DE69515080T2 - Verfahren zur Analyse von Teilchenverunreinigungen in Druckgas - Google Patents
Verfahren zur Analyse von Teilchenverunreinigungen in DruckgasInfo
- Publication number
- DE69515080T2 DE69515080T2 DE69515080T DE69515080T DE69515080T2 DE 69515080 T2 DE69515080 T2 DE 69515080T2 DE 69515080 T DE69515080 T DE 69515080T DE 69515080 T DE69515080 T DE 69515080T DE 69515080 T2 DE69515080 T2 DE 69515080T2
- Authority
- DE
- Germany
- Prior art keywords
- analysis
- compressed gas
- particle contamination
- contamination
- particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000011109 contamination Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000002245 particle Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N7/00—Analysing materials by measuring the pressure or volume of a gas or vapour
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2226—Sampling from a closed space, e.g. food package, head space
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2226—Sampling from a closed space, e.g. food package, head space
- G01N2001/2238—Sampling from a closed space, e.g. food package, head space the gas being compressed or pressurized
Landscapes
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Dispersion Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/240,485 US5665902A (en) | 1994-05-10 | 1994-05-10 | Method to analyze particle contaminants in compressed gases |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69515080D1 DE69515080D1 (de) | 2000-03-23 |
DE69515080T2 true DE69515080T2 (de) | 2000-09-07 |
Family
ID=22906718
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69515080T Expired - Fee Related DE69515080T2 (de) | 1994-05-10 | 1995-05-09 | Verfahren zur Analyse von Teilchenverunreinigungen in Druckgas |
Country Status (7)
Country | Link |
---|---|
US (2) | US5665902A (de) |
EP (1) | EP0682240B1 (de) |
JP (1) | JPH08101116A (de) |
KR (1) | KR950033468A (de) |
CN (1) | CN1118438A (de) |
DE (1) | DE69515080T2 (de) |
TW (1) | TW448298B (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5814741A (en) * | 1996-03-01 | 1998-09-29 | American Air Liquide Inc. | Metal sampling method and system for non-hydrolyzable gases |
US6004433A (en) * | 1997-02-03 | 1999-12-21 | L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes George Claude | Purification of electronic specialty gases by vapor phase transfilling |
KR100251645B1 (ko) * | 1997-03-21 | 2000-04-15 | 윤종용 | 반도체 공정용 가스 평가장치에 결합되는 샘플가스 분배 장치 및 구동방법 |
US6151953A (en) * | 1998-01-27 | 2000-11-28 | Rupprecht & Patashnick Company, Inc. | Gas stream conditioning apparatus, system and method for use in measuring particulate matter |
US5970781A (en) * | 1998-05-14 | 1999-10-26 | Rupprecht & Patashnick Company, Inc. | In-stack direct particulate mass measurement apparatus and method |
US6016688A (en) * | 1998-05-14 | 2000-01-25 | Rupprecht & Patashnick Company, Inc. | In-stack direct particulate mass measurement apparatus and method with pressure/flow compensation |
US6205842B1 (en) * | 1999-02-02 | 2001-03-27 | Rupprecht & Patashnick Company, Inc. | Differential particulate mass monitor with intrinsic correction for volatilization losses |
US6502450B1 (en) | 1999-05-10 | 2003-01-07 | Rupprecht & Patashnik Company, Inc. | Single detector differential particulate mass monitor with intrinsic correction for volatilization losses |
FR2795510B1 (fr) * | 1999-06-24 | 2001-08-03 | Air Liquide | Installation d'analyse de l'atmosphere d'une enceinte de brasage ou etamage a l'aide d'un alliage metallique |
FR2804508A1 (fr) * | 2000-02-01 | 2001-08-03 | Air Liquide | Procede et dispositif d'echantillonnage de gaz optimalise |
US6439027B1 (en) * | 2000-08-10 | 2002-08-27 | Rupprecht & Patashnick Company, Inc. | Particulate mass measurement apparatus with real-time moisture monitor |
US20030063271A1 (en) * | 2001-08-17 | 2003-04-03 | Nicholes Mary Kristin | Sampling and measurement system with multiple slurry chemical manifold |
EP1485708A4 (de) * | 2002-01-22 | 2006-05-03 | Praxair Technology Inc | Verfahren zur analyse von verunreinigungen in kohlendioxid |
FR2837924B1 (fr) * | 2002-04-02 | 2004-10-15 | Air Liquide | Procede et dispositif de prelevement et d'analyse microbiologique et particulaire d'un fluide cryogenique |
NL1025042C2 (nl) * | 2003-12-17 | 2005-06-20 | Sgt Singapore Holding Pte Ltd | Regulator voorzien van een indicatoreenheid alsmede een kit van onderdelen omvattende een indicatoreenheid ten behoeve van een dergelijke regulator en een gasbron. |
US7201036B2 (en) * | 2004-02-27 | 2007-04-10 | Hunter Manufacturing Co. | Residual life indicating system |
EP1688731A1 (de) * | 2005-02-03 | 2006-08-09 | Air Products and Chemicals, Inc. | Vorrichtung und Verfahren zur Messung und/oder Analyse von Teilchen in einem Gasstrom |
EP1830173A1 (de) * | 2005-02-03 | 2007-09-05 | Air Products and Chemicals, Inc. | System und Verfahren mit diesem zur Messung und/oder Analyse von Partikeln in einem Gasstrom |
US7867779B2 (en) * | 2005-02-03 | 2011-01-11 | Air Products And Chemicals, Inc. | System and method comprising same for measurement and/or analysis of particles in gas stream |
US7592178B2 (en) * | 2005-02-23 | 2009-09-22 | Hunter Menufacturing Co. | Filter integrity tester |
US8205483B1 (en) | 2008-03-06 | 2012-06-26 | The United States Of America As Represented By The Secretary Of The Army | Residual life indicator |
DE102009004278A1 (de) * | 2009-01-05 | 2010-07-15 | Synthesechemie Dr. Penth Gmbh | Messgerät für geringe Kohlenwasserstoffkonzentrationen |
AT10542U3 (de) * | 2009-01-19 | 2009-10-15 | Avl List Gmbh | Kondensationskern-zähler |
ES2547957B1 (es) * | 2014-04-08 | 2016-04-29 | Tecdican S.L.U. | Dispositivo ahorrador de gas |
JP2016058642A (ja) * | 2014-09-11 | 2016-04-21 | 株式会社東芝 | 粒子供給装置及び方法 |
CN108507916B (zh) * | 2018-03-20 | 2020-06-16 | 重庆山楂树科技有限公司 | 粉尘检测装置 |
CN108519520B (zh) * | 2018-04-08 | 2023-09-26 | 华北电力大学(保定) | 一种可控温度可调气氛的粉尘比电阻测试装置 |
US11850458B2 (en) * | 2021-04-19 | 2023-12-26 | Kidde Technologies, Inc. | Flow control device for particle concentration measurement sensor |
CN113984612B (zh) * | 2021-10-30 | 2023-08-04 | 福州大学 | 一种gis内颗粒物检测一体化装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU3555571A (en) * | 1971-11-10 | 1973-05-17 | Johnson Service Company | Gas quality indicator and method for determining gas quality |
US3853516A (en) * | 1974-02-11 | 1974-12-10 | N Lyshkow | Gas dilution apparatus |
GB1494451A (en) * | 1975-02-12 | 1977-12-07 | Smidth & Co As F L | Apparatus for measuring the content of dust in gases |
US4704804A (en) * | 1984-03-13 | 1987-11-10 | Ve Holding Corp. | Method of and apparatus for temperature conditioning of matter |
US5027642A (en) * | 1987-10-13 | 1991-07-02 | American Air Liquide | Method of detecting and or removing trace amounts of condensible vapors from compressed gas |
US4878510A (en) * | 1987-10-13 | 1989-11-07 | American Air Liquide | Method for reducing pressure of highly compressed gases without generation of condensation droplets |
US4912985A (en) * | 1988-08-23 | 1990-04-03 | The Babcock & Wilcox Company | Gas sampling system for reactive gas-solid mixtures |
US4964278A (en) * | 1989-03-06 | 1990-10-23 | American Air Liquide | Method of separating condensible vapors from particles in highly compressed gases |
US4962673A (en) * | 1989-03-08 | 1990-10-16 | American Air Liquide | Pressure reduction device for particle sampling from compressed gases |
US5026155A (en) * | 1989-09-06 | 1991-06-25 | Air Products And Chemicals, Inc. | Process for sizing particles using condensation nucleus counting |
JP2646788B2 (ja) * | 1990-03-13 | 1997-08-27 | 三菱電機株式会社 | 水蒸気流量測定装置 |
US5101671A (en) * | 1990-10-01 | 1992-04-07 | Elgas David H | Compressed gas sampling device |
US5214952A (en) * | 1991-08-16 | 1993-06-01 | Praxair Technology, Inc. | Calibration for ultra high purity gas analysis |
US5209102A (en) * | 1992-01-31 | 1993-05-11 | American Air Liquide | Method of introducing and controlling compressed gases for impurity analysis |
US5519490A (en) * | 1993-07-23 | 1996-05-21 | Ushiodenki Kabushiki Kaisha | Condensation nucleus type device for counting particles in gas utilizing heating means on the connection pipe and measuring chamber |
US5673562A (en) * | 1996-02-23 | 1997-10-07 | L'air Liquide, S.A. | Bulk delivery of ultra-high purity gases at high flow rates |
-
1994
- 1994-05-10 US US08/240,485 patent/US5665902A/en not_active Expired - Fee Related
-
1995
- 1995-05-09 DE DE69515080T patent/DE69515080T2/de not_active Expired - Fee Related
- 1995-05-09 EP EP95401069A patent/EP0682240B1/de not_active Expired - Lifetime
- 1995-05-10 JP JP7111953A patent/JPH08101116A/ja active Pending
- 1995-05-10 CN CN95105701A patent/CN1118438A/zh active Pending
- 1995-05-10 KR KR1019950011366A patent/KR950033468A/ko active IP Right Grant
- 1995-05-11 TW TW084104663A patent/TW448298B/zh not_active IP Right Cessation
-
1997
- 1997-05-29 US US08/865,104 patent/US5992216A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR950033468A (ko) | 1995-12-26 |
EP0682240A1 (de) | 1995-11-15 |
TW448298B (en) | 2001-08-01 |
JPH08101116A (ja) | 1996-04-16 |
DE69515080D1 (de) | 2000-03-23 |
US5665902A (en) | 1997-09-09 |
US5992216A (en) | 1999-11-30 |
EP0682240B1 (de) | 2000-02-16 |
CN1118438A (zh) | 1996-03-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |