DE69601242D1 - Vorrichtung zur Erzeugung von Ozon - Google Patents

Vorrichtung zur Erzeugung von Ozon

Info

Publication number
DE69601242D1
DE69601242D1 DE69601242T DE69601242T DE69601242D1 DE 69601242 D1 DE69601242 D1 DE 69601242D1 DE 69601242 T DE69601242 T DE 69601242T DE 69601242 T DE69601242 T DE 69601242T DE 69601242 D1 DE69601242 D1 DE 69601242D1
Authority
DE
Germany
Prior art keywords
generating ozone
ozone
generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69601242T
Other languages
English (en)
Other versions
DE69601242T2 (de
Inventor
Naruhiko Kaji
Yutaka Nakano
Rempei Nakata
Minoru Harada
Ryoichi Shinjo
Manabu Tsujimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of DE69601242D1 publication Critical patent/DE69601242D1/de
Application granted granted Critical
Publication of DE69601242T2 publication Critical patent/DE69601242T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • C01B13/11—Preparation of ozone by electric discharge
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
DE69601242T 1995-04-17 1996-04-16 Vorrichtung zur Erzeugung von Ozon Expired - Fee Related DE69601242T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11512895 1995-04-17

Publications (2)

Publication Number Publication Date
DE69601242D1 true DE69601242D1 (de) 1999-02-11
DE69601242T2 DE69601242T2 (de) 1999-05-20

Family

ID=14654970

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69601242T Expired - Fee Related DE69601242T2 (de) 1995-04-17 1996-04-16 Vorrichtung zur Erzeugung von Ozon

Country Status (5)

Country Link
US (1) US5702673A (de)
EP (1) EP0738684B1 (de)
KR (1) KR100411615B1 (de)
DE (1) DE69601242T2 (de)
TW (1) TW368491B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100481744B1 (ko) * 1995-11-07 2005-08-18 스미토모세이미쓰고교가부시키가이샤 오존기체배관에서의금속불순물감소방법
US5700505A (en) * 1995-12-28 1997-12-23 Mei Research, Inc. Method of improving head rice yield
JP4015210B2 (ja) * 1996-05-30 2007-11-28 富士電機システムズ株式会社 オゾン発生装置
JP2787914B2 (ja) * 1996-06-27 1998-08-20 日本電気株式会社 半導体ウェーハの保管方法及び保管容器
JPH11335102A (ja) * 1998-05-22 1999-12-07 Iwatani Internatl Corp 高濃度オゾン連続発生方法及びその装置
FR2898520B1 (fr) * 2006-03-20 2008-06-27 Green Technologies Sarl Nouveau procede de depelliculage du grain de ble
KR100856863B1 (ko) * 2007-05-23 2008-09-04 조경복 오존 발생 시스템
US8987160B2 (en) 2011-03-26 2015-03-24 Honda Motor Co., Ltd. Fischer-tropsch catalysts containing iron or cobalt selective towards higher hydrocarbons
JP6615009B2 (ja) * 2016-03-04 2019-12-04 東京エレクトロン株式会社 金属汚染防止方法及び金属汚染防止装置、並びにこれらを用いた基板処理方法及び基板処理装置
KR101668313B1 (ko) 2016-03-17 2016-10-24 (주) 이우티이씨 연결 가능한 지중선로 보호판
US20200203127A1 (en) 2018-12-20 2020-06-25 L'Air Liquide, Société Anonyme pour I'Etude et I'Exploitation des Procédés Georges Claude Systems and methods for storage and supply of f3no-free fno gases and f3no-free fno gas mixtures for semiconductor processes

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5843321B2 (ja) * 1976-07-29 1983-09-26 三菱電機株式会社 オゾン発生装置
JPS5565368A (en) * 1978-11-07 1980-05-16 Toshiba Corp Strengthening method for making passive state of stainless steel
JP2606910B2 (ja) * 1988-11-21 1997-05-07 神鋼パンテツク株式会社 超純水製造供給装置
EP0478777B1 (de) * 1989-06-05 1994-11-02 Sumitomo Precision Products Company Limited Beschichtetes dielektrisches material für einen ozongenerator
JPH0487245A (ja) * 1990-07-27 1992-03-19 Agency Of Ind Science & Technol オゾンビーム発生装置
US5370846A (en) * 1990-10-26 1994-12-06 Sumitomo Precision Products Co., Ltd. Apparatus and method for generating high concentration ozone
US5549874A (en) * 1992-04-23 1996-08-27 Ebara Corporation Discharge reactor
JPH06272054A (ja) * 1992-05-14 1994-09-27 Sony Corp 有機薄膜形成用基板及びその製造方法
JPH0859210A (ja) * 1994-08-24 1996-03-05 Ebara Corp オゾン発生装置

Also Published As

Publication number Publication date
US5702673A (en) 1997-12-30
TW368491B (en) 1999-09-01
EP0738684B1 (de) 1998-12-30
KR100411615B1 (ko) 2004-04-21
DE69601242T2 (de) 1999-05-20
KR960037564A (ko) 1996-11-19
EP0738684A1 (de) 1996-10-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee