DE69533245D1 - Vorrichtung zur elektrolytischen Behandlung - Google Patents
Vorrichtung zur elektrolytischen BehandlungInfo
- Publication number
- DE69533245D1 DE69533245D1 DE69533245T DE69533245T DE69533245D1 DE 69533245 D1 DE69533245 D1 DE 69533245D1 DE 69533245 T DE69533245 T DE 69533245T DE 69533245 T DE69533245 T DE 69533245T DE 69533245 D1 DE69533245 D1 DE 69533245D1
- Authority
- DE
- Germany
- Prior art keywords
- treatment device
- electrolytic treatment
- electrolytic
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
- C02F1/46104—Devices therefor; Their operating or servicing
- C02F1/4618—Devices therefor; Their operating or servicing for producing "ionised" acidic or basic water
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/46—Apparatus for electrochemical processes
- C02F2201/461—Electrolysis apparatus
- C02F2201/46105—Details relating to the electrolytic devices
- C02F2201/46115—Electrolytic cell with membranes or diaphragms
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/46—Apparatus for electrochemical processes
- C02F2201/461—Electrolysis apparatus
- C02F2201/46105—Details relating to the electrolytic devices
- C02F2201/4612—Controlling or monitoring
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/46—Apparatus for electrochemical processes
- C02F2201/461—Electrolysis apparatus
- C02F2201/46105—Details relating to the electrolytic devices
- C02F2201/4618—Supplying or removing reactants or electrolyte
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/46—Apparatus for electrochemical processes
- C02F2201/461—Electrolysis apparatus
- C02F2201/46105—Details relating to the electrolytic devices
- C02F2201/4618—Supplying or removing reactants or electrolyte
- C02F2201/46185—Recycling the cathodic or anodic feed
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/46—Apparatus for electrochemical processes
- C02F2201/461—Electrolysis apparatus
- C02F2201/46105—Details relating to the electrolytic devices
- C02F2201/4619—Supplying gas to the electrolyte
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/04—Oxidation reduction potential [ORP]
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/06—Controlling or monitoring parameters in water treatment pH
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/42—Liquid level
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2301/00—General aspects of water treatment
- C02F2301/06—Pressure conditions
- C02F2301/066—Overpressure, high pressure
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6056108A JP2743822B2 (ja) | 1994-03-25 | 1994-03-25 | 電解活性水処理装置 |
JP6056110A JP2897637B2 (ja) | 1994-03-25 | 1994-03-25 | ウエット処理装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69533245D1 true DE69533245D1 (de) | 2004-08-19 |
Family
ID=26397038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69533245T Expired - Lifetime DE69533245D1 (de) | 1994-03-25 | 1995-03-22 | Vorrichtung zur elektrolytischen Behandlung |
Country Status (5)
Country | Link |
---|---|
US (1) | US5549798A (de) |
KR (1) | KR0174107B1 (de) |
CN (1) | CN1065656C (de) |
DE (1) | DE69533245D1 (de) |
TW (1) | TW281785B (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10261687A (ja) * | 1997-03-18 | 1998-09-29 | Furontetsuku:Kk | 半導体等製造装置 |
WO1999033496A1 (fr) * | 1997-12-26 | 1999-07-08 | Morinaga Milk Industry Co., Ltd. | Procede de sterilisation d'articles et procede d'emballage d'articles |
JP2000040679A (ja) | 1998-07-24 | 2000-02-08 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
WO2002101808A1 (fr) * | 2001-06-11 | 2002-12-19 | Kabushikikaisha Tsukuba Semi Technology | Dispositif de nettoyage/traitement pour element non traite et procede de nettoyage/traitement |
JP4753596B2 (ja) * | 2004-05-19 | 2011-08-24 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP4462146B2 (ja) * | 2004-09-17 | 2010-05-12 | 栗田工業株式会社 | 硫酸リサイクル型洗浄システムおよび硫酸リサイクル型過硫酸供給装置 |
JP2010205782A (ja) * | 2009-02-27 | 2010-09-16 | Renesas Electronics Corp | 半導体装置の製造方法 |
US20200306802A1 (en) * | 2017-12-18 | 2020-10-01 | Sekisui Chemical Co., Ltd. | Surface treatment method and surface treatment apparatus |
GB201804881D0 (en) * | 2018-03-27 | 2018-05-09 | Lam Res Ag | Method of producing rinsing liquid |
CN109013589B (zh) * | 2018-07-12 | 2021-07-30 | 芜湖慧宇商贸有限公司 | 一种家庭用水循环处理装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4834850A (en) * | 1987-07-27 | 1989-05-30 | Eltech Systems Corporation | Efficient electrolytic precious metal recovery system |
US4891103A (en) * | 1988-08-23 | 1990-01-02 | Texas Instruments Incorporated | Anadization system with remote voltage sensing and active feedback control capabilities |
EP0445120B1 (de) * | 1988-11-24 | 1995-09-13 | GRAMM, Gerhard | Vorrichtung zum auf- und/oder abtragen von überzügen bei werkstücken |
DE3937391A1 (de) * | 1989-11-10 | 1991-05-16 | Kolbe & Co Hans | Vorrichtung zur regenerierung von aetzloesung |
DE69312636T2 (de) * | 1992-11-09 | 1998-02-05 | Canon Kk | Anodisierungsapparat mit einer Trägervorrichtung für das zu behandelnde Substrat |
JP2859081B2 (ja) * | 1993-01-08 | 1999-02-17 | 日本電気株式会社 | ウェット処理方法及び処理装置 |
JPH06240499A (ja) * | 1993-02-12 | 1994-08-30 | Yamaha Corp | メッキ方法及びその装置 |
US5411652A (en) * | 1993-12-15 | 1995-05-02 | Allied-Signal Inc. | Optimum conversion chamber |
-
1995
- 1995-03-22 DE DE69533245T patent/DE69533245D1/de not_active Expired - Lifetime
- 1995-03-24 KR KR1019950006415A patent/KR0174107B1/ko not_active IP Right Cessation
- 1995-03-24 US US08/409,306 patent/US5549798A/en not_active Expired - Fee Related
- 1995-03-25 CN CN95104078A patent/CN1065656C/zh not_active Expired - Fee Related
- 1995-04-07 TW TW084103299A patent/TW281785B/zh active
Also Published As
Publication number | Publication date |
---|---|
US5549798A (en) | 1996-08-27 |
KR0174107B1 (ko) | 1999-04-01 |
KR950027973A (ko) | 1995-10-18 |
CN1113034A (zh) | 1995-12-06 |
CN1065656C (zh) | 2001-05-09 |
TW281785B (de) | 1996-07-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de |