DE69429347D1 - Anlage zum kontrollierten Abkühlen von chemischen Behältern - Google Patents
Anlage zum kontrollierten Abkühlen von chemischen BehälternInfo
- Publication number
- DE69429347D1 DE69429347D1 DE69429347T DE69429347T DE69429347D1 DE 69429347 D1 DE69429347 D1 DE 69429347D1 DE 69429347 T DE69429347 T DE 69429347T DE 69429347 T DE69429347 T DE 69429347T DE 69429347 D1 DE69429347 D1 DE 69429347D1
- Authority
- DE
- Germany
- Prior art keywords
- controlled cooling
- chemical containers
- containers
- chemical
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- ing And Chemical Polishing (AREA)
- Control Of Temperature (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP94830440A EP0703604B1 (de) | 1994-09-20 | 1994-09-20 | Anlage zum kontrollierten Abkühlen von chemischen Behältern |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69429347D1 true DE69429347D1 (de) | 2002-01-17 |
DE69429347T2 DE69429347T2 (de) | 2002-08-14 |
Family
ID=8218525
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69429347T Expired - Fee Related DE69429347T2 (de) | 1994-09-20 | 1994-09-20 | Anlage zum kontrollierten Abkühlen von chemischen Behältern |
Country Status (3)
Country | Link |
---|---|
US (1) | US5878811A (de) |
EP (1) | EP0703604B1 (de) |
DE (1) | DE69429347T2 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6471778B1 (en) | 2000-06-09 | 2002-10-29 | Illinois Tool Works Inc. | Electrostatic coating system with coating material chiller and method therefor |
EP1193493A1 (de) | 2000-09-29 | 2002-04-03 | Infineon Technologies SC300 GmbH & Co. KG | Verfahren und Vorrichtung zum Messen und Regeln des Wassergehalts einer wässrigen Lösung |
AUPR400901A0 (en) * | 2001-03-28 | 2001-04-26 | Focus Thermal Technologies (International) Limited | Thermal storage device |
US7252714B2 (en) * | 2002-07-16 | 2007-08-07 | Semitool, Inc. | Apparatus and method for thermally controlled processing of microelectronic workpieces |
TWI235425B (en) * | 2004-05-26 | 2005-07-01 | Promos Technologies Inc | Etching system and method for treating the etching solution thereof |
TWI255864B (en) * | 2005-06-30 | 2006-06-01 | Chunghwa Picture Tubes Ltd | Etching apparatus and etching process |
US8720370B2 (en) * | 2011-04-07 | 2014-05-13 | Dynamic Micro System Semiconductor Equipment GmbH | Methods and apparatuses for roll-on coating |
CN107316825A (zh) * | 2016-04-27 | 2017-11-03 | 盟立自动化股份有限公司 | 湿式蚀刻装置 |
CN113793819A (zh) * | 2021-09-16 | 2021-12-14 | 长江存储科技有限责任公司 | 化学槽及其温度控制方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2645461A (en) * | 1948-08-26 | 1953-07-14 | Socony Vacuum Oil Co Inc | Thermoregulator |
US2835477A (en) * | 1955-05-02 | 1958-05-20 | Tovrog Theodore | Temperature control apparatus and method |
US2943842A (en) * | 1959-06-26 | 1960-07-05 | Alfred W Bettigole | Heating and/or cooling system |
US3156101A (en) * | 1963-03-04 | 1964-11-10 | Tranter Mfg Inc | Truck refrigeration system |
US3393729A (en) * | 1966-08-01 | 1968-07-23 | Bell Telephone Labor Inc | Heat exchange mantle with interchangeable cartridge means |
US3729948A (en) * | 1970-11-05 | 1973-05-01 | Ovitron Res Corp | Method for preserving comestibles |
DE2245966A1 (de) * | 1971-11-04 | 1973-05-10 | Luft U Kaeltetechnik Veb K | Klimaanlage, vorzugsweise fuer grossvolumige begehbare pruefkammern |
DE2216714C2 (de) * | 1972-04-07 | 1984-08-09 | Interatom Internationale Atomreaktorbau Gmbh, 5060 Bergisch Gladbach | Anschlußelement für einen Wärmetauscher in Tauchrohrbauweise |
US4246955A (en) * | 1972-10-04 | 1981-01-27 | Skala Stephen F | Pressure cooking appliance with thermal exchange fluid |
JPS5431890A (en) * | 1977-08-15 | 1979-03-08 | Matsushita Electric Works Ltd | Temperature controller |
US4370192A (en) * | 1980-10-20 | 1983-01-25 | American Microsystems, Inc. | Apparatus for chemical etching of silicon |
JPS6381932A (ja) * | 1986-09-26 | 1988-04-12 | Hitachi Ltd | エツチング装置 |
IT1245778B (it) * | 1991-04-05 | 1994-10-18 | Sgs Thomson Microelectronics | Apparecchio di riscaldamento per vaschette chimiche |
-
1994
- 1994-09-20 DE DE69429347T patent/DE69429347T2/de not_active Expired - Fee Related
- 1994-09-20 EP EP94830440A patent/EP0703604B1/de not_active Expired - Lifetime
-
1995
- 1995-09-13 US US08/527,408 patent/US5878811A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0703604B1 (de) | 2001-12-05 |
EP0703604A1 (de) | 1996-03-27 |
US5878811A (en) | 1999-03-09 |
DE69429347T2 (de) | 2002-08-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |