DE69429959D1 - Optisches System für eine Reflexionsmessungsvorrichtung mit hoher Empfindlichkeit - Google Patents

Optisches System für eine Reflexionsmessungsvorrichtung mit hoher Empfindlichkeit

Info

Publication number
DE69429959D1
DE69429959D1 DE69429959T DE69429959T DE69429959D1 DE 69429959 D1 DE69429959 D1 DE 69429959D1 DE 69429959 T DE69429959 T DE 69429959T DE 69429959 T DE69429959 T DE 69429959T DE 69429959 D1 DE69429959 D1 DE 69429959D1
Authority
DE
Germany
Prior art keywords
optical system
measuring device
high sensitivity
reflection measuring
reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69429959T
Other languages
English (en)
Other versions
DE69429959T2 (de
Inventor
Kazuhiro Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jasco Corp
Original Assignee
Jasco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jasco Corp filed Critical Jasco Corp
Application granted granted Critical
Publication of DE69429959D1 publication Critical patent/DE69429959D1/de
Publication of DE69429959T2 publication Critical patent/DE69429959T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0019—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors)
    • G02B19/0023—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors) at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0085—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with both a detector and a source
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with infrared radiation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Toxicology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
DE69429959T 1993-10-25 1994-10-21 Optisches System für eine Reflexionsmessungsvorrichtung mit hoher Empfindlichkeit Expired - Lifetime DE69429959T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28859193A JP3390063B2 (ja) 1993-10-25 1993-10-25 高感度反射測定装置用の光学系

Publications (2)

Publication Number Publication Date
DE69429959D1 true DE69429959D1 (de) 2002-04-04
DE69429959T2 DE69429959T2 (de) 2002-10-10

Family

ID=17732243

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69429959T Expired - Lifetime DE69429959T2 (de) 1993-10-25 1994-10-21 Optisches System für eine Reflexionsmessungsvorrichtung mit hoher Empfindlichkeit

Country Status (4)

Country Link
US (1) US5483350A (de)
EP (1) EP0650043B1 (de)
JP (1) JP3390063B2 (de)
DE (1) DE69429959T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4392270B2 (ja) * 2004-03-05 2009-12-24 日本分光株式会社 高感度反射測定装置
CN1257414C (zh) * 2004-05-11 2006-05-24 罗筱泠 曲面反射镜
DE102015213147B4 (de) * 2015-07-14 2023-09-28 Carl Zeiss Spectroscopy Gmbh Verfahren zur Bestimmung und Messkopf zur Erfassung einer Oberflächeneigenschaft genau einer Seite einer lichtdurchlässigen Probe
CN106525249B (zh) * 2016-10-26 2023-04-18 中国科学院云南天文台 一种镜面红外测温装置及测温方法
KR101894798B1 (ko) 2017-06-15 2018-09-04 서울과학기술대학교 산학협력단 망원경을 이용한 유해물질 검출용 광송수신부
CN112986189B (zh) * 2021-02-24 2022-02-11 中国科学院长春光学精密机械与物理研究所 反射测量装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5719647A (en) * 1980-07-11 1982-02-01 Hitachi Ltd Inspecting device for sample of face plate
DE3147689C2 (de) * 1981-12-02 1984-04-26 Bruker Analytische Meßtechnik GmbH, 7512 Rheinstetten Zusatzgerät zur Durchführung von Reflexionsmessungen mit einem IR-Spektrometer
US4747684A (en) * 1986-09-30 1988-05-31 The United States Of America As Represented By The Secretary Of The Army Method of and apparatus for real-time crystallographic axis orientation determination
DE68907519T2 (de) * 1988-05-10 1993-10-21 Amersham Int Plc Biosensoren.
EP0341928A1 (de) * 1988-05-10 1989-11-15 AMERSHAM INTERNATIONAL plc Oberflächen-Resonanzplasmawellen-Sensoren
US5093580A (en) * 1990-03-02 1992-03-03 Spectra-Tech, Inc. ATR objective and method for sample analyzation using an ATR crystal
US5019715A (en) * 1990-03-02 1991-05-28 Spectra-Tech, Inc. Optical system and method for sample analyzation
US5106196A (en) * 1990-08-21 1992-04-21 Brierley Philip R Single adjustment specular reflection accessory for spectroscopy
JPH05340870A (ja) * 1992-06-04 1993-12-24 Shimadzu Corp 全反射吸収スペクトル測定装置
US5392175A (en) * 1993-06-09 1995-02-21 Maxtor Corporation PCMCIA type HDD connector mount

Also Published As

Publication number Publication date
EP0650043B1 (de) 2002-02-27
EP0650043A1 (de) 1995-04-26
DE69429959T2 (de) 2002-10-10
JP3390063B2 (ja) 2003-03-24
US5483350A (en) 1996-01-09
JPH07120379A (ja) 1995-05-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition