DE69521779T2 - Beleuchtungsvorrichtung zum Beleuchten von linienförmigen Bereichen - Google Patents

Beleuchtungsvorrichtung zum Beleuchten von linienförmigen Bereichen

Info

Publication number
DE69521779T2
DE69521779T2 DE69521779T DE69521779T DE69521779T2 DE 69521779 T2 DE69521779 T2 DE 69521779T2 DE 69521779 T DE69521779 T DE 69521779T DE 69521779 T DE69521779 T DE 69521779T DE 69521779 T2 DE69521779 T2 DE 69521779T2
Authority
DE
Germany
Prior art keywords
lighting device
linear areas
illuminating
illuminating linear
areas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69521779T
Other languages
English (en)
Other versions
DE69521779D1 (de
Inventor
Masayuki Nishiwaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69521779D1 publication Critical patent/DE69521779D1/de
Publication of DE69521779T2 publication Critical patent/DE69521779T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0738—Shaping the laser spot into a linear shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Laser Beam Processing (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Lenses (AREA)
DE69521779T 1994-12-27 1995-12-21 Beleuchtungsvorrichtung zum Beleuchten von linienförmigen Bereichen Expired - Lifetime DE69521779T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34038794A JP3239661B2 (ja) 1994-12-27 1994-12-27 ノズルプレートの製造方法及び照明光学系

Publications (2)

Publication Number Publication Date
DE69521779D1 DE69521779D1 (de) 2001-08-23
DE69521779T2 true DE69521779T2 (de) 2002-05-23

Family

ID=18336468

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69521779T Expired - Lifetime DE69521779T2 (de) 1994-12-27 1995-12-21 Beleuchtungsvorrichtung zum Beleuchten von linienförmigen Bereichen

Country Status (4)

Country Link
US (1) US5841101A (de)
EP (1) EP0719644B1 (de)
JP (1) JP3239661B2 (de)
DE (1) DE69521779T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011100594B4 (de) * 2010-05-11 2016-04-21 Ultratech, Inc. Linienbildsysteme und Verfahren zum Laserhärten

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9601049D0 (en) 1996-01-18 1996-03-20 Xaar Ltd Methods of and apparatus for forming nozzles
JP3689490B2 (ja) 1996-06-07 2005-08-31 キヤノン株式会社 ノズル部材の製造方法及びそれを用いた加工装置
DE69703697T2 (de) * 1996-09-11 2001-08-09 Domino Corp Laservorrichtung
JP3094933B2 (ja) * 1997-01-17 2000-10-03 キヤノン株式会社 光加工機及びそれを用いたオリフィスプレートの製造方法
US6313435B1 (en) * 1998-11-20 2001-11-06 3M Innovative Properties Company Mask orbiting for laser ablated feature formation
US6252197B1 (en) 1998-12-01 2001-06-26 Accudyne Display And Semiconductor Systems, Inc. Method and apparatus for separating non-metallic substrates utilizing a supplemental mechanical force applicator
US6259058B1 (en) * 1998-12-01 2001-07-10 Accudyne Display And Semiconductor Systems, Inc. Apparatus for separating non-metallic substrates
US6623103B2 (en) 2001-04-10 2003-09-23 Lexmark International, Inc. Laser ablation method for uniform nozzle structure
US20060113285A1 (en) * 2004-12-01 2006-06-01 Lexmark International, Inc. Methods of laser ablating polymeric materials to provide uniform laser ablated features therein
US20090046757A1 (en) * 2007-08-16 2009-02-19 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation apparatus, laser irradiation method, and manufacturing method of semiconductor device

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1765145C3 (de) * 1968-04-09 1973-11-29 Siemens Ag, 1000 Berlin U. 8000 Muenchen Verfahren zum Bearbeiten dunner Schichten von elektrischen Schalt kreisen mit Laserstrahlen
JPS57181873A (en) * 1981-05-02 1982-11-09 Ricoh Co Ltd Manufacture of ink jet head
EP0066432A3 (de) * 1981-05-21 1984-05-09 Lexel Corporation Düse zum Formen eines freien Strahles, ein Farblaser mit einer Farbstrahldüse und Verfahren zur Herstellung
US4653903A (en) * 1984-01-24 1987-03-31 Canon Kabushiki Kaisha Exposure apparatus
JPS60218635A (ja) * 1984-04-13 1985-11-01 Canon Inc 照明装置
JPS60232552A (ja) * 1984-05-02 1985-11-19 Canon Inc 照明光学系
JPS6123592A (ja) * 1984-07-13 1986-02-01 Akebono Brake Chuo Gijutsu Kenkyusho:Kk Ｃｏ↓２レ−ザ加工方法
JPS622540A (ja) * 1985-06-28 1987-01-08 Canon Inc ライトインテグレ−タとそれを含むケ−ラ−照明系
JPS62115719A (ja) * 1985-11-14 1987-05-27 Canon Inc 照明光学系
JPS62115718A (ja) * 1985-11-14 1987-05-27 Canon Inc 照明光学系
JPH0786647B2 (ja) * 1986-12-24 1995-09-20 株式会社ニコン 照明装置
JPS63177982A (ja) * 1987-01-20 1988-07-22 Toshiba Corp レ−ザマ−キング用光学系
JPH01313196A (ja) * 1988-06-13 1989-12-18 Toshiba Corp レーザ加工装置
JP2657957B2 (ja) * 1990-04-27 1997-09-30 キヤノン株式会社 投影装置及び光照射方法
JP2687791B2 (ja) * 1991-11-18 1997-12-08 三菱電機株式会社 光加工装置
GB9202434D0 (en) * 1992-02-05 1992-03-18 Xaar Ltd Method of and apparatus for forming nozzles
JPH05261583A (ja) * 1992-03-18 1993-10-12 Sumitomo Heavy Ind Ltd レーザ加工機
US5463200A (en) * 1993-02-11 1995-10-31 Lumonics Inc. Marking of a workpiece by light energy
US5378137A (en) * 1993-05-10 1995-01-03 Hewlett-Packard Company Mask design for forming tapered inkjet nozzles
US5828496A (en) * 1993-12-22 1998-10-27 Canon Kabushiki Kaisha Illumination optical system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011100594B4 (de) * 2010-05-11 2016-04-21 Ultratech, Inc. Linienbildsysteme und Verfahren zum Laserhärten

Also Published As

Publication number Publication date
US5841101A (en) 1998-11-24
JPH08184781A (ja) 1996-07-16
EP0719644A2 (de) 1996-07-03
EP0719644A3 (de) 1997-05-14
EP0719644B1 (de) 2001-07-18
JP3239661B2 (ja) 2001-12-17
DE69521779D1 (de) 2001-08-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition