DE69619899D1 - Herstellungsverfahren für Elemente von schwimmenden, starren Mikrostrukturen und Vorrichtung, die mit solchen Elementen ausgerüstet ist - Google Patents

Herstellungsverfahren für Elemente von schwimmenden, starren Mikrostrukturen und Vorrichtung, die mit solchen Elementen ausgerüstet ist

Info

Publication number
DE69619899D1
DE69619899D1 DE69619899T DE69619899T DE69619899D1 DE 69619899 D1 DE69619899 D1 DE 69619899D1 DE 69619899 T DE69619899 T DE 69619899T DE 69619899 T DE69619899 T DE 69619899T DE 69619899 D1 DE69619899 D1 DE 69619899D1
Authority
DE
Germany
Prior art keywords
elements
floating
manufacturing process
device equipped
microstructures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69619899T
Other languages
English (en)
Other versions
DE69619899T2 (de
Inventor
Michel Vilain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69619899D1 publication Critical patent/DE69619899D1/de
Application granted granted Critical
Publication of DE69619899T2 publication Critical patent/DE69619899T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00642—Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
    • B81C1/0065—Mechanical properties
    • B81C1/00658—Treatments for improving the stiffness of a vibrating element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/007—For controlling stiffness, e.g. ribs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/03—Processes for manufacturing substrate-free structures
    • B81C2201/038—Processes for manufacturing substrate-free structures not provided for in B81C2201/034 - B81C2201/036

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Theoretical Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Drying Of Semiconductors (AREA)
  • Radiation Pyrometers (AREA)
DE69619899T 1995-07-13 1996-07-11 Herstellungsverfahren für Elemente von schwimmenden, starren Mikrostrukturen und Vorrichtung, die mit solchen Elementen ausgerüstet ist Expired - Fee Related DE69619899T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9508525A FR2736654B1 (fr) 1995-07-13 1995-07-13 Procede de fabrication d'elements de microstructures flottants rigides et dispositif equipe de tels elements

Publications (2)

Publication Number Publication Date
DE69619899D1 true DE69619899D1 (de) 2002-04-25
DE69619899T2 DE69619899T2 (de) 2002-11-14

Family

ID=9480986

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69619899T Expired - Fee Related DE69619899T2 (de) 1995-07-13 1996-07-11 Herstellungsverfahren für Elemente von schwimmenden, starren Mikrostrukturen und Vorrichtung, die mit solchen Elementen ausgerüstet ist

Country Status (5)

Country Link
US (2) US5930594A (de)
EP (1) EP0753671B1 (de)
JP (1) JPH0943061A (de)
DE (1) DE69619899T2 (de)
FR (1) FR2736654B1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6707121B2 (en) * 1997-03-28 2004-03-16 Interuniversitair Microelektronica Centrum (Imec Vzw) Micro electro mechanical systems and devices
EP1136440A1 (de) * 2000-03-24 2001-09-26 Interuniversitair Micro-Elektronica Centrum Vzw Verfahren zur Verbesserung der mechanischen Festigkeit von mikro-elektro-mechanischen Systemen und so hergestellte Anordnungen
US6287885B1 (en) 1998-05-08 2001-09-11 Denso Corporation Method for manufacturing semiconductor dynamic quantity sensor
US6309801B1 (en) * 1998-11-18 2001-10-30 U.S. Philips Corporation Method of manufacturing an electronic device comprising two layers of organic-containing material
US6171880B1 (en) * 1999-06-14 2001-01-09 The United States Of America As Represented By The Secretary Of Commerce Method of manufacture of convective accelerometers
JP2001230233A (ja) * 2000-02-16 2001-08-24 Mitsubishi Electric Corp 半導体装置の製造方法
EP1251099A3 (de) * 2000-03-24 2004-07-21 Interuniversitair Microelektronica Centrum Vzw Verfahren zur Verbesserung der mechanischen Festigkeit von mikroelektromechanischen Systemen und so hergestellte Anordnungen
FI111457B (fi) * 2000-10-02 2003-07-31 Nokia Corp Mikromekaaninen rakenne
US6621083B2 (en) 2000-12-29 2003-09-16 Honeywell International Inc. High-absorption wide-band pixel for bolometer arrays
JP2004005923A (ja) * 2002-03-29 2004-01-08 Fujitsu Ltd 磁気ヘッドの製造方法および磁気ヘッド、パターン形成方法
US6770569B2 (en) * 2002-08-01 2004-08-03 Freescale Semiconductor, Inc. Low temperature plasma Si or SiGe for MEMS applications
US6891161B2 (en) * 2003-01-17 2005-05-10 Drs Sensors & Targeting Systems, Inc. Pixel structure and an associated method of fabricating the same
US8043950B2 (en) * 2005-10-26 2011-10-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
FR2906029B1 (fr) * 2006-09-18 2010-09-24 Ulis Dispositif electronique de detection et detecteur comprenant un tel dispositif
GB201216529D0 (en) * 2012-09-17 2012-10-31 Univ St Andrews Torsional stiffness measurement

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3638481A (en) * 1969-03-04 1972-02-01 Becton Dickinson Co Pressure sensor
US4116063A (en) * 1975-11-26 1978-09-26 Agence Nationale De Valorisation De La Recherche Liquid helium-cooled bolometer wherein the sensitive element and the elements linking the latter to the electrical connections are obtained from the same semiconductor body
JPS59110967A (ja) * 1982-12-16 1984-06-27 Nec Corp 弁素子の製造方法
US5021663B1 (en) * 1988-08-12 1997-07-01 Texas Instruments Inc Infrared detector
US5177661A (en) * 1989-01-13 1993-01-05 Kopin Corporation SOI diaphgram sensor
US5072288A (en) * 1989-02-21 1991-12-10 Cornell Research Foundation, Inc. Microdynamic release structure
EP0526551B1 (de) * 1990-04-26 1996-12-11 The Commonwealth Of Australia Thermischer infrarotdetektor des bolometertyps mit halbleiterfilm
CN1018844B (zh) * 1990-06-02 1992-10-28 中国科学院兰州化学物理研究所 防锈干膜润滑剂
US5288649A (en) * 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
US5397904A (en) * 1992-07-02 1995-03-14 Cornell Research Foundation, Inc. Transistor microstructure
WO1994007115A1 (en) * 1992-09-17 1994-03-31 Mitsubishi Denki Kabushiki Kaisha Infrared detector array and production method therefor
JP3333560B2 (ja) * 1992-10-23 2002-10-15 リコーエレメックス株式会社 シリコン基板のエッチング方法
FR2697536B1 (fr) * 1992-11-04 1995-01-06 Suisse Electronique Microtech Procédé de fabrication d'un élément de microstructure mécanique.
FR2700065B1 (fr) * 1992-12-28 1995-02-10 Commissariat Energie Atomique Procédé de fabrication d'accéléromètres utilisant la technologie silicium sur isolant.
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5451371A (en) * 1994-06-09 1995-09-19 Ford Motor Company High-sensitivity, silicon-based, microcalorimetric gas sensor
US5573679A (en) * 1995-06-19 1996-11-12 Alberta Microelectronic Centre Fabrication of a surface micromachined capacitive microphone using a dry-etch process
JPH0983029A (ja) * 1995-09-11 1997-03-28 Mitsubishi Electric Corp 薄膜圧電素子の製造方法
US5824565A (en) * 1996-02-29 1998-10-20 Motorola, Inc. Method of fabricating a sensor

Also Published As

Publication number Publication date
EP0753671A1 (de) 1997-01-15
FR2736654B1 (fr) 1997-08-22
US5930594A (en) 1999-07-27
EP0753671B1 (de) 2002-03-20
US5949119A (en) 1999-09-07
FR2736654A1 (fr) 1997-01-17
DE69619899T2 (de) 2002-11-14
JPH0943061A (ja) 1997-02-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee