DE69530002D1 - Spektrometer mit entladungsbegrenzenden mitteln - Google Patents

Spektrometer mit entladungsbegrenzenden mitteln

Info

Publication number
DE69530002D1
DE69530002D1 DE69530002T DE69530002T DE69530002D1 DE 69530002 D1 DE69530002 D1 DE 69530002D1 DE 69530002 T DE69530002 T DE 69530002T DE 69530002 T DE69530002 T DE 69530002T DE 69530002 D1 DE69530002 D1 DE 69530002D1
Authority
DE
Germany
Prior art keywords
spectrometer
discharge
limiting means
limiting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69530002T
Other languages
English (en)
Other versions
DE69530002T2 (de
Inventor
William Gliddon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Australia Pty Ltd
Original Assignee
Varian Australia Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from AUPN0152A external-priority patent/AUPN015294A0/en
Application filed by Varian Australia Pty Ltd filed Critical Varian Australia Pty Ltd
Application granted granted Critical
Publication of DE69530002D1 publication Critical patent/DE69530002D1/de
Publication of DE69530002T2 publication Critical patent/DE69530002T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/443—Emission spectrometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
DE69530002T 1994-12-20 1995-12-19 Spektrometer mit entladungsbegrenzenden mitteln Expired - Lifetime DE69530002T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
AUPN015294 1994-12-20
AUPN0152A AUPN015294A0 (en) 1994-12-20 1994-12-20 Emission spectrometer
AUPN047895 1995-01-11
AUPN047895 1995-01-11
PCT/AU1995/000856 WO1996019716A1 (en) 1994-12-20 1995-12-19 Spectrometer with discharge limiting means

Publications (2)

Publication Number Publication Date
DE69530002D1 true DE69530002D1 (de) 2003-04-24
DE69530002T2 DE69530002T2 (de) 2004-01-08

Family

ID=25644831

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69530002T Expired - Lifetime DE69530002T2 (de) 1994-12-20 1995-12-19 Spektrometer mit entladungsbegrenzenden mitteln

Country Status (4)

Country Link
US (1) US5841531A (de)
EP (1) EP0799408B1 (de)
DE (1) DE69530002T2 (de)
WO (1) WO1996019716A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6122050A (en) * 1998-02-26 2000-09-19 Cornell Research Foundation, Inc. Optical interface for a radially viewed inductively coupled argon plasma-Optical emission spectrometer
US8633416B2 (en) * 2005-03-11 2014-01-21 Perkinelmer Health Sciences, Inc. Plasmas and methods of using them
US7733482B2 (en) * 2007-03-26 2010-06-08 Ruda Harry E System and method for determining at least one constituent in an ambient gas using a microsystem gas sensor
JP2011521735A (ja) 2008-05-30 2011-07-28 コロラド ステート ユニバーシティ リサーチ ファンデーション プラズマを発生させるためのシステム、方法、および装置
JP2011522381A (ja) 2008-05-30 2011-07-28 コロラド ステート ユニバーシティ リサーチ ファンデーション プラズマに基づく化学源装置およびその使用方法
US8994270B2 (en) 2008-05-30 2015-03-31 Colorado State University Research Foundation System and methods for plasma application
US8222822B2 (en) 2009-10-27 2012-07-17 Tyco Healthcare Group Lp Inductively-coupled plasma device
CA2794895A1 (en) 2010-03-31 2011-10-06 Colorado State University Research Foundation Liquid-gas interface plasma device
JP5553460B2 (ja) 2010-03-31 2014-07-16 コロラド ステート ユニバーシティー リサーチ ファウンデーション 液体−気体界面プラズマデバイス
EP2568276B1 (de) 2011-09-06 2016-11-23 Spectro Analytical Instruments GmbH Plasmaemissionsübertragungs- und -modifizierungsvorrichtung
US9532826B2 (en) 2013-03-06 2017-01-03 Covidien Lp System and method for sinus surgery
US9555145B2 (en) 2013-03-13 2017-01-31 Covidien Lp System and method for biofilm remediation
EP3396368A4 (de) * 2015-12-24 2019-08-14 Shimadzu Corporation Icp-massenspektrometer
DE102016200517A1 (de) * 2016-01-18 2017-07-20 Robert Bosch Gmbh Mikroelektronische Bauelementanordnung und entsprechendes Herstellungsverfahren für eine mikroelektronische Bauelementanordnung
GB2585327B (en) * 2018-12-12 2023-02-15 Thermo Fisher Scient Bremen Gmbh Cooling plate for ICP-MS
CN109950124B (zh) * 2019-04-17 2024-05-31 大连民族大学 一种消除电感耦合等离子体质谱二次放电的射频线圈
US11145501B2 (en) 2020-02-20 2021-10-12 Perkinelmer, Inc. Thermal management for instruments including a plasma source

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4501965A (en) * 1983-01-14 1985-02-26 Mds Health Group Limited Method and apparatus for sampling a plasma into a vacuum chamber
US4682026A (en) * 1986-04-10 1987-07-21 Mds Health Group Limited Method and apparatus having RF biasing for sampling a plasma into a vacuum chamber
JPS639761U (de) * 1986-07-07 1988-01-22
CA2047571C (en) * 1990-07-24 2001-12-18 Ian Lawrence Turner Inductively coupled plasma spectroscopy
US5325021A (en) * 1992-04-09 1994-06-28 Clemson University Radio-frequency powered glow discharge device and method with high voltage interface
JP3215487B2 (ja) * 1992-04-13 2001-10-09 セイコーインスツルメンツ株式会社 誘導結合プラズマ質量分析装置
JP3123843B2 (ja) * 1992-12-17 2001-01-15 日本電子株式会社 プラズマフレームを用いた試料気化装置
CA2116821C (en) * 1993-03-05 2003-12-23 Stephen Esler Anderson Improvements in plasma mass spectrometry

Also Published As

Publication number Publication date
EP0799408B1 (de) 2003-03-19
WO1996019716A1 (en) 1996-06-27
EP0799408A1 (de) 1997-10-08
DE69530002T2 (de) 2004-01-08
US5841531A (en) 1998-11-24
EP0799408A4 (de) 2000-02-23

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