DE69528304T2 - Photodetektor mit einstellbarem Durchlassbereich zur inversen Photoemissionspektroskopie - Google Patents

Photodetektor mit einstellbarem Durchlassbereich zur inversen Photoemissionspektroskopie

Info

Publication number
DE69528304T2
DE69528304T2 DE69528304T DE69528304T DE69528304T2 DE 69528304 T2 DE69528304 T2 DE 69528304T2 DE 69528304 T DE69528304 T DE 69528304T DE 69528304 T DE69528304 T DE 69528304T DE 69528304 T2 DE69528304 T2 DE 69528304T2
Authority
DE
Germany
Prior art keywords
photodetector
photoemission spectroscopy
inverse photoemission
adjustable passband
passband
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69528304T
Other languages
English (en)
Other versions
DE69528304D1 (de
Inventor
Hirofumi Namatame
Masaki Taniguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hiroshima University NUC
Original Assignee
Hiroshima University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hiroshima University NUC filed Critical Hiroshima University NUC
Publication of DE69528304D1 publication Critical patent/DE69528304D1/de
Application granted granted Critical
Publication of DE69528304T2 publication Critical patent/DE69528304T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/25—Tubes for localised analysis using electron or ion beams
    • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
    • H01J2237/2516—Secondary particles mass or energy spectrometry

Landscapes

  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
DE69528304T 1994-03-24 1995-03-17 Photodetektor mit einstellbarem Durchlassbereich zur inversen Photoemissionspektroskopie Expired - Fee Related DE69528304T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6053821A JP2535771B2 (ja) 1994-03-24 1994-03-24 逆光電子分光用帯域幅可変光検出器

Publications (2)

Publication Number Publication Date
DE69528304D1 DE69528304D1 (de) 2002-10-31
DE69528304T2 true DE69528304T2 (de) 2003-01-23

Family

ID=12953463

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69528304T Expired - Fee Related DE69528304T2 (de) 1994-03-24 1995-03-17 Photodetektor mit einstellbarem Durchlassbereich zur inversen Photoemissionspektroskopie

Country Status (4)

Country Link
US (1) US5554844A (de)
EP (1) EP0674169B1 (de)
JP (1) JP2535771B2 (de)
DE (1) DE69528304T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2982262B2 (ja) 1990-09-10 1999-11-22 株式会社島津製作所 逆光電子分光装置
FR2807602B1 (fr) 2000-04-06 2002-07-05 Ge Med Sys Global Tech Co Llc Dispositif et procede de traitement de lumiere, cassette de prise d'images, module de mesure de dose et appareil de radiologie
JP4804251B2 (ja) * 2006-07-20 2011-11-02 キヤノン株式会社 撮像装置及び撮像ユニット
US9792255B2 (en) * 2010-08-18 2017-10-17 Osaka University Electronic state calculation method, electronic state calculation device, and recording medium
WO2015182641A1 (ja) * 2014-05-29 2015-12-03 国立研究開発法人科学技術振興機構 逆光電子分光装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3712700A (en) * 1971-01-18 1973-01-23 Rca Corp Method of making an electron emitter device
JP2982262B2 (ja) * 1990-09-10 1999-11-22 株式会社島津製作所 逆光電子分光装置
JP2636113B2 (ja) * 1992-03-26 1997-07-30 広島大学長 帯域フィルター型逆光電子分光検出装置

Also Published As

Publication number Publication date
JPH07260717A (ja) 1995-10-13
DE69528304D1 (de) 2002-10-31
EP0674169A1 (de) 1995-09-27
JP2535771B2 (ja) 1996-09-18
EP0674169B1 (de) 2002-09-25
US5554844A (en) 1996-09-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee