DE69701845T2 - Vakuumpumpe mit elektronischer Steuereinrichtung - Google Patents

Vakuumpumpe mit elektronischer Steuereinrichtung

Info

Publication number
DE69701845T2
DE69701845T2 DE69701845T DE69701845T DE69701845T2 DE 69701845 T2 DE69701845 T2 DE 69701845T2 DE 69701845 T DE69701845 T DE 69701845T DE 69701845 T DE69701845 T DE 69701845T DE 69701845 T2 DE69701845 T2 DE 69701845T2
Authority
DE
Germany
Prior art keywords
control device
electronic control
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69701845T
Other languages
English (en)
Other versions
DE69701845D1 (de
Inventor
Simon Mauro De
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=11414945&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69701845(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Varian SpA filed Critical Varian SpA
Application granted granted Critical
Publication of DE69701845D1 publication Critical patent/DE69701845D1/de
Publication of DE69701845T2 publication Critical patent/DE69701845T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Control Of Positive-Displacement Air Blowers (AREA)
  • Control Of Ac Motors In General (AREA)
DE69701845T 1996-10-08 1997-06-12 Vakuumpumpe mit elektronischer Steuereinrichtung Revoked DE69701845T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT96TO000822A IT1288738B1 (it) 1996-10-08 1996-10-08 Unita' elettronica di comando per pompa da vuoto.

Publications (2)

Publication Number Publication Date
DE69701845D1 DE69701845D1 (de) 2000-06-08
DE69701845T2 true DE69701845T2 (de) 2000-11-16

Family

ID=11414945

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69701845T Revoked DE69701845T2 (de) 1996-10-08 1997-06-12 Vakuumpumpe mit elektronischer Steuereinrichtung

Country Status (5)

Country Link
US (1) US5940576A (de)
EP (1) EP0836009B1 (de)
JP (1) JPH10150791A (de)
DE (1) DE69701845T2 (de)
IT (1) IT1288738B1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10114969A1 (de) * 2001-03-27 2002-10-10 Leybold Vakuum Gmbh Turbomolekularpumpe

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10215896A1 (de) * 2002-04-11 2003-10-23 Leybold Vakuum Gmbh Vakuumpumpe
US7361844B2 (en) * 2002-11-25 2008-04-22 Vlt, Inc. Power converter package and thermal management
US7508156B2 (en) * 2006-04-04 2009-03-24 A. O. Smith Corporation Electrical machine having a series chopper circuit
JP5024507B2 (ja) * 2006-04-12 2012-09-12 株式会社島津製作所 ターボ分子ポンプ、及び真空装置
EP2104221A1 (de) * 2008-03-22 2009-09-23 Grundfos Management A/S Verfahren zum Ansteuern eines mehrphasigen in Sternschaltung betriebenen Elektromotors
JP2014147170A (ja) * 2013-01-28 2014-08-14 Shimadzu Corp 真空ポンプ用モータ駆動装置および真空ポンプ
EP2846043B1 (de) * 2013-09-09 2020-01-22 Leybold GmbH Berechnung der rotortemperatur einer vakuumpumpe mit hilfe des motorstroms oder der motorleistung
US20150330397A1 (en) * 2014-05-14 2015-11-19 International Business Machines Corporation Air flow detection and correction based on air flow impedance
JP7022265B2 (ja) * 2017-10-25 2022-02-18 株式会社島津製作所 真空ポンプ
JP7087418B2 (ja) * 2018-02-02 2022-06-21 株式会社島津製作所 真空ポンプ

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928146B2 (ja) * 1978-11-04 1984-07-11 ファナック株式会社 誘導電動機の駆動制御方式
US5443368A (en) * 1993-07-16 1995-08-22 Helix Technology Corporation Turbomolecular pump with valves and integrated electronic controls
US4897023A (en) * 1988-11-28 1990-01-30 Milton Roy Company Liquid pump assembly
IT1241431B (it) * 1990-03-09 1994-01-17 Varian Spa Pompa turbomolecolare perfezionata.
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
TR26731A (tr) * 1990-10-10 1995-05-15 Icotron Sa BIR FREKANS DüZENLEYICIYLE BESLENEN ES ZAMANLI OLMAYAN BIR MOTORUN YüK DURUMUNUN BELIRLENMESI üZERINE BIR YÖNTEM VE YÖNTEMIN UYGULANMASI ICIN TERTIBAT.
DE4113068A1 (de) * 1991-04-22 1992-11-05 Leybold Ag Verfahren zur ermittlung oder regelung der drehzahl eines asynchronmotors
JPH0529073A (ja) * 1991-07-24 1993-02-05 Matsushita Electric Ind Co Ltd 誘導加熱調理器
JP2976633B2 (ja) * 1991-10-21 1999-11-10 松下電器産業株式会社 誘導加熱調理器
JP2994150B2 (ja) * 1992-07-30 1999-12-27 日本電産株式会社 ファンモータ
DE4237971B4 (de) * 1992-11-11 2004-05-06 Unaxis Deutschland Holding Gmbh Vakuumpumpe mit Wandler
JPH07154976A (ja) * 1993-11-30 1995-06-16 Fuji Electric Co Ltd インバータ冷却ファンの運転方法
DE4410903A1 (de) * 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen
JPH0828471A (ja) * 1994-07-11 1996-01-30 Matsushita Electric Ind Co Ltd 容積型ポンプ
JPH0835713A (ja) * 1994-07-26 1996-02-06 Fujitsu General Ltd 空気調和機の制御方法およびその装置
DE9417422U1 (de) * 1994-10-31 1995-02-09 Leybold Ag Reibungsvakuumpumpe mit Gehäuse

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10114969A1 (de) * 2001-03-27 2002-10-10 Leybold Vakuum Gmbh Turbomolekularpumpe

Also Published As

Publication number Publication date
JPH10150791A (ja) 1998-06-02
IT1288738B1 (it) 1998-09-24
EP0836009B1 (de) 2000-05-03
US5940576A (en) 1999-08-17
EP0836009A2 (de) 1998-04-15
EP0836009A3 (de) 1998-08-12
ITTO960822A1 (it) 1998-04-08
DE69701845D1 (de) 2000-06-08

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation