DE69419642D1 - Herstellungsverfahren eines Dünnfilmmagnetkopfes und danach hergestellter Magnetkopf - Google Patents

Herstellungsverfahren eines Dünnfilmmagnetkopfes und danach hergestellter Magnetkopf

Info

Publication number
DE69419642D1
DE69419642D1 DE69419642T DE69419642T DE69419642D1 DE 69419642 D1 DE69419642 D1 DE 69419642D1 DE 69419642 T DE69419642 T DE 69419642T DE 69419642 T DE69419642 T DE 69419642T DE 69419642 D1 DE69419642 D1 DE 69419642D1
Authority
DE
Germany
Prior art keywords
magnetic head
manufacturing
thin film
produced thereafter
film magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69419642T
Other languages
English (en)
Other versions
DE69419642T2 (de
Inventor
Lambertus Postma
Henricus Godefridus Rafae Maas
Jan Haisma
Jacobus Josephus Maria Ruigrok
Gerardus Henricus Johan Somers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Onstream Inc Longmont Col Us
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from BE9300274A external-priority patent/BE1006925A3/nl
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of DE69419642D1 publication Critical patent/DE69419642D1/de
Application granted granted Critical
Publication of DE69419642T2 publication Critical patent/DE69419642T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3916—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3916—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide
    • G11B5/3919—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3916—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide
    • G11B5/3919—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path
    • G11B5/3922—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure
    • G11B5/3925—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure the two parts being thin films
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)
DE69419642T 1993-03-22 1994-03-16 Herstellungsverfahren eines Dünnfilmmagnetkopfes und danach hergestellter Magnetkopf Expired - Fee Related DE69419642T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
BE9300274A BE1006925A3 (nl) 1993-03-22 1993-03-22 Werkwijze voor het vervaardigen van een dunnefilm magneetkop en magneetkop vervaardigd volgens de werkwijze.
EP93200995 1993-04-06

Publications (2)

Publication Number Publication Date
DE69419642D1 true DE69419642D1 (de) 1999-09-02
DE69419642T2 DE69419642T2 (de) 2000-02-17

Family

ID=25662715

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69419642T Expired - Fee Related DE69419642T2 (de) 1993-03-22 1994-03-16 Herstellungsverfahren eines Dünnfilmmagnetkopfes und danach hergestellter Magnetkopf

Country Status (7)

Country Link
US (1) US5531016A (de)
EP (1) EP0617409B1 (de)
JP (1) JPH076331A (de)
DE (1) DE69419642T2 (de)
HK (1) HK1013720A1 (de)
SG (1) SG44041A1 (de)
TW (1) TW255964B (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5640753A (en) * 1994-03-03 1997-06-24 Seagate Technology, Inc. Method of fabricating an inverted magnetoresistive head
DE69516442T2 (de) * 1994-03-03 2000-08-10 Seagate Technology International, Georgetown Magnetoresistiver Kopf und Herstellungsverfahren
JPH10501092A (ja) * 1995-03-24 1998-01-27 フィリップス エレクトロニクス ネムローゼ フェンノートシャップ 磁気ヘッドと測定装置と電流装置を具えた磁気装置
US6183891B1 (en) 1996-12-18 2001-02-06 Onstream, Inc. Magnetic head and method of manufacture
US6747854B1 (en) 1997-02-20 2004-06-08 Koninklijke Philips Electronics N.V. Multi-channel magnetic head with magnetoresistive elements
TW369649B (en) * 1997-02-20 1999-09-11 Koninkl Philips Electronics Nv Single-channel magnetoresistive magnetic head and device including such a magnetic head
US5890278A (en) * 1997-04-01 1999-04-06 U.S. Philips Corporation Method of manufacturing a magnetic head having a structure of layers
US5936801A (en) * 1997-04-04 1999-08-10 Seagate Technology, Inc. Head slider with partially recessed magnetoresistive element
US5991119A (en) 1997-11-03 1999-11-23 Seagate Technology, Inc. Proximity head slider having recessed magnetoresistive read transducer
US6137661A (en) * 1998-10-19 2000-10-24 Read-Rite Corporation System for providing a magnetoresistive head having higher efficiency
JP2002531912A (ja) 1998-12-03 2002-09-24 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 積層組立体の形成方法
US6554878B1 (en) 1999-06-14 2003-04-29 International Business Machines Corporation Slurry for multi-material chemical mechanical polishing
US6131271A (en) * 1999-06-25 2000-10-17 International Business Machines Corporation Method of planarizing first pole piece layer of write head by lapping without delamination of first pole piece layer from wafer substrate
US6433958B1 (en) * 1999-07-27 2002-08-13 Matsushita Electric Industrial Co., Ltd. Magnetic head, method for producing the same, video recording and reproduction apparatus including the magnetic head, and video camera including the magnetic head
US6510030B1 (en) 1999-08-17 2003-01-21 Seagate Technology, Llc Transducing head and method for forming a recessed shield for a transducing head
US6291351B1 (en) 2000-06-28 2001-09-18 International Business Machines Corporation Endpoint detection in chemical-mechanical polishing of cloisonne structures
US6712985B2 (en) 2001-07-03 2004-03-30 Hitachi Global Storage Technologies Method and apparatus for the manufacture of thin film magnetic transducers using a compliant, soft lapping process
JP2003317214A (ja) 2002-04-19 2003-11-07 Alps Electric Co Ltd 薄膜磁気ヘッド及び薄膜磁気ヘッドの下部シールド層の形成方法
US7650697B2 (en) * 2004-06-01 2010-01-26 Nidec Corporation Methods of manufacturing fluid-dynamic-pressure bearing and spindle motor incorporating the bearing, and spindle motor and recording-disk drive incorporating the bearing
US20060002023A1 (en) * 2004-06-30 2006-01-05 Quang Le Magnetic head having a deposited second magnetic shield and fabrication method therefor
US20060025053A1 (en) * 2004-07-30 2006-02-02 Marie-Claire Cyrille Method for fabricating a magnetic transducer using a slurry with spherical particles for CMP-assisted photoresist lift-off

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4052748A (en) * 1974-04-01 1977-10-04 U.S. Philips Corporation Magnetoresistive magnetic head
JPS59152521A (ja) * 1983-02-21 1984-08-31 Hitachi Ltd 磁気抵抗効果型多素子磁気ヘツド
JPS60177420A (ja) * 1984-02-23 1985-09-11 Nec Corp 複合型薄膜磁気ヘツド及びその製造方法
JPS6292219A (ja) * 1985-10-18 1987-04-27 Victor Co Of Japan Ltd 磁気抵抗効果型薄膜磁気ヘツド
FR2604021B1 (fr) * 1986-09-17 1988-10-28 Commissariat Energie Atomique Procede de realisation de tetes magnetiques en couches minces et a structure planaire et tete obtenue par ce procede
JP2505465B2 (ja) * 1987-06-19 1996-06-12 関西日本電気株式会社 ヨ−ク型薄膜磁気ヘッド
JPH01289224A (ja) * 1988-05-17 1989-11-21 Sumitomo Special Metals Co Ltd 薄膜磁気ヘッド用基板及びその製造方法
JPH02154309A (ja) * 1988-12-07 1990-06-13 Tdk Corp 薄膜磁気ヘッド用基板の製造方法
NL9000546A (nl) * 1990-03-09 1991-10-01 Philips Nv Werkwijze voor het vervaardigen van een dunnefilm magneetkop alsmede een dunnefilm magneetkop vervaardigbaar volgens de werkwijze.
JPH04351706A (ja) * 1991-05-30 1992-12-07 Matsushita Electric Ind Co Ltd 複合型薄膜磁気ヘッド
EP0519558B1 (de) * 1991-06-18 1996-09-18 Koninklijke Philips Electronics N.V. Dünnfilm-Lese-/Schreibkopf ohne Pol-Umgreifeffekt
EP0579298B1 (de) * 1992-06-15 1997-09-03 Koninklijke Philips Electronics N.V. Verfahren zum Herstellen einer Platte mit einer ebenen Hauptoberfläche, Verfahren zum Herstellen einer Platte mit parallelen Hauptoberflächen sowie Vorrichtung zum Durchführen der Verfahren

Also Published As

Publication number Publication date
EP0617409B1 (de) 1999-07-28
JPH076331A (ja) 1995-01-10
SG44041A1 (en) 1997-11-14
DE69419642T2 (de) 2000-02-17
HK1013720A1 (en) 1999-09-03
EP0617409A3 (de) 1996-12-27
US5531016A (en) 1996-07-02
EP0617409A2 (de) 1994-09-28
TW255964B (de) 1995-09-01

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: ONSTREAM, INC., LONGMONT, COL., US

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee