DE69629675D1 - Triangulationsverfahren und -system für eine 3d-abbildung mittels eines abgewinkelten abtast-energiestrahles - Google Patents

Triangulationsverfahren und -system für eine 3d-abbildung mittels eines abgewinkelten abtast-energiestrahles

Info

Publication number
DE69629675D1
DE69629675D1 DE69629675T DE69629675T DE69629675D1 DE 69629675 D1 DE69629675 D1 DE 69629675D1 DE 69629675 T DE69629675 T DE 69629675T DE 69629675 T DE69629675 T DE 69629675T DE 69629675 D1 DE69629675 D1 DE 69629675D1
Authority
DE
Germany
Prior art keywords
image
energy ray
triangulation method
scan energy
angled scan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69629675T
Other languages
English (en)
Inventor
J Svetkoff
K Rohrer
A Noblett
L Jackson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GEN SCANNING Inc
General Scanning Inc
Original Assignee
GEN SCANNING Inc
General Scanning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GEN SCANNING Inc, General Scanning Inc filed Critical GEN SCANNING Inc
Application granted granted Critical
Publication of DE69629675D1 publication Critical patent/DE69629675D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08—Monitoring manufacture of assemblages
    • H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
    • H05K13/0813—Controlling of single components prior to mounting, e.g. orientation, component geometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497—Means for monitoring or calibrating

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Operations Research (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
DE69629675T 1995-04-27 1996-04-17 Triangulationsverfahren und -system für eine 3d-abbildung mittels eines abgewinkelten abtast-energiestrahles Expired - Lifetime DE69629675D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/429,543 US5617209A (en) 1995-04-27 1995-04-27 Method and system for triangulation-based, 3-D imaging utilizing an angled scaning beam of radiant energy
PCT/US1996/005285 WO1996034253A1 (en) 1995-04-27 1996-04-17 Method and system for triangulation-based, 3-d imaging utilizing an angled scanning beam of radiant energy

Publications (1)

Publication Number Publication Date
DE69629675D1 true DE69629675D1 (de) 2003-10-02

Family

ID=23703711

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69629675T Expired - Lifetime DE69629675D1 (de) 1995-04-27 1996-04-17 Triangulationsverfahren und -system für eine 3d-abbildung mittels eines abgewinkelten abtast-energiestrahles

Country Status (6)

Country Link
US (2) US5617209A (de)
EP (1) EP0823037B1 (de)
JP (1) JP3020280B2 (de)
KR (1) KR100334862B1 (de)
DE (1) DE69629675D1 (de)
WO (1) WO1996034253A1 (de)

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020014533A1 (en) * 1995-12-18 2002-02-07 Xiaxun Zhu Automated object dimensioning system employing contour tracing, vertice detection, and forner point detection and reduction methods on 2-d range data maps
JP3410280B2 (ja) * 1996-02-16 2003-05-26 三井金属鉱業株式会社 パターン検査装置
EP1985995A3 (de) * 1996-08-16 2009-09-16 GE Healthcare Niagara Inc. Digitales Abbildungssystem für Assays in Bohrplatten, Gelen und Flecken
US5912768A (en) * 1996-12-31 1999-06-15 Cognex Corporation Depth-from-defocus optical apparatus with invariance to surface reflectance properties
US6025905A (en) * 1996-12-31 2000-02-15 Cognex Corporation System for obtaining a uniform illumination reflectance image during periodic structured illumination
US6055054A (en) * 1997-05-05 2000-04-25 Beaty; Elwin M. Three dimensional inspection system
US5878152A (en) * 1997-05-21 1999-03-02 Cognex Corporation Depth from focal gradient analysis using object texture removal by albedo normalization
US6219461B1 (en) 1997-07-29 2001-04-17 Cognex Corporation Determining a depth
US6148120A (en) * 1997-10-30 2000-11-14 Cognex Corporation Warping of focal images to correct correspondence error
US6140827A (en) 1997-12-18 2000-10-31 Micron Technology, Inc. Method and apparatus for testing bumped die
US6072898A (en) * 1998-01-16 2000-06-06 Beaty; Elwin M. Method and apparatus for three dimensional inspection of electronic components
US6915007B2 (en) * 1998-01-16 2005-07-05 Elwin M. Beaty Method and apparatus for three dimensional inspection of electronic components
US6915006B2 (en) * 1998-01-16 2005-07-05 Elwin M. Beaty Method and apparatus for three dimensional inspection of electronic components
US6098031A (en) * 1998-03-05 2000-08-01 Gsi Lumonics, Inc. Versatile method and system for high speed, 3D imaging of microscopic targets
US6366357B1 (en) * 1998-03-05 2002-04-02 General Scanning, Inc. Method and system for high speed measuring of microscopic targets
US5917655A (en) * 1998-04-06 1999-06-29 Motorola, Inc. Method and apparatus for generating a stereoscopic image
US6160906A (en) * 1998-06-01 2000-12-12 Motorola, Inc. Method and apparatus for visually inspecting an object
US5982493A (en) * 1998-06-02 1999-11-09 Motorola, Inc. Apparatus and method for acquiring multiple images
US6181472B1 (en) 1998-06-10 2001-01-30 Robotic Vision Systems, Inc. Method and system for imaging an object with a plurality of optical beams
TW412817B (en) 1998-06-19 2000-11-21 Matsushita Electric Ind Co Ltd A bump bonding apparatus and method
US6518997B1 (en) * 1998-08-05 2003-02-11 National Semiconductor Corporation Grid array inspection system and method
CA2267519A1 (en) 1999-04-13 2000-10-13 Inspeck Inc. Optical full human body 3d digitizer
US6198529B1 (en) 1999-04-30 2001-03-06 International Business Machines Corporation Automated inspection system for metallic surfaces
US7139421B1 (en) * 1999-06-29 2006-11-21 Cognex Corporation Methods and apparatuses for detecting similar features within an image
US7034272B1 (en) 1999-10-05 2006-04-25 Electro Scientific Industries, Inc. Method and apparatus for evaluating integrated circuit packages having three dimensional features
US6525331B1 (en) 1999-12-01 2003-02-25 Nanyang Technological University Ball grid array (BGA) package on-line non-contact inspection method and system
DE10194788T1 (de) 2000-01-07 2003-02-27 Cyberoptics Corp Phasenprofilometriesystem mit telezentrischem Projektor
US6593705B1 (en) 2000-01-07 2003-07-15 Cyberoptics Corporation Rapid-firing flashlamp discharge circuit
US6549647B1 (en) 2000-01-07 2003-04-15 Cyberoptics Corporation Inspection system with vibration resistant video capture
US6724489B2 (en) * 2000-09-22 2004-04-20 Daniel Freifeld Three dimensional scanning camera
US6870611B2 (en) * 2001-07-26 2005-03-22 Orbotech Ltd. Electrical circuit conductor inspection
US6452285B1 (en) * 2000-10-17 2002-09-17 Advanced Micro Devices, Inc. Fabrication of standard defects in contacts
JP4502496B2 (ja) * 2000-11-16 2010-07-14 富士通株式会社 Ｂｇａ実装時におけるはんだ形状評価方法及びｂｇａ実装時におけるはんだ形状評価装置及びｂｇａ実装時におけるはんだ形状評価プログラムを収納したコンピュータ読み取り可能な記録媒体
EP1220596A1 (de) * 2000-12-29 2002-07-03 Icos Vision Systems N.V. Verfahren und Einrichtung zur Lageerfassung der Anschlusskontakte elektronischer Bauelemente
US6951995B2 (en) * 2002-03-27 2005-10-04 Gsi Lumonics Corp. Method and system for high-speed, precise micromachining an array of devices
ATE490703T1 (de) * 2002-04-04 2010-12-15 Amfit Inc Kompakter optischer konturdigitalisierer
JP4493421B2 (ja) * 2004-06-30 2010-06-30 株式会社リコー プリント回路基板検査装置とプリント回路基板組み立て検査ラインシステムおよびプログラム
US7593565B2 (en) * 2004-12-08 2009-09-22 Rudolph Technologies, Inc. All surface data for use in substrate inspection
CN101600978B (zh) * 2005-08-26 2012-09-05 卡姆特有限公司 用于控制光束的角覆盖范围的设备和方法
US9052294B2 (en) * 2006-05-31 2015-06-09 The Boeing Company Method and system for two-dimensional and three-dimensional inspection of a workpiece
US8124429B2 (en) * 2006-12-15 2012-02-28 Richard Norman Reprogrammable circuit board with alignment-insensitive support for multiple component contact types
US20080199068A1 (en) * 2007-01-10 2008-08-21 Duquette David W Inspection System
EP2106529B1 (de) * 2007-01-25 2013-07-31 Trimble AB Prädiktionsalgorithmus zum scannen eines objektes
US7535560B2 (en) * 2007-02-26 2009-05-19 Aceris 3D Inspection Inc. Method and system for the inspection of integrated circuit devices having leads
CA2597891A1 (en) * 2007-08-20 2009-02-20 Marc Miousset Multi-beam optical probe and system for dimensional measurement
WO2009061458A1 (en) * 2007-11-07 2009-05-14 Amfit, Inc. Impression foam digital scanner
US8059280B2 (en) 2008-01-31 2011-11-15 Cyberoptics Corporation Method for three-dimensional imaging using multi-phase structured light
KR20120113245A (ko) * 2009-12-30 2012-10-12 지에스아이 그룹 코포레이션 고속 빔 편향을 이용한 링크 처리
US8389255B2 (en) * 2010-03-26 2013-03-05 E.I. De Pont De Nemours And Company Perhydrolase providing improved specific activity
SG180036A1 (en) * 2010-10-19 2012-05-30 Azimuth Intellectual Products Pte Ltd Apparatus and methods for acquiring an image of a goods package
US8416403B2 (en) 2010-10-29 2013-04-09 GII Acquisitiom, LLC Method and system for high-speed, high-resolution 3-D imaging of manufactured parts of various sizes
GB201019537D0 (en) * 2010-11-18 2010-12-29 20X20 Vision Ltd PCB reflow inspection angled measurement
CN103443802B (zh) 2011-01-24 2016-12-14 数据逻辑Adc公司 用于读取光学代码的系统和方法
US9225793B2 (en) 2011-01-28 2015-12-29 Cisco Technology, Inc. Aggregating sensor data
US9171079B2 (en) 2011-01-28 2015-10-27 Cisco Technology, Inc. Searching sensor data
US9275093B2 (en) * 2011-01-28 2016-03-01 Cisco Technology, Inc. Indexing sensor data
US9697596B2 (en) 2011-05-17 2017-07-04 Gii Acquisition, Llc Method and system for optically inspecting parts
US9575013B2 (en) 2011-05-17 2017-02-21 Gii Acquisition, Llc Non-contact method and system for inspecting a manufactured part at an inspection station having a measurement axis
US10094785B2 (en) 2011-05-17 2018-10-09 Gii Acquisition, Llc Method and system for optically inspecting headed manufactured parts
US9370799B2 (en) 2011-05-17 2016-06-21 Gii Acquisition, Llc Method and system for optically inspecting a manufactured part at a single inspection station having a measurement axis
US9228957B2 (en) 2013-05-24 2016-01-05 Gii Acquisition, Llc High speed method and system for inspecting a stream of parts
US10088431B2 (en) 2011-05-17 2018-10-02 Gii Acquisition, Llc Method and system for optically inspecting headed manufactured parts
KR101614061B1 (ko) * 2012-03-29 2016-04-20 주식회사 고영테크놀러지 조인트 검사 장치
US9486840B2 (en) 2013-05-24 2016-11-08 Gii Acquisition, Llc High-speed, triangulation-based, 3-D method and system for inspecting manufactured parts and sorting the inspected parts
US8993914B2 (en) 2012-12-14 2015-03-31 Gii Acquisition, Llc High-speed, high-resolution, triangulation-based, 3-D method and system for inspecting manufactured parts and sorting the inspected parts
US10126252B2 (en) 2013-04-29 2018-11-13 Cyberoptics Corporation Enhanced illumination control for three-dimensional imaging
US10207297B2 (en) 2013-05-24 2019-02-19 GII Inspection, LLC Method and system for inspecting a manufactured part at an inspection station
US9539619B2 (en) 2013-05-24 2017-01-10 Gii Acquisition, Llc High speed method and system for inspecting a stream of parts at a pair of inspection stations
US20150300962A1 (en) * 2014-04-16 2015-10-22 Texas Instruments Incorporated Assembly For Inspecting Machine Parts Used In The Production Of Semiconductor Components
US10300510B2 (en) 2014-08-01 2019-05-28 General Inspection Llc High speed method and system for inspecting a stream of parts
JP6507653B2 (ja) * 2015-01-13 2019-05-08 オムロン株式会社 検査装置及び検査装置の制御方法
CN104990926B (zh) * 2015-06-25 2017-09-29 哈尔滨工业大学 一种基于视觉的tr元件定位和缺陷检测方法
CN105445752A (zh) * 2015-12-16 2016-03-30 上海倍肯机电科技有限公司 基于激光三维成像的输电线路保护装置及方法
US10333632B2 (en) * 2017-04-03 2019-06-25 Ets-Lindgren, Inc. Method and system for testing beam forming capabilities of wireless devices

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4700045A (en) * 1985-04-30 1987-10-13 Chesapeake Laser Systems, Inc. Seam tracking system with acousto-optical scanner
JPS6260075A (ja) * 1985-09-10 1987-03-16 Hitachi Ltd 形状認識装置
SE457294B (sv) * 1986-03-19 1988-12-12 Svecia Silkscreen Maskiner Ab Anordning foer faststaellande av ett applicerat trycks tjocklek
US4728195A (en) * 1986-03-19 1988-03-01 Cognex Corporation Method for imaging printed circuit board component leads
US4811410A (en) * 1986-12-08 1989-03-07 American Telephone And Telegraph Company Linescan inspection system for circuit boards
DE69014505T2 (de) * 1989-09-12 1995-05-04 Matsushita Electric Ind Co Ltd System zur optischen Inspektion von Bedingungen von Teilen, die auf einem Substrat angebracht sind.
US5058178A (en) * 1989-12-21 1991-10-15 At&T Bell Laboratories Method and apparatus for inspection of specular, three-dimensional features
IT1238711B (it) * 1990-04-13 1993-09-01 Galileo Spa Off Metodo ed impianto interferometrico a frange codificate per rivelazione del fronte d'onda in ottica.
US5118192A (en) * 1990-07-11 1992-06-02 Robotic Vision Systems, Inc. System for 3-D inspection of objects
EP0471196A3 (en) * 1990-08-13 1994-09-07 Siemens Ag Image analysis method
US5371375A (en) * 1992-06-24 1994-12-06 Robotic Vision Systems, Inc. Method for obtaining three-dimensional data from multiple parts or devices in a multi-pocketed tray
US5546189A (en) * 1994-05-19 1996-08-13 View Engineering, Inc. Triangulation-based 3D imaging and processing method and system

Also Published As

Publication number Publication date
KR19990008085A (ko) 1999-01-25
EP0823037B1 (de) 2003-08-27
US5617209A (en) 1997-04-01
US5815275A (en) 1998-09-29
WO1996034253A1 (en) 1996-10-31
EP0823037A4 (de) 1998-08-19
JPH10510366A (ja) 1998-10-06
EP0823037A1 (de) 1998-02-11
JP3020280B2 (ja) 2000-03-15
KR100334862B1 (ko) 2002-10-19

Similar Documents

Publication Publication Date Title
DE69629675D1 (de) Triangulationsverfahren und -system für eine 3d-abbildung mittels eines abgewinkelten abtast-energiestrahles
IL123966A (en) Method and apparatus for reflected imaging analysis
DE3852890T2 (de) Verfahren und vorrichtung zur schnellen, hochauflösenden, dreidimensionalen abbildung eines gegenstandes an einer untersuchungsstation.
GB2309847B (en) Stereoscopic image generation method and apparatus thereof
AU4846293A (en) Method and apparatus for elastographic measurement and imaging
DE68914206T2 (de) Verfahren und System zur Verbesserung eines digitalisierten Bildes.
DE69612148T2 (de) Ultraschall- Bildverarbeitungsvorrichtung und ein Verfahren zum Erzeugen eines Ultraschallbilds
DE69811799D1 (de) Verfahren und Gerät zur Bilderzeugung eines Röntgenbildes mittels Computertomograf
IL121855A0 (en) Methods and apparatus for scanning an object and displaying an image in a computed tomography system
AU1803095A (en) Method and apparatus for optimizing sub-pixel resolution in a triangulation based distance measuring device
IL117388A0 (en) System and method for contraband detection using nuclear quadrupole resonance
EP0879395A4 (de) Verfahren, system und vorrichtung zur vermessung der form eines objektes mittels laser
EP0577425A3 (de) Verfahren und Gerät zum Vorverarbeiten von Kegelstrahlprojektionsdaten zur exacten dreidimenzionalen CT-Bild Rekonstruktion eines Teilobjekts.
EP0795125A4 (de) Abbildungsverfahren und vorrichtung zur erzeugung einer projektion eines objektes mit durchdringender strahlung
EP0755024A3 (de) Verfahren zur Bildübereinstimmung und System zur Prüfung von Produkten unter Verwendung dieses Verfahrens
IL103577A0 (en) Apparatus and method for detecting and locating the origin of a gamma ray in an imaging system
DE69615738D1 (de) Bilderzeugungsgerät und Verfahren dafür
IL119705A (en) Methods and apparatus for detecting beam motion in computed tomography imaging system
DE69312866T2 (de) Verfahren und Vorrichtung zur Untersuchung eines Objektes mittels eines reflektierbaren Strahlungsbündels
BR9506704A (pt) Aparelho e sistema de tomografia e processo de varredura de um objeto com um sistema de varredura topográfica
DE69618913D1 (de) Eichung eines interaktiven Bürosystems
EP0450334A3 (en) Ultrasonic beam aiming apparatus and method for nondestructive testing
EE200000286A (et) Seade ja meetod pseudojuhusliku arvu genereerimiseks
ITMI941973A0 (it) Apparato e metodo per ridurre false immagini lineari di griglia per raggi x
GB9713769D0 (en) Method and apparatus for generating an optical beam for use in an imaging system

Legal Events

Date Code Title Description
8332 No legal effect for de