DE69700163D1 - Preiswerter Korona-Vorionisierer für einen Laser - Google Patents

Preiswerter Korona-Vorionisierer für einen Laser

Info

Publication number
DE69700163D1
DE69700163D1 DE69700163T DE69700163T DE69700163D1 DE 69700163 D1 DE69700163 D1 DE 69700163D1 DE 69700163 T DE69700163 T DE 69700163T DE 69700163 T DE69700163 T DE 69700163T DE 69700163 D1 DE69700163 D1 DE 69700163D1
Authority
DE
Germany
Prior art keywords
ionizer
laser
corona pre
inexpensive
inexpensive corona
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69700163T
Other languages
English (en)
Other versions
DE69700163T2 (de
Inventor
Tom A Watson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cymer Inc
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc filed Critical Cymer Inc
Application granted granted Critical
Publication of DE69700163D1 publication Critical patent/DE69700163D1/de
Publication of DE69700163T2 publication Critical patent/DE69700163T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0385—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0388—Compositions, materials or coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE69700163T 1996-03-29 1997-02-06 Preiswerter Korona-Vorionisierer für einen Laser Expired - Lifetime DE69700163T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/625,500 US5719896A (en) 1996-03-29 1996-03-29 Low cost corona pre-ionizer for a laser

Publications (2)

Publication Number Publication Date
DE69700163D1 true DE69700163D1 (de) 1999-05-06
DE69700163T2 DE69700163T2 (de) 1999-07-22

Family

ID=24506381

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69700163T Expired - Lifetime DE69700163T2 (de) 1996-03-29 1997-02-06 Preiswerter Korona-Vorionisierer für einen Laser

Country Status (6)

Country Link
US (1) US5719896A (de)
EP (1) EP0798823B1 (de)
JP (1) JP3359838B2 (de)
KR (1) KR100271013B1 (de)
CA (1) CA2200268C (de)
DE (1) DE69700163T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6128323A (en) * 1997-04-23 2000-10-03 Cymer, Inc. Reliable modular production quality narrow-band high REP rate excimer laser
US5818865A (en) * 1997-05-16 1998-10-06 Cymer, Inc. Compact excimer laser insulator with integral pre-ionizer
US6330261B1 (en) 1997-07-18 2001-12-11 Cymer, Inc. Reliable, modular, production quality narrow-band high rep rate ArF excimer laser
WO1999045613A1 (en) * 1998-03-04 1999-09-10 Cymer, Inc. RELIABLE, MODULAR, PRODUCTION QUALITY NARROW-BAND KrF EXCIMER LASER
US6188709B1 (en) 1998-09-18 2001-02-13 Cymer, Inc. Aerodynamic electrode support bar
US6330260B1 (en) 1999-03-19 2001-12-11 Cymer, Inc. F2 laser with visible red and IR control
US6381257B1 (en) 1999-09-27 2002-04-30 Cymer, Inc. Very narrow band injection seeded F2 lithography laser
US6700908B1 (en) 1999-06-21 2004-03-02 Tui Laser Ag Device for avoiding sliding discharges in pre-ionization in a gas laser with corona discharge
DE19934013C1 (de) * 1999-06-21 2000-08-10 Tui Laser Ag Vorrichtung zur Vermeidung von Gleitentladungen bei der Vorionisierung in einem Gaslaser mit Coronaentladung
US6351060B1 (en) * 1999-07-26 2002-02-26 Uwe Harneit Moisture-resistant igniter for a gas burner
JP3428632B2 (ja) * 1999-08-04 2003-07-22 ウシオ電機株式会社 ガスレーザ装置用コロナ予備電離電極
US6661826B2 (en) * 1999-08-31 2003-12-09 Cymer, Inc. Laser chamber insulator with sealed electrode feedthrough
RU2206186C2 (ru) 2000-07-04 2003-06-10 Государственный научный центр Российской Федерации Троицкий институт инновационных и термоядерных исследований Способ получения коротковолнового излучения из газоразрядной плазмы и устройство для его реализации
US6804327B2 (en) * 2001-04-03 2004-10-12 Lambda Physik Ag Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays
JP2006273670A (ja) 2005-03-29 2006-10-12 Ngk Insulators Ltd アルミナ管
US20060222034A1 (en) * 2005-03-31 2006-10-05 Cymer, Inc. 6 Khz and above gas discharge laser system
US7542502B2 (en) * 2005-09-27 2009-06-02 Cymer, Inc. Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
JP5454842B2 (ja) * 2008-06-30 2014-03-26 ギガフォトン株式会社 高繰返し高出力エキシマレーザー装置
JP6208483B2 (ja) * 2013-07-10 2017-10-04 ギガフォトン株式会社 予備電離放電装置及びレーザ装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8311303U1 (de) * 1983-04-15 1986-09-25 Siemens AG, 1000 Berlin und 8000 München Transversal angeregter Gaslaser
EP0532751B1 (de) * 1991-02-08 1995-05-03 Mitsubishi Denki Kabushiki Kaisha Mit transversaler entladung gepumpter pulslaser
DE4113241C2 (de) * 1991-04-23 1994-08-11 Lambda Physik Forschung Gepulster Gasentladungslaser
US5337330A (en) * 1992-10-09 1994-08-09 Cymer Laser Technologies Pre-ionizer for a laser

Also Published As

Publication number Publication date
EP0798823A1 (de) 1997-10-01
KR100271013B1 (ko) 2000-12-01
KR970068063A (ko) 1997-10-13
JPH1056220A (ja) 1998-02-24
CA2200268C (en) 2005-10-04
DE69700163T2 (de) 1999-07-22
EP0798823B1 (de) 1999-03-31
JP3359838B2 (ja) 2002-12-24
US5719896A (en) 1998-02-17
CA2200268A1 (en) 1997-09-29

Similar Documents

Publication Publication Date Title
DE69700163D1 (de) Preiswerter Korona-Vorionisierer für einen Laser
DE69318417D1 (de) Preionisator für laser
DE69621386D1 (de) Empfänger für einen Laserentfernungsmesser
DE69221458D1 (de) Bausatz für einen Laserdiodenblock
DE69834292D1 (de) Gehäuse für laserdiodenreihe
DE69506689T2 (de) Laser
DE69514091T2 (de) Drehverbindung für einen seitlichen aussenrückblickspiegel
DE69629384D1 (de) Anlegesystem für ein flugzeug
DE69511501T2 (de) Regelsystem für einen Wechselstromgenerator
DE69827354D1 (de) Rauchreduziersystem für einen Strassenfertiger
DE69605245T2 (de) Laser
DE69822362D1 (de) Raumfilter für einen Hochleistungslaserstrahl
DE69614490T2 (de) Gebläse für gaslaser
DE69738346D1 (de) Kompensationsverfahren für Outputvariationen für einen Druckkopf
ATA208995A (de) Meisselanordnung für einen rundschaftmeissel
DE69629784D1 (de) Punktverbesserung für Laserabbildungsvorrichtungen
DE69737692D1 (de) Halterungsanordnung für einen vibrator
BR9400378A (pt) Invólucro rígido para cigarros
DE69604082T2 (de) Baugruppe für gekühlte laserdiodenreihe
DE69709590T2 (de) Gebläse für einen gaslaser
DE69610512D1 (de) Verbesserung für einen abnehmbaren Zaun
DE59709769D1 (de) Luftsack für einen Seitenairbag
DE69604636T2 (de) Laseraufzeichnungselement
DE59600332D1 (de) Fahrschienenanordnung für verfahrbare Trennwandelemente
DE69410785T2 (de) Umspulmechanismus für filtermittel

Legal Events

Date Code Title Description
8364 No opposition during term of opposition