DE69420786D1 - Verfahren zur herstellung dünner filme unter vakuum - Google Patents

Verfahren zur herstellung dünner filme unter vakuum

Info

Publication number
DE69420786D1
DE69420786D1 DE69420786T DE69420786T DE69420786D1 DE 69420786 D1 DE69420786 D1 DE 69420786D1 DE 69420786 T DE69420786 T DE 69420786T DE 69420786 T DE69420786 T DE 69420786T DE 69420786 D1 DE69420786 D1 DE 69420786D1
Authority
DE
Germany
Prior art keywords
under vacuum
thin films
producing thin
films under
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69420786T
Other languages
English (en)
Other versions
DE69420786T2 (de
Inventor
Noriyuki Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of DE69420786D1 publication Critical patent/DE69420786D1/de
Application granted granted Critical
Publication of DE69420786T2 publication Critical patent/DE69420786T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
DE69420786T 1993-02-05 1994-02-04 Verfahren zur herstellung dünner filme unter vakuum Expired - Fee Related DE69420786T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1893093 1993-02-05
PCT/JP1994/000171 WO1994018358A1 (en) 1993-02-05 1994-02-04 Vacuum film forming method and apparatus therefor

Publications (2)

Publication Number Publication Date
DE69420786D1 true DE69420786D1 (de) 1999-10-28
DE69420786T2 DE69420786T2 (de) 2000-03-23

Family

ID=11985360

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69420786T Expired - Fee Related DE69420786T2 (de) 1993-02-05 1994-02-04 Verfahren zur herstellung dünner filme unter vakuum

Country Status (5)

Country Link
EP (1) EP0634501B1 (de)
KR (1) KR0171441B1 (de)
DE (1) DE69420786T2 (de)
TW (1) TW310881U (de)
WO (1) WO1994018358A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4522527B2 (ja) * 2000-03-06 2010-08-11 キヤノンアネルバ株式会社 半導体製造装置における基板搭載方法
KR101270526B1 (ko) * 2004-05-26 2013-06-04 가부시키가이샤 아루박 진공처리장치
EP2886682B1 (de) 2013-12-23 2016-05-18 AMAG rolling GmbH Kathodenblech und Verfahren zur Ausbildung eines Ansatzbereichs für eine Schälvorrichtung an einem Kathodenblech

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8332394D0 (en) * 1983-12-05 1984-01-11 Pilkington Brothers Plc Coating apparatus
JPS60165379A (ja) * 1984-02-09 1985-08-28 Toshiba Mach Co Ltd 連続型気相成長方法および装置
JPS63115326A (ja) * 1986-10-31 1988-05-19 Shimadzu Corp プラズマｃｖｄ装置
US4911103A (en) * 1987-07-17 1990-03-27 Texas Instruments Incorporated Processing apparatus and method
JPH03287773A (ja) * 1990-04-03 1991-12-18 Nippon Steel Corp 多段式プラズマ処理方法

Also Published As

Publication number Publication date
KR950701010A (ko) 1995-02-20
EP0634501A1 (de) 1995-01-18
KR0171441B1 (ko) 1999-02-18
EP0634501B1 (de) 1999-09-22
DE69420786T2 (de) 2000-03-23
EP0634501A4 (de) 1997-03-05
WO1994018358A1 (en) 1994-08-18
TW310881U (en) 1997-07-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee