DE69624107D1 - Flash-EEPROM-Zelle mit einziger Polysiliziumschicht und Verfahren zur Herstellung - Google Patents
Flash-EEPROM-Zelle mit einziger Polysiliziumschicht und Verfahren zur HerstellungInfo
- Publication number
- DE69624107D1 DE69624107D1 DE69624107T DE69624107T DE69624107D1 DE 69624107 D1 DE69624107 D1 DE 69624107D1 DE 69624107 T DE69624107 T DE 69624107T DE 69624107 T DE69624107 T DE 69624107T DE 69624107 D1 DE69624107 D1 DE 69624107D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- polysilicon layer
- flash eeprom
- eeprom cell
- single polysilicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title 1
- 229920005591 polysilicon Polymers 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
- H01L29/7884—Programmable transistors with only two possible levels of programmation charging by hot carrier injection
- H01L29/7885—Hot carrier injection from the channel
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP96830398A EP0820103B1 (de) | 1996-07-18 | 1996-07-18 | Flash-EEPROM-Zelle mit einziger Polysiliziumschicht und Verfahren zur Herstellung |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69624107D1 true DE69624107D1 (de) | 2002-11-07 |
DE69624107T2 DE69624107T2 (de) | 2003-06-05 |
Family
ID=8225963
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69624107T Expired - Fee Related DE69624107T2 (de) | 1996-07-18 | 1996-07-18 | Flash-EEPROM-Zelle mit einziger Polysiliziumschicht und Verfahren zur Herstellung |
Country Status (4)
Country | Link |
---|---|
US (2) | US5936276A (de) |
EP (1) | EP0820103B1 (de) |
JP (1) | JPH1070204A (de) |
DE (1) | DE69624107T2 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002541669A (ja) * | 1999-03-31 | 2002-12-03 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 不揮発性メモリセルを有する半導体デバイス |
EP1091408A1 (de) | 1999-10-07 | 2001-04-11 | STMicroelectronics S.r.l. | Festwertspeicherzelle mit einer Polysiliziumebene |
EP1096575A1 (de) | 1999-10-07 | 2001-05-02 | STMicroelectronics S.r.l. | Nichtflüchtige Speicherzelle mit einer Polysiliziumsschicht und Verfahren zur Herstellung |
EP1376698A1 (de) * | 2002-06-25 | 2004-01-02 | STMicroelectronics S.r.l. | Elektrisch lösch- und programmierbare nicht flüchtige Speicherzelle |
US20040051162A1 (en) * | 2002-09-13 | 2004-03-18 | International Business Machines Corporation | Structure and method of providing reduced programming voltage antifuse |
JP2004200553A (ja) * | 2002-12-20 | 2004-07-15 | Fujitsu Ltd | 半導体装置及びその製造方法 |
US7405442B2 (en) * | 2004-11-02 | 2008-07-29 | United Microelectronics Corp. | Electrically erasable programmable read-only memory cell and memory device |
US7405123B2 (en) * | 2004-09-16 | 2008-07-29 | United Microelectronics Corp. | Electrically erasable programmable read-only memory cell and memory device and manufacturing method thereof |
US8558278B2 (en) | 2007-01-16 | 2013-10-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Strained transistor with optimized drive current and method of forming |
US7943961B2 (en) | 2008-03-13 | 2011-05-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Strain bars in stressed layers of MOS devices |
US7808051B2 (en) * | 2008-09-29 | 2010-10-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Standard cell without OD space effect in Y-direction |
US8901615B2 (en) | 2012-06-13 | 2014-12-02 | Synopsys, Inc. | N-channel and P-channel end-to-end finfet cell architecture |
ITTO20120682A1 (it) | 2012-07-31 | 2014-02-01 | St Microelectronics Pvt Ltd | Dispositivo di memoria non volatile con celle raggruppate |
US11600628B2 (en) * | 2020-01-15 | 2023-03-07 | Globalfoundries U.S. Inc. | Floating gate memory cell and memory array structure |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL7500550A (nl) * | 1975-01-17 | 1976-07-20 | Philips Nv | Halfgeleider-geheugeninrichting. |
JPS59155968A (ja) * | 1983-02-25 | 1984-09-05 | Toshiba Corp | 半導体記憶装置 |
JPS6068658A (ja) * | 1983-09-26 | 1985-04-19 | Fujitsu Ltd | 半導体装置の製造方法 |
IT1232354B (it) * | 1989-09-04 | 1992-01-28 | Sgs Thomson Microelectronics | Procedimento per la realizzazione di celle di memoria eeprom a singolo livello di polisilicio e ossido sottile utilizzando ossidazione differenziale. |
DE69032937T2 (de) * | 1990-07-24 | 1999-06-17 | St Microelectronics Srl | Verfahren zur Herstellung einer N-Kanal-EPROM-Zelle mit einer einzigen Polysiliziumschicht |
DE69630107D1 (de) * | 1996-04-15 | 2003-10-30 | St Microelectronics Srl | Mit einem EEPROM integrierter FLASH-EPROM |
US5753954A (en) * | 1996-07-19 | 1998-05-19 | National Semiconductor Corporation | Single-poly neuron MOS transistor |
US5786614A (en) * | 1997-04-08 | 1998-07-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Separated floating gate for EEPROM application |
-
1996
- 1996-07-18 EP EP96830398A patent/EP0820103B1/de not_active Expired - Lifetime
- 1996-07-18 DE DE69624107T patent/DE69624107T2/de not_active Expired - Fee Related
-
1997
- 1997-06-26 US US08/883,405 patent/US5936276A/en not_active Expired - Lifetime
- 1997-07-16 JP JP9191226A patent/JPH1070204A/ja active Pending
-
1999
- 1999-06-08 US US09/328,033 patent/US6355523B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0820103B1 (de) | 2002-10-02 |
EP0820103A1 (de) | 1998-01-21 |
US6355523B1 (en) | 2002-03-12 |
US5936276A (en) | 1999-08-10 |
JPH1070204A (ja) | 1998-03-10 |
DE69624107T2 (de) | 2003-06-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |