DE69420786D1 - Verfahren zur herstellung dünner filme unter vakuum - Google Patents
Verfahren zur herstellung dünner filme unter vakuumInfo
- Publication number
- DE69420786D1 DE69420786D1 DE69420786T DE69420786T DE69420786D1 DE 69420786 D1 DE69420786 D1 DE 69420786D1 DE 69420786 T DE69420786 T DE 69420786T DE 69420786 T DE69420786 T DE 69420786T DE 69420786 D1 DE69420786 D1 DE 69420786D1
- Authority
- DE
- Germany
- Prior art keywords
- under vacuum
- thin films
- producing thin
- films under
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1893093 | 1993-02-05 | ||
PCT/JP1994/000171 WO1994018358A1 (en) | 1993-02-05 | 1994-02-04 | Vacuum film forming method and apparatus therefor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69420786D1 true DE69420786D1 (de) | 1999-10-28 |
DE69420786T2 DE69420786T2 (de) | 2000-03-23 |
Family
ID=11985360
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69420786T Expired - Fee Related DE69420786T2 (de) | 1993-02-05 | 1994-02-04 | Verfahren zur herstellung dünner filme unter vakuum |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0634501B1 (de) |
KR (1) | KR0171441B1 (de) |
DE (1) | DE69420786T2 (de) |
TW (1) | TW310881U (de) |
WO (1) | WO1994018358A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4522527B2 (ja) * | 2000-03-06 | 2010-08-11 | キヤノンアネルバ株式会社 | 半導体製造装置における基板搭載方法 |
KR101270526B1 (ko) * | 2004-05-26 | 2013-06-04 | 가부시키가이샤 아루박 | 진공처리장치 |
EP2886682B1 (de) | 2013-12-23 | 2016-05-18 | AMAG rolling GmbH | Kathodenblech und Verfahren zur Ausbildung eines Ansatzbereichs für eine Schälvorrichtung an einem Kathodenblech |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8332394D0 (en) * | 1983-12-05 | 1984-01-11 | Pilkington Brothers Plc | Coating apparatus |
JPS60165379A (ja) * | 1984-02-09 | 1985-08-28 | Toshiba Mach Co Ltd | 連続型気相成長方法および装置 |
JPS63115326A (ja) * | 1986-10-31 | 1988-05-19 | Shimadzu Corp | プラズマcvd装置 |
US4911103A (en) * | 1987-07-17 | 1990-03-27 | Texas Instruments Incorporated | Processing apparatus and method |
JPH03287773A (ja) * | 1990-04-03 | 1991-12-18 | Nippon Steel Corp | 多段式プラズマ処理方法 |
-
1994
- 1994-02-04 WO PCT/JP1994/000171 patent/WO1994018358A1/ja active IP Right Grant
- 1994-02-04 EP EP94905851A patent/EP0634501B1/de not_active Expired - Lifetime
- 1994-02-04 DE DE69420786T patent/DE69420786T2/de not_active Expired - Fee Related
- 1994-02-04 KR KR1019940703521A patent/KR0171441B1/ko not_active IP Right Cessation
- 1994-02-15 TW TW084205940U patent/TW310881U/zh unknown
Also Published As
Publication number | Publication date |
---|---|
KR950701010A (ko) | 1995-02-20 |
EP0634501A1 (de) | 1995-01-18 |
KR0171441B1 (ko) | 1999-02-18 |
EP0634501B1 (de) | 1999-09-22 |
DE69420786T2 (de) | 2000-03-23 |
EP0634501A4 (de) | 1997-03-05 |
WO1994018358A1 (en) | 1994-08-18 |
TW310881U (en) | 1997-07-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |