. Semiconductor sensor device with footed lid
TW201331564A (zh) * 2012-01-20 2013-08-01 sen-mu Gao 以空氣壓力感測元件感測液體壓力之結構
US8806964B2 (en) 2012-03-23 2014-08-19 Honeywell International Inc. Force sensor
US9003899B2 (en) 2012-03-23 2015-04-14 Honeywell International Inc. Force sensor
US9010190B2 (en) * 2012-04-20 2015-04-21 Rosemount Aerospace Inc. Stress isolated MEMS structures and methods of manufacture
US9003897B2 (en) 2012-05-10 2015-04-14 Honeywell International Inc. Temperature compensated force sensor
AT513969B1 (de) * 2013-05-03 2014-09-15 Piezocryst Advanced Sensorics Vorrichtung zum Abziehen eines Thermoschutzelementes
US9214402B2 (en) 2014-01-10 2015-12-15 Freescale Semiconductor, Inc. Pressure sensor device with gel retainer
US9297713B2 (en) 2014-03-19 2016-03-29 Freescale Semiconductor,Inc. Pressure sensor device with through silicon via
US9362479B2 (en) 2014-07-22 2016-06-07 Freescale Semiconductor, Inc. Package-in-package semiconductor sensor device
CN107527874B (zh) 2016-06-20 2023-08-01 恩智浦美国有限公司 腔式压力传感器器件
US11225409B2 (en) 2018-09-17 2022-01-18 Invensense, Inc. Sensor with integrated heater
US11067464B2 (en) 2019-01-18 2021-07-20 Mueller International, Llc Wet barrel hydrant with pressure monitoring and leak detection
US11313748B2 (en) * 2019-01-18 2022-04-26 Mueller International, Llc Pressure monitor housing with cap-engaging projection

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US3398333A (en) * 1966-01-27 1968-08-20 Sprague Electric Co Electrical component end seal
US3322890A (en) * 1966-03-31 1967-05-30 Jacobs Mfg Co Bushing-seal
GB1456265A (en) * 1973-02-16 1976-11-24 Amp Inc Electrical connector
US3909924A (en) * 1974-03-27 1975-10-07 Nat Semiconductor Corp Method of fabrication of silicon pressure transducer sensor units
US4047490A (en) * 1976-09-07 1977-09-13 Vincent Galluzzo Recuperative heating system
DE2718228C2 (de) * 1977-04-23 1983-10-13 WOCO Franz-Josef Wolf & Co, 6483 Bad Soden-Salmünster Kondensatorabdeckscheibe
US4454398A (en) * 1981-03-16 1984-06-12 Eaton Corporation Terminal seal for miniature sealed toggle switch
US4379279A (en) * 1981-07-27 1983-04-05 National Semiconductor Corporation Submersible pressure transducer package
US4525022A (en) * 1983-06-30 1985-06-25 Murray Myles N Electrolytic capacitor and improved header therefor
US4570097A (en) * 1984-10-26 1986-02-11 Texas Instruments Incorporated Electrical connections for a piezoelectric pressure transmitter for an internal combustion engine
US4853669A (en) * 1985-04-26 1989-08-01 Wisconsin Alumni Research Foundation Sealed cavity semiconductor pressure transducers and method of producing the same
US4996082A (en) * 1985-04-26 1991-02-26 Wisconsin Alumni Research Foundation Sealed cavity semiconductor pressure transducers and method of producing the same
US4774863A (en) * 1985-05-13 1988-10-04 Duo-Fast Corporation Fastener feeder and driver apparatus
US4655088A (en) * 1985-10-07 1987-04-07 Motorola, Inc. Unibody pressure transducer package
US4686764A (en) * 1986-04-22 1987-08-18 Motorola, Inc. Membrane protected pressure sensor
US4842685A (en) * 1986-04-22 1989-06-27 Motorola, Inc. Method for forming a cast membrane protected pressure sensor
US4732042A (en) * 1986-04-22 1988-03-22 Motorola Inc. Cast membrane protected pressure sensor
US4907983A (en) * 1986-05-13 1990-03-13 Microwave Development Laboratories Electrical connector
EP0335793B1 (de) * 1988-03-30 1992-05-20 Schlumberger Industries Halbleiter-Druckwandler
EP0381775B1 (de) * 1988-07-26 1994-11-23 Hitachi Construction Machinery Co., Ltd. Drucksensor
KR930011091B1 (ko) * 1990-06-08 1993-11-20 미쯔비시 덴끼 가부시끼가이샤 압력 센서
US5029478A (en) * 1990-07-19 1991-07-09 Honeywell Inc. Fluid isolated self-compensating absolute pressure sensor transducer
US5095755A (en) * 1990-11-01 1992-03-17 Rosemount Inc. Isolator for pressure transmitter
US5184107A (en) * 1991-01-28 1993-02-02 Honeywell, Inc. Piezoresistive pressure transducer with a conductive elastomeric seal
JPH05149814A (ja) * 1991-11-29 1993-06-15 Fuji Electric Co Ltd 二重ダイヤフラム式半導体圧力センサ
US5285690A (en) * 1992-01-24 1994-02-15 The Foxboro Company Pressure sensor having a laminated substrate
US5331857A (en) * 1992-08-21 1994-07-26 General Automotive Specialty Co., Inc. Pressure transducer
US5341684A (en) * 1992-12-07 1994-08-30 Motorola, Inc. Pressure sensor built into a cable connector
US5325720A (en) * 1993-10-07 1994-07-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method for making a dynamic pressure sensor and a pressure sensor made according to the method
JP3198773B2 (ja) * 1994-01-25 2001-08-13 株式会社デンソー 半導体圧力検出器及びその製造方法
JP3198779B2 (ja) * 1994-03-04 2001-08-13 株式会社デンソー 半導体圧力検出器の製造方法
DE4410455C1 (de) * 1994-03-25 1995-06-29 Framatome Connectors Int Wasserdichte Kontaktstiftdurchführung durch gegossene Kunststoffteile, insbesondere von Steckergehäusen
DE9406625U1 (de) * 1994-04-20 1994-07-21 Sel Alcatel Ag Drucksensor

Also Published As

Publication number Publication date
DE69706213T2 (de) 2002-05-16
EP0800070B1 (de) 2001-08-22
JPH1038735A (ja) 1998-02-13
US5996419A (en) 1999-12-07
EP0800070A1 (de) 1997-10-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee