DE69615598D1 - Erzeugung des Magnesiumdampfes mit hocher Verdampfungsgeschwindigkeit - Google Patents
Erzeugung des Magnesiumdampfes mit hocher VerdampfungsgeschwindigkeitInfo
- Publication number
- DE69615598D1 DE69615598D1 DE69615598T DE69615598T DE69615598D1 DE 69615598 D1 DE69615598 D1 DE 69615598D1 DE 69615598 T DE69615598 T DE 69615598T DE 69615598 T DE69615598 T DE 69615598T DE 69615598 D1 DE69615598 D1 DE 69615598D1
- Authority
- DE
- Germany
- Prior art keywords
- generation
- evaporation rate
- magnesium vapor
- high evaporation
- magnesium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 title 1
- 230000008020 evaporation Effects 0.000 title 1
- 238000001704 evaporation Methods 0.000 title 1
- 229910052749 magnesium Inorganic materials 0.000 title 1
- 239000011777 magnesium Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Manufacture And Refinement Of Metals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7094333A JPH08269696A (ja) | 1995-03-28 | 1995-03-28 | Mgの蒸発方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69615598D1 true DE69615598D1 (de) | 2001-11-08 |
DE69615598T2 DE69615598T2 (de) | 2002-10-02 |
Family
ID=14107361
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69615598T Expired - Fee Related DE69615598T2 (de) | 1995-03-28 | 1996-02-27 | Erzeugung des Magnesiumdampfes mit hocher Verdampfungsgeschwindigkeit |
Country Status (6)
Country | Link |
---|---|
US (1) | US5705226A (de) |
EP (1) | EP0735157B1 (de) |
JP (1) | JPH08269696A (de) |
KR (1) | KR100287978B1 (de) |
CN (1) | CN1070934C (de) |
DE (1) | DE69615598T2 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000068055A (ja) * | 1998-08-26 | 2000-03-03 | Tdk Corp | 有機el素子用蒸発源、この有機el素子用蒸発源を用いた有機el素子の製造装置および製造方法 |
EP1174526A1 (de) * | 2000-07-17 | 2002-01-23 | Nederlandse Organisatie voor Toegepast Natuurwetenschappelijk Onderzoek TNO | Kontinuierliches Abscheiden aus der Gasphase |
DE10111515A1 (de) * | 2001-02-19 | 2002-08-14 | Fraunhofer Ges Forschung | Plasma-Beschichtungsanlage, Plasma-Beschichtungsverfahren und Verwendung des Verfahrens |
US8522799B2 (en) * | 2005-12-30 | 2013-09-03 | Lam Research Corporation | Apparatus and system for cleaning a substrate |
DE102004041846B4 (de) * | 2004-04-27 | 2007-08-02 | Von Ardenne Anlagentechnik Gmbh | Verdampfungseinrichtung und Verfahren zum Verdampfen von Beschichtungsmaterial |
KR20060081015A (ko) * | 2005-01-06 | 2006-07-12 | 삼성에스디아이 주식회사 | 진공 증착기 |
US7398605B2 (en) * | 2005-02-04 | 2008-07-15 | Eastman Kodak Company | Method of feeding particulate material to a heated vaporization surface |
US7165340B2 (en) * | 2005-02-04 | 2007-01-23 | Eastman Kodak Company | Feeding organic material to a heated surface |
DE102005049906B4 (de) * | 2005-10-17 | 2009-12-03 | Von Ardenne Anlagentechnik Gmbh | Verfahren und Vorrichtung zur Verdampfung von Verdampfungsmaterial |
ITMI20060444A1 (it) * | 2006-03-13 | 2007-09-14 | Getters Spa | Uso di composizioni magnesio-rame per l'evaporazione di magnesio e dispensatori di magnesio |
CN104078626B (zh) * | 2014-07-22 | 2016-07-06 | 深圳市华星光电技术有限公司 | 用于oled材料蒸镀的加热装置 |
CN104988462B (zh) * | 2015-07-23 | 2017-05-31 | 京东方科技集团股份有限公司 | 一种坩埚装置 |
CN112630105A (zh) * | 2020-12-09 | 2021-04-09 | 中山赛特奥日用科技有限公司 | 一种模拟电加热香氛产品实际挥发的蒸发方法 |
CN115181861A (zh) * | 2022-07-20 | 2022-10-14 | 磐一(西安)装备技术有限公司 | 一种电子束对金属镁锭扫描获取高纯镁装置及提纯方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2793609A (en) * | 1953-01-26 | 1957-05-28 | British Dielectric Res Ltd | Means for the deposition of materials by evaporation in a vacuum |
US2996418A (en) * | 1957-06-05 | 1961-08-15 | Gen Motors Corp | Method and apparatus for vapor depositing thin films |
US3637421A (en) * | 1969-08-27 | 1972-01-25 | Joseph Paul Gimigliano | Vacuum vapor coating with metals of high vapor pressure |
US5002837A (en) * | 1988-07-06 | 1991-03-26 | Kabushiki Kaisha Kobe Seiko Sho | Zn-Mg alloy vapor deposition plated metals of high corrosion resistance, as well as method of producing them |
JPH0273960A (ja) * | 1988-09-09 | 1990-03-13 | Kobe Steel Ltd | 真空蒸着装置 |
JPH02125866A (ja) * | 1988-11-04 | 1990-05-14 | Kobe Steel Ltd | 合金蒸着めっき装置 |
JPH0689418B2 (ja) * | 1989-05-19 | 1994-11-09 | 宇部興産株式会社 | 連続マグネシウム溶解蒸発装置 |
JPH04308076A (ja) * | 1991-04-03 | 1992-10-30 | Mitsubishi Heavy Ind Ltd | 昇華性物質真空蒸着装置 |
JPH0892734A (ja) * | 1994-09-22 | 1996-04-09 | Nisshin Steel Co Ltd | Mgの蒸発方法 |
JPH08165562A (ja) * | 1994-12-12 | 1996-06-25 | Nisshin Steel Co Ltd | 安定条件下でのMg蒸発方法及び装置 |
-
1995
- 1995-03-28 JP JP7094333A patent/JPH08269696A/ja not_active Withdrawn
-
1996
- 1996-02-27 DE DE69615598T patent/DE69615598T2/de not_active Expired - Fee Related
- 1996-02-27 EP EP96102923A patent/EP0735157B1/de not_active Expired - Lifetime
- 1996-03-27 US US08/622,822 patent/US5705226A/en not_active Expired - Fee Related
- 1996-03-28 KR KR1019960008764A patent/KR100287978B1/ko not_active IP Right Cessation
- 1996-03-28 CN CN96102793A patent/CN1070934C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH08269696A (ja) | 1996-10-15 |
KR960034458A (ko) | 1996-10-22 |
EP0735157B1 (de) | 2001-10-04 |
KR100287978B1 (ko) | 2001-05-02 |
EP0735157A3 (de) | 1997-08-27 |
EP0735157A2 (de) | 1996-10-02 |
CN1070934C (zh) | 2001-09-12 |
US5705226A (en) | 1998-01-06 |
CN1137574A (zh) | 1996-12-11 |
DE69615598T2 (de) | 2002-10-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de | ||
8370 | Indication related to discontinuation of the patent is to be deleted | ||
8363 | Opposition against the patent | ||
8339 | Ceased/non-payment of the annual fee |