DE69418174D1 - Microporöse gasdurchlässige Elektrode und Verfahren zur Herstellung derselben - Google Patents

Microporöse gasdurchlässige Elektrode und Verfahren zur Herstellung derselben

Info

Publication number
DE69418174D1
DE69418174D1 DE69418174T DE69418174T DE69418174D1 DE 69418174 D1 DE69418174 D1 DE 69418174D1 DE 69418174 T DE69418174 T DE 69418174T DE 69418174 T DE69418174 T DE 69418174T DE 69418174 D1 DE69418174 D1 DE 69418174D1
Authority
DE
Germany
Prior art keywords
manufacturing
same
gas permeable
permeable electrode
microporous gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69418174T
Other languages
English (en)
Other versions
DE69418174T2 (de
Inventor
Lars Stormbom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vaisala Oy
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of DE69418174D1 publication Critical patent/DE69418174D1/de
Application granted granted Critical
Publication of DE69418174T2 publication Critical patent/DE69418174T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
DE69418174T 1994-01-18 1994-12-23 Microporöse gasdurchlässige Elektrode und Verfahren zur Herstellung derselben Expired - Lifetime DE69418174T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI940240A FI98861C (fi) 1994-01-18 1994-01-18 Menetelmä mikrohuokoisen, kaasua läpäisevän elektrodin valmistamiseksisekä mikrohuokoinen kaasua läpäisevä elektrodi

Publications (2)

Publication Number Publication Date
DE69418174D1 true DE69418174D1 (de) 1999-06-02
DE69418174T2 DE69418174T2 (de) 1999-10-28

Family

ID=8539544

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69418174T Expired - Lifetime DE69418174T2 (de) 1994-01-18 1994-12-23 Microporöse gasdurchlässige Elektrode und Verfahren zur Herstellung derselben

Country Status (5)

Country Link
US (1) US5607564A (de)
EP (1) EP0665303B1 (de)
JP (1) JP3585973B2 (de)
DE (1) DE69418174T2 (de)
FI (1) FI98861C (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2774499B1 (fr) * 1998-02-03 2000-04-07 Silmag Sa Procede de realisation d'une couche mince perpendiculaire a la surface d'un substrat
AU2000244335A1 (en) * 2000-05-15 2001-11-26 Yamatake Corporation Humidity sensor
DE60239174D1 (de) * 2001-05-31 2011-03-31 Ngk Spark Plug Co Feuchtigkeitssensor
JP5041837B2 (ja) * 2007-03-20 2012-10-03 富士電機株式会社 薄膜ガスセンサおよびその製造方法
US8124246B2 (en) * 2008-11-19 2012-02-28 Honeywell International Inc. Coated components and methods of fabricating coated components and coated turbine disks
JP5385657B2 (ja) * 2009-03-27 2014-01-08 株式会社堀場製作所 ガスセンサ
WO2013191309A1 (ko) * 2012-06-18 2013-12-27 포항공과대학교 산학협력단 나노 구조를 갖는 금속산화물반도체 가스센서 및 그 제조방법
EP3004868B1 (de) 2013-05-30 2022-12-28 Vaisala Oyj Struktur mit zwei gassensoren und messverfahren
EP3495807A1 (de) * 2017-12-08 2019-06-12 MEAS France Verfahren zur herstellung eines feuchtigkeitssensors sowie ein feuchtigkeitssensor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2056503B (en) * 1979-08-09 1983-12-07 Standard Telephones Cables Ltd Porous metal films
JPH0244023B2 (ja) * 1982-04-28 1990-10-02 Hokuriku Elect Ind Alnoyokyokusankahakumakuomochiitashitsudosensasoshioyobisonoseizohoho
JPS5983352A (ja) * 1982-11-05 1984-05-14 Nissan Motor Co Ltd 燃料電池用電極の製造方法
JPS59173743A (ja) * 1983-03-23 1984-10-01 Sharp Corp 感湿素子
DE3345990A1 (de) * 1983-12-20 1985-06-27 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen einer implantierbaren elektrode
JPS60140609A (ja) * 1983-12-27 1985-07-25 シャープ株式会社 透湿性導電膜の製造方法
JPS61277046A (ja) * 1985-05-31 1986-12-08 Chino Corp 湿度素子
EP0349925A1 (de) * 1988-07-04 1990-01-10 INTERATOM Gesellschaft mit beschränkter Haftung Verfahren zum Beschichten von Gegenständen aus hochschmelzenden Metallen
JP2629963B2 (ja) * 1989-06-30 1997-07-16 旭硝子株式会社 高耐久性低水素過電圧陰極
US5104695A (en) * 1989-09-08 1992-04-14 International Business Machines Corporation Method and apparatus for vapor deposition of material onto a substrate

Also Published As

Publication number Publication date
US5607564A (en) 1997-03-04
EP0665303B1 (de) 1999-04-28
FI940240A0 (fi) 1994-01-18
FI940240A (fi) 1995-07-19
FI98861C (fi) 1997-08-25
EP0665303A1 (de) 1995-08-02
DE69418174T2 (de) 1999-10-28
JP3585973B2 (ja) 2004-11-10
FI98861B (fi) 1997-05-15
JPH07260733A (ja) 1995-10-13

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Legal Events

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8364 No opposition during term of opposition