DE69632137D1 - Filament für infrarotstrahlung und herstellungsverfahren - Google Patents
Filament für infrarotstrahlung und herstellungsverfahrenInfo
- Publication number
- DE69632137D1 DE69632137D1 DE69632137T DE69632137T DE69632137D1 DE 69632137 D1 DE69632137 D1 DE 69632137D1 DE 69632137 T DE69632137 T DE 69632137T DE 69632137 T DE69632137 T DE 69632137T DE 69632137 D1 DE69632137 D1 DE 69632137D1
- Authority
- DE
- Germany
- Prior art keywords
- filament
- production method
- infrared radiation
- infrared
- radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000005855 radiation Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
- G01J3/108—Arrangements of light sources specially adapted for spectrometry or colorimetry for measurement in the infrared range
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
- H05B2203/003—Heaters using a particular layout for the resistive material or resistive elements using serpentine layout
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US51107095A | 1995-08-03 | 1995-08-03 | |
US511070 | 1995-08-03 | ||
PCT/US1996/012604 WO1997006417A1 (en) | 1995-08-03 | 1996-08-02 | Infrared radiation filament and method of manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69632137D1 true DE69632137D1 (de) | 2004-05-13 |
DE69632137T2 DE69632137T2 (de) | 2005-04-14 |
Family
ID=24033344
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69632137T Expired - Lifetime DE69632137T2 (de) | 1995-08-03 | 1996-08-02 | Filament für infrarotstrahlung und herstellungsverfahren |
Country Status (6)
Country | Link |
---|---|
US (2) | US5838016A (de) |
EP (1) | EP0842404B1 (de) |
AU (1) | AU6764696A (de) |
DE (1) | DE69632137T2 (de) |
NO (1) | NO980440L (de) |
WO (1) | WO1997006417A1 (de) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7119337B1 (en) | 1997-08-04 | 2006-10-10 | Ion Optics, Inc. | Infrared radiation sources, sensors and source combinations, and methods of manufacture |
AU6764696A (en) * | 1995-08-03 | 1997-03-05 | Edward A. Johnson | Infrared radiation filament and method of manufacture |
WO1999022551A1 (de) * | 1997-10-27 | 1999-05-06 | Heraeus Noblelight Gmbh | Sphäroidisch abstrahlender infrarot-strahler |
US5939726A (en) * | 1997-12-11 | 1999-08-17 | Cal-Sensors, Inc. | Infrared radiation source |
AU748350B2 (en) * | 1998-07-17 | 2002-06-06 | Kanstad Teknologi As | Infrared radiation source and its application for gas measurement |
NO312860B1 (no) | 1998-07-17 | 2002-07-08 | Kanstad Teknologi As | Metode for utforming og innfesting av et tynt, pulsvarmet legeme |
EP1101391A4 (de) * | 1998-07-30 | 2005-01-19 | Ion Optics Inc | Infrarot strahlenquellen, zusammenstellung von fühlen und quellen, und das verfahren der herstellung |
RU2181571C2 (ru) * | 1999-03-18 | 2002-04-27 | Закрытое акционерное общество "LC" | Устройство для терапевтической и косметологической фотообработки биотканей и способ его использования |
US6756594B2 (en) | 2000-01-28 | 2004-06-29 | California Institute Of Technology | Micromachined tuned-band hot bolometer emitter |
US7280749B2 (en) * | 2001-02-12 | 2007-10-09 | Ion Optics, Inc. | Filament for radiation source |
US6844553B2 (en) * | 2001-02-22 | 2005-01-18 | Ion Optics, Inc. | Absorption spectroscopy apparatus and method |
US6611085B1 (en) | 2001-08-27 | 2003-08-26 | Sandia Corporation | Photonically engineered incandescent emitter |
GB0205484D0 (en) * | 2002-03-08 | 2002-04-24 | Bae Systems Plc | Improvements in or relating to the calibration of infra red cameras |
US6933508B2 (en) * | 2002-03-13 | 2005-08-23 | Applied Materials, Inc. | Method of surface texturizing |
US6812471B2 (en) * | 2002-03-13 | 2004-11-02 | Applied Materials, Inc. | Method of surface texturizing |
US20030209669A1 (en) * | 2002-05-09 | 2003-11-13 | Chou Bruce C. S. | Miniaturized infrared gas analyzing apparatus |
US6963071B2 (en) * | 2002-11-25 | 2005-11-08 | Intel Corporation | Debris mitigation device |
US20040182847A1 (en) * | 2003-02-17 | 2004-09-23 | Kazuaki Ohkubo | Radiation source for gas sensor |
US7122815B2 (en) * | 2003-05-27 | 2006-10-17 | Wood Donald S | Infrared radiation emitter |
US7009193B2 (en) * | 2003-10-31 | 2006-03-07 | Infineon Technologies Richmond, Lp | Utilization of an ion gauge in the process chamber of a semiconductor ion implanter |
JP4877451B2 (ja) * | 2004-01-23 | 2012-02-15 | セイコーエプソン株式会社 | 圧電素子の製造方法及び液体噴射ヘッド |
WO2006007446A2 (en) * | 2004-06-17 | 2006-01-19 | Ion Optics, Inc. | Photonic crystal emitter, detector, and sensor |
EP1779444A4 (de) * | 2004-07-08 | 2011-01-05 | Ion Optics Inc | Abstimmbarer photonischer kristall |
US7227162B2 (en) * | 2005-02-11 | 2007-06-05 | Bae Systems Information And Electronic Systems Integration Inc. | Method and apparatus for providing tuning of spectral output for countermeasure devices |
US20060292310A1 (en) * | 2005-06-27 | 2006-12-28 | Applied Materials, Inc. | Process kit design to reduce particle generation |
KR100706788B1 (ko) * | 2005-11-17 | 2007-04-12 | 삼성전자주식회사 | 필라멘트 부재 및 이를 가지는 이온 주입 장치의 이온 소스 |
US8508128B2 (en) * | 2007-11-01 | 2013-08-13 | Elta Systems Ltd. | System for providing thermal energy radiation detectable by a thermal imaging unit |
JP5345333B2 (ja) * | 2008-03-31 | 2013-11-20 | Hoya株式会社 | フォトマスクブランク、フォトマスク及びその製造方法 |
WO2010103123A1 (de) * | 2009-03-13 | 2010-09-16 | Siemens Aktiengesellschaft | Infrarotstrahleranordnung für ein gasanalysengerät |
WO2016142864A1 (en) * | 2015-03-09 | 2016-09-15 | Alliance For Sustainable Energy, Llc | Batch and continuous methods for evaluating the physical and thermal properties of films |
US10181433B2 (en) | 2017-03-10 | 2019-01-15 | Microsoft Technology Licensing, Llc | Apparatus and method of tunable heat sink |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3875413A (en) * | 1973-10-09 | 1975-04-01 | Hewlett Packard Co | Infrared radiation source |
NO149679C (no) * | 1982-02-22 | 1984-05-30 | Nordal Per Erik | Anordning ved infraroed straalingskilde |
DE3437397A1 (de) * | 1984-10-12 | 1986-04-17 | Drägerwerk AG, 2400 Lübeck | Infrarot-strahler |
US4859858A (en) * | 1986-12-04 | 1989-08-22 | Cascadia Technology Corporation | Gas analyzers |
US5128514A (en) * | 1987-07-31 | 1992-07-07 | Siemens Aktiengesellschaft | Black radiator for use as an emitter in calibratable gas sensors |
US4922116A (en) * | 1988-08-04 | 1990-05-01 | Hughes Aircraft Company | Flicker free infrared simulator with resistor bridges |
NO170366C (no) * | 1989-05-26 | 1997-02-10 | Kanstad Teknologi As | Pulserende infraröd strålingskilde |
US5074490A (en) * | 1989-12-15 | 1991-12-24 | Texas Instruments Incorporated | Carrier tracking system |
GB2248141A (en) * | 1990-09-18 | 1992-03-25 | Servomex | Infra-red source |
US5152870A (en) * | 1991-01-22 | 1992-10-06 | General Electric Company | Method for producing lamp filaments of increased radiative efficiency |
AU6764696A (en) * | 1995-08-03 | 1997-03-05 | Edward A. Johnson | Infrared radiation filament and method of manufacture |
US5602398A (en) * | 1995-12-22 | 1997-02-11 | Pryon Corporation | Nondispersive infrared radiation source |
-
1996
- 1996-08-02 AU AU67646/96A patent/AU6764696A/en not_active Abandoned
- 1996-08-02 EP EP96928040A patent/EP0842404B1/de not_active Expired - Lifetime
- 1996-08-02 DE DE69632137T patent/DE69632137T2/de not_active Expired - Lifetime
- 1996-08-02 WO PCT/US1996/012604 patent/WO1997006417A1/en active IP Right Grant
-
1997
- 1997-08-04 US US08/905,599 patent/US5838016A/en not_active Expired - Lifetime
-
1998
- 1998-02-02 NO NO980440A patent/NO980440L/no unknown
- 1998-11-12 US US09/190,843 patent/US6249005B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5838016A (en) | 1998-11-17 |
WO1997006417A1 (en) | 1997-02-20 |
AU6764696A (en) | 1997-03-05 |
US6249005B1 (en) | 2001-06-19 |
DE69632137T2 (de) | 2005-04-14 |
NO980440D0 (no) | 1998-02-02 |
EP0842404A1 (de) | 1998-05-20 |
EP0842404A4 (de) | 1999-11-03 |
NO980440L (no) | 1998-03-26 |
EP0842404B1 (de) | 2004-04-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |