DE69513642T2 - Vorrichtung und verfahren zum schutz chemischer badedichtungen - Google Patents

Vorrichtung und verfahren zum schutz chemischer badedichtungen

Info

Publication number
DE69513642T2
DE69513642T2 DE69513642T DE69513642T DE69513642T2 DE 69513642 T2 DE69513642 T2 DE 69513642T2 DE 69513642 T DE69513642 T DE 69513642T DE 69513642 T DE69513642 T DE 69513642T DE 69513642 T2 DE69513642 T2 DE 69513642T2
Authority
DE
Germany
Prior art keywords
chemical bath
protecting chemical
bath seals
seals
protecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69513642T
Other languages
German (de)
English (en)
Other versions
DE69513642D1 (de
Inventor
Kenneth Struven
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IMTEC PRODUCTS Inc
Original Assignee
IMTEC PRODUCTS Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IMTEC PRODUCTS Inc filed Critical IMTEC PRODUCTS Inc
Application granted granted Critical
Publication of DE69513642D1 publication Critical patent/DE69513642D1/de
Publication of DE69513642T2 publication Critical patent/DE69513642T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04M—TELEPHONIC COMMUNICATION
    • H04M1/00—Substation equipment, e.g. for use by subscribers
    • H04M1/66—Substation equipment, e.g. for use by subscribers with means for preventing unauthorised or fraudulent calling
    • H04M1/663—Preventing unauthorised calls to a telephone set
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04M—TELEPHONIC COMMUNICATION
    • H04M3/00—Automatic or semi-automatic exchanges
    • H04M3/42—Systems providing special services or facilities to subscribers
    • H04M3/4228—Systems providing special services or facilities to subscribers in networks
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04M—TELEPHONIC COMMUNICATION
    • H04M3/00—Automatic or semi-automatic exchanges
    • H04M3/42—Systems providing special services or facilities to subscribers
    • H04M3/436—Arrangements for screening incoming calls, i.e. evaluating the characteristics of a call before deciding whether to answer it
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q3/00—Selecting arrangements
    • H04Q3/0016—Arrangements providing connection between exchanges
    • H04Q3/0029—Provisions for intelligent networking
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q2213/00—Indexing scheme relating to selecting arrangements in general and for multiplex systems
    • H04Q2213/13256—Call screening
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S379/00—Telephonic communications
    • Y10S379/903—Password
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S379/00—Telephonic communications
    • Y10S379/909—Alternatives
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S379/00—Telephonic communications
    • Y10S379/914—Programmable telephone component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6851—With casing, support, protector or static constructional installations
    • Y10T137/6855—Vehicle
    • Y10T137/6858—Locomotive
DE69513642T 1994-01-31 1995-01-31 Vorrichtung und verfahren zum schutz chemischer badedichtungen Expired - Fee Related DE69513642T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/188,817 US5383488A (en) 1994-01-31 1994-01-31 Apparatus and method for protecting chemical bath seals
PCT/US1995/001352 WO1995020741A1 (en) 1994-01-31 1995-01-31 Apparatus and method for protecting chemical bath seals

Publications (2)

Publication Number Publication Date
DE69513642D1 DE69513642D1 (de) 2000-01-05
DE69513642T2 true DE69513642T2 (de) 2000-06-08

Family

ID=22694649

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69513642T Expired - Fee Related DE69513642T2 (de) 1994-01-31 1995-01-31 Vorrichtung und verfahren zum schutz chemischer badedichtungen

Country Status (6)

Country Link
US (1) US5383488A (ko)
EP (1) EP0748427B1 (ko)
JP (1) JP3320735B2 (ko)
KR (1) KR100347283B1 (ko)
DE (1) DE69513642T2 (ko)
WO (2) WO1995020740A1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2736070A1 (de) * 2012-11-27 2014-05-28 Rheinisch-Westfälisch-Technische Hochschule Aachen Gefäß zur einseitigen Bearbeitung eines Substrats

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2446196A (en) * 1945-03-20 1948-08-03 Sitney Massey Double seal valve
US2705016A (en) * 1952-10-28 1955-03-29 Pratt Co Henry Butterfly valve
BE558123A (ko) * 1957-05-07 1900-01-01
US2929531A (en) * 1958-04-28 1960-03-22 Blaw Knox Co Seal for pressure vessel doors
US3028874A (en) * 1959-11-02 1962-04-10 Dow Chemical Co Valve
US5014737A (en) * 1989-11-13 1991-05-14 Allan Berman Quartz integrated trough/sump recirculating filtered high-purity chemical bath
US5056552A (en) * 1991-02-04 1991-10-15 Imtec Products, Inc. High temperature recirculating chemical bath construction
US5054519A (en) * 1990-12-26 1991-10-08 Imtec Products, Inc. Recirculating chemical bath with inflow and self balancing outflow

Also Published As

Publication number Publication date
US5383488A (en) 1995-01-24
EP0748427A4 (en) 1997-05-02
WO1995020740A1 (en) 1995-08-03
EP0748427A1 (en) 1996-12-18
JP3320735B2 (ja) 2002-09-03
DE69513642D1 (de) 2000-01-05
KR970700839A (ko) 1997-02-12
KR100347283B1 (ko) 2003-08-02
WO1995020741A1 (en) 1995-08-03
EP0748427B1 (en) 1999-12-01
JPH09508752A (ja) 1997-09-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee