DE69518386D1 - Spektrometer - Google Patents

Spektrometer

Info

Publication number
DE69518386D1
DE69518386D1 DE69518386T DE69518386T DE69518386D1 DE 69518386 D1 DE69518386 D1 DE 69518386D1 DE 69518386 T DE69518386 T DE 69518386T DE 69518386 T DE69518386 T DE 69518386T DE 69518386 D1 DE69518386 D1 DE 69518386D1
Authority
DE
Germany
Prior art keywords
spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69518386T
Other languages
English (en)
Other versions
DE69518386T2 (de
Inventor
Ari Lehto
Stefan Lindblad
Altti Torkkeli
Martti Blomberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Valtion Teknillinen Tutkimuskeskus
Vaisala Oy
Original Assignee
Valtion Teknillinen Tutkimuskeskus
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valtion Teknillinen Tutkimuskeskus, Vaisala Oy filed Critical Valtion Teknillinen Tutkimuskeskus
Application granted granted Critical
Publication of DE69518386D1 publication Critical patent/DE69518386D1/de
Publication of DE69518386T2 publication Critical patent/DE69518386T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/031—Multipass arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/031—Multipass arrangements
    • G01N2021/0314—Double pass, autocollimated path

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
DE69518386T 1994-10-31 1995-10-30 Spektrometer Expired - Lifetime DE69518386T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI945124A FI945124A0 (fi) 1994-10-31 1994-10-31 Spektrometer

Publications (2)

Publication Number Publication Date
DE69518386D1 true DE69518386D1 (de) 2000-09-21
DE69518386T2 DE69518386T2 (de) 2001-04-05

Family

ID=8541702

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69518386T Expired - Lifetime DE69518386T2 (de) 1994-10-31 1995-10-30 Spektrometer

Country Status (5)

Country Link
US (1) US5818586A (de)
EP (1) EP0709659B1 (de)
JP (1) JP3778973B2 (de)
DE (1) DE69518386T2 (de)
FI (1) FI945124A0 (de)

Families Citing this family (44)

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WO1998027411A1 (de) * 1996-12-17 1998-06-25 Laboratorium Für Physikalische Elektronik Institut Für Quantenelektronik Verfahren zum aufbringen eines mikrosystems oder wandlers auf ein substrat und nach diesem verfahren herstellbare vorrichtung
DE19717145C2 (de) * 1997-04-23 1999-06-02 Siemens Ag Verfahren zur selektiven Detektion von Gasen und Gassensor zu dessen Durchführung
US6067840A (en) * 1997-08-04 2000-05-30 Texas Instruments Incorporated Method and apparatus for infrared sensing of gas
FR2768813B1 (fr) 1997-09-19 1999-10-22 Commissariat Energie Atomique Spectrometre photoacoustique miniaturise
EP0951068A1 (de) 1998-04-17 1999-10-20 Interuniversitair Micro-Elektronica Centrum Vzw Herstellungsverfahren für eine Mikrostruktur mit Innenraum
EP0951069A1 (de) * 1998-04-17 1999-10-20 Interuniversitair Microelektronica Centrum Vzw Herstellungsverfahren für eine Mikrostruktur mit Innenraum
IT1303228B1 (it) * 1998-08-11 2000-11-02 Istituto Elettrotecnico Naz Ga Dispositivo sensore ottico di gas in materiale poroso.
US6535753B1 (en) 1998-08-20 2003-03-18 Microsense International, Llc Micro-invasive method for painless detection of analytes in extra-cellular space
WO2000014496A1 (en) * 1998-08-20 2000-03-16 Lucid, Inc. Spectrophotometer system
US6197257B1 (en) * 1998-08-20 2001-03-06 Microsense Of St. Louis, Llc Micro sensor device
US6163377A (en) * 1999-07-23 2000-12-19 Cv Us, Inc. Colorimeter
DE19957682A1 (de) * 1999-12-01 2001-06-07 Deutsche Telekom Ag Vorrichtung zur optischen Spektroskopie und Verfahren zu dessen Herstellung
AT408149B (de) * 1999-12-22 2001-09-25 Scan Messtechnik Gmbh Spektrometrische sonde
FI20000339A (fi) 2000-02-16 2001-08-16 Nokia Mobile Phones Ltd Mikromekaaninen säädettävä kondensaattori ja integroitu säädettävä resonaattori
US6590710B2 (en) 2000-02-18 2003-07-08 Yokogawa Electric Corporation Fabry-Perot filter, wavelength-selective infrared detector and infrared gas analyzer using the filter and detector
US6396711B1 (en) * 2000-06-06 2002-05-28 Agere Systems Guardian Corp. Interconnecting micromechanical devices
US7425453B1 (en) * 2001-03-14 2008-09-16 The United States Of America As Represented By The Secretary Of The Navy Integrated circuit porphyrin-based optical Fabry-Perot chemical sensor
DE60227183D1 (de) * 2001-09-21 2008-07-31 Datacolor Holding Ag Farbmesser
US6996312B2 (en) * 2003-04-29 2006-02-07 Rosemount, Inc. Tunable fabry-perot filter
US7061618B2 (en) * 2003-10-17 2006-06-13 Axsun Technologies, Inc. Integrated spectroscopy system
JP2005208009A (ja) * 2004-01-26 2005-08-04 Denso Corp 赤外線検知式ガスセンサ
US7492463B2 (en) 2004-04-15 2009-02-17 Davidson Instruments Inc. Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor
US7305158B2 (en) * 2004-04-15 2007-12-04 Davidson Instruments Inc. Interferometric signal conditioner for measurement of absolute static displacements and dynamic displacements of a Fabry-Perot interferometer
EP1681540A1 (de) 2004-12-21 2006-07-19 Davidson Instruments, Inc. Mehrkanalarrayprozessor
EP1674833A3 (de) 2004-12-21 2007-05-30 Davidson Instruments, Inc. Faseroptisches Sensorsystem
EP1869737B1 (de) 2005-03-16 2021-05-12 Davidson Instruments, Inc. Hochintensitäts-fabry-perot-sensor
US7415049B2 (en) 2005-03-28 2008-08-19 Axsun Technologies, Inc. Laser with tilted multi spatial mode resonator tuning element
WO2007033069A2 (en) 2005-09-13 2007-03-22 Davidson Instruments Inc. Tracking algorithm for linear array signal processor for fabry-perot cross-correlation pattern and method of using same
US7355714B2 (en) * 2005-12-29 2008-04-08 Xerox Corporation Reconfigurable MEMS fabry-perot tunable matrix filter systems and methods
US7684051B2 (en) 2006-04-18 2010-03-23 Halliburton Energy Services, Inc. Fiber optic seismic sensor based on MEMS cantilever
EP2021747B1 (de) 2006-04-26 2018-08-01 Halliburton Energy Services, Inc. Faseroptischer seismischer mems-sensor mit von schwenkbalken getragener masse
JP5123492B2 (ja) * 2006-05-22 2013-01-23 オリンパス株式会社 分光画像観察用光学装置
US8115937B2 (en) 2006-08-16 2012-02-14 Davidson Instruments Methods and apparatus for measuring multiple Fabry-Perot gaps
JP4432947B2 (ja) * 2006-09-12 2010-03-17 株式会社デンソー 赤外線式ガス検出器
CA2676246C (en) 2007-01-24 2013-03-19 Halliburton Energy Services, Inc. Transducer for measuring environmental parameters
US7817274B2 (en) 2007-10-05 2010-10-19 Jingyun Zhang Compact spectrometer
US8345226B2 (en) 2007-11-30 2013-01-01 Jingyun Zhang Spectrometers miniaturized for working with cellular phones and other portable electronic devices
US8526472B2 (en) 2009-09-03 2013-09-03 Axsun Technologies, Inc. ASE swept source with self-tracking filter for OCT medical imaging
US8670129B2 (en) 2009-09-03 2014-03-11 Axsun Technologies, Inc. Filtered ASE swept source for OCT medical imaging
JP6141074B2 (ja) * 2012-04-25 2017-06-07 キヤノン株式会社 走査光学装置および画像形成装置
TW201610415A (zh) * 2014-09-10 2016-03-16 張議聰 光學式氣體感測裝置及其感測系統
CN107250740A (zh) 2014-11-06 2017-10-13 光谱引擎股份公司 光学测量系统
WO2019070957A1 (en) 2017-10-06 2019-04-11 Bio-Rad Laboratories, Inc. PROTEIN QUANTIFICATION DEVICE
EP3919890B1 (de) * 2020-06-05 2023-12-13 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Photoakustische spektroskopie an gasgemischen über abstimmbares fabry-pérot-interferometer

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866039A (ja) * 1981-10-15 1983-04-20 Fujitsu Ltd 漏洩ガス検出装置
JPS58143242A (ja) * 1982-02-19 1983-08-25 Fujitsu Ltd 漏洩ガス検出装置
GB2186708B (en) * 1985-11-26 1990-07-11 Sharp Kk A variable interferometric device and a process for the production of the same
US4904036A (en) * 1988-03-03 1990-02-27 American Telephone And Telegraph Company, At&T Bell Laboratories Subassemblies for optoelectronic hybrid integrated circuits
FR2638847B1 (fr) * 1988-11-04 1990-12-14 Commissariat Energie Atomique Dispositif optique integre pour la mesure d'indice de refraction d'un fluide
JPH0766982B2 (ja) * 1989-03-29 1995-07-19 シャープ株式会社 波長選択性受光素子
DE3925692C1 (de) * 1989-08-03 1990-08-23 Hartmann & Braun Ag, 6000 Frankfurt, De
US5026992A (en) * 1989-09-06 1991-06-25 Gaztech Corporation Spectral ratioing technique for NDIR gas analysis using a differential temperature source
JPH04337403A (ja) * 1991-05-14 1992-11-25 Olympus Optical Co Ltd 光集積型変位センサー
JPH0567769A (ja) * 1991-09-05 1993-03-19 Sony Corp ３次元光電子集積回路装置
JPH0669491A (ja) * 1992-08-18 1994-03-11 Fujitsu Ltd 光送受信装置
FI96450C (fi) * 1993-01-13 1996-06-25 Vaisala Oy Yksikanavainen kaasun pitoisuuden mittausmenetelmä ja -laitteisto
DE4334578C2 (de) * 1993-10-11 1999-10-07 Dirk Winfried Rossberg Spektral abstimmbarer Infrarot-Sensor
US5444249A (en) * 1994-02-14 1995-08-22 Telaire Systems, Inc. NDIR gas sensor

Also Published As

Publication number Publication date
JP3778973B2 (ja) 2006-05-24
FI945124A0 (fi) 1994-10-31
DE69518386T2 (de) 2001-04-05
EP0709659A2 (de) 1996-05-01
EP0709659B1 (de) 2000-08-16
EP0709659A3 (de) 1997-01-08
US5818586A (en) 1998-10-06
JPH08278249A (ja) 1996-10-22

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