DE69417052T4 - Verfahren zur chemischen dampfphaseninfiltration von material ins innere eines porösen substrates mit kontrollierter oberflächentemperatur - Google Patents

Verfahren zur chemischen dampfphaseninfiltration von material ins innere eines porösen substrates mit kontrollierter oberflächentemperatur

Info

Publication number
DE69417052T4
DE69417052T4 DE69417052T DE69417052T DE69417052T4 DE 69417052 T4 DE69417052 T4 DE 69417052T4 DE 69417052 T DE69417052 T DE 69417052T DE 69417052 T DE69417052 T DE 69417052T DE 69417052 T4 DE69417052 T4 DE 69417052T4
Authority
DE
Germany
Prior art keywords
chemical vapor
surface temperature
vapor phase
porous substrate
controlled surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69417052T
Other languages
English (en)
Other versions
DE69417052D1 (de
DE69417052T3 (de
DE69417052T2 (de
Inventor
Bernard Delperier
Christian Robin-Brosse
Jean-Luc Domblides
Gilles Bondieu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Aircraft Engines SAS
Original Assignee
Societe Nationale dEtude et de Construction de Moteurs dAviation SNECMA
SNECMA SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9452261&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69417052(T4) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Societe Nationale dEtude et de Construction de Moteurs dAviation SNECMA, SNECMA SAS filed Critical Societe Nationale dEtude et de Construction de Moteurs dAviation SNECMA
Application granted granted Critical
Publication of DE69417052T2 publication Critical patent/DE69417052T2/de
Publication of DE69417052T4 publication Critical patent/DE69417052T4/de
Publication of DE69417052T3 publication Critical patent/DE69417052T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/71—Ceramic products containing macroscopic reinforcing agents
    • C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
    • C04B35/80—Fibres, filaments, whiskers, platelets, or the like
    • C04B35/83—Carbon fibres in a carbon matrix
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602—Making the green bodies or pre-forms by moulding
    • C04B2235/6026—Computer aided shaping, e.g. rapid prototyping
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/614—Gas infiltration of green bodies or pre-forms
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/94—Products characterised by their shape
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/95—Products characterised by their size, e.g. microceramics
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/10—Chemical vapor infiltration, i.e. CVI

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Composite Materials (AREA)
  • Structural Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
DE69417052T 1993-10-27 1994-09-20 Verfahren zur chemischen dampfphaseninfiltration von material ins innere eines porösen substrates mit kontrollierter oberflächentemperatur Expired - Lifetime DE69417052T3 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR9312807 1993-10-27
FR9312807A FR2711647B1 (fr) 1993-10-27 1993-10-27 Procédé d'infiltration chimique en phase vapeur d'un matériau au sein d'un substrat poreux à température de surface contrôlée.
PCT/FR1994/001090 WO1995011868A1 (fr) 1993-10-27 1994-09-20 Procede d'infiltration chimique en phase vapeur d'un materiau au sein d'un substrat poreux a temperature de surface controlee

Publications (3)

Publication Number Publication Date
DE69417052T2 DE69417052T2 (de) 1999-10-21
DE69417052T4 true DE69417052T4 (de) 2000-02-24
DE69417052T3 DE69417052T3 (de) 2005-01-20

Family

ID=9452261

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69417052T Expired - Lifetime DE69417052T3 (de) 1993-10-27 1994-09-20 Verfahren zur chemischen dampfphaseninfiltration von material ins innere eines porösen substrates mit kontrollierter oberflächentemperatur
DE69417052A Expired - Lifetime DE69417052D1 (de) 1993-10-27 1994-09-20 Verfahren zur chemischen dampfphaseninfiltration von material ins innere eines porösen substrates mit kontrollierter oberflächentemperatur

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69417052A Expired - Lifetime DE69417052D1 (de) 1993-10-27 1994-09-20 Verfahren zur chemischen dampfphaseninfiltration von material ins innere eines porösen substrates mit kontrollierter oberflächentemperatur

Country Status (7)

Country Link
US (1) US5652030A (de)
EP (1) EP0725767B2 (de)
JP (1) JP3490087B2 (de)
CA (1) CA2175045C (de)
DE (2) DE69417052T3 (de)
FR (1) FR2711647B1 (de)
WO (1) WO1995011868A1 (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6083560A (en) * 1995-11-16 2000-07-04 Alliant Techsystems Inc Process for controlled deposition profile forced flow chemical vapor infiltration
US6112695A (en) * 1996-10-08 2000-09-05 Nano Scale Surface Systems, Inc. Apparatus for plasma deposition of a thin film onto the interior surface of a container
DE19646094C2 (de) * 1996-11-08 1999-03-18 Sintec Keramik Gmbh Verfahren zur chemischen Gasphaseninfiltration von refraktären Stoffen, insbesondere Kohlenstoff und Siliziumkarbid, sowie Verwendung des Verfahrens
FR2784695B1 (fr) * 1998-10-20 2001-11-02 Snecma Densification de structures poreuses par infiltration chimique en phase vapeur
AT407754B (de) * 1999-09-29 2001-06-25 Electrovac Verfahren und vorrichtung zur herstellung einer nanotube-schicht auf einem substrat
GB9930810D0 (en) 1999-12-30 2000-02-16 Dunlop Aerospace Ltd Densification
US6953605B2 (en) * 2001-12-26 2005-10-11 Messier-Bugatti Method for densifying porous substrates by chemical vapour infiltration with preheated gas
GB2428671B (en) 2005-07-29 2011-08-31 Surface Transforms Plc Method for the manufacture of carbon fibre-reinforced ceramic brake or clutch disks
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
MX345403B (es) 2009-05-13 2017-01-30 Sio2 Medical Products Inc Revestimiento por pecvd utilizando un precursor organosilícico.
US8383197B2 (en) * 2009-05-28 2013-02-26 Honeywell International Inc. Titanium carbide or tungsten carbide with combustion synthesis to block porosity in C-C brake discs for antioxidation protection
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US20110033623A1 (en) * 2009-08-05 2011-02-10 Honeywell International Inc. Method of preventing carbon friction material anti oxidation system migration by utilizing carbon vapor deposition
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
EP2776603B1 (de) 2011-11-11 2019-03-06 SiO2 Medical Products, Inc. Passivierungs-, ph-schutz- oder schmierbeschichtung für arzneimittelverpackung, beschichtungsverfahren und vorrichtung
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
DE102012100176B4 (de) 2012-01-10 2016-11-17 Cvt Gmbh & Co. Kg Verfahren zur chemischen Gasphaseninfiltration von wenigstens einem refraktären Stoff
CA2887352A1 (en) 2012-05-09 2013-11-14 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
EP2914762B1 (de) 2012-11-01 2020-05-13 SiO2 Medical Products, Inc. Verfahren zur inspektion einer beschichtung
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
WO2014085348A2 (en) 2012-11-30 2014-06-05 Sio2 Medical Products, Inc. Controlling the uniformity of pecvd deposition on medical syringes, cartridges, and the like
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
KR102472240B1 (ko) 2013-03-11 2022-11-30 에스아이오2 메디컬 프로덕츠, 인크. 코팅된 패키징
EP2970024B1 (de) 2013-03-15 2019-10-16 Rolls-Royce Corporation Verfahren zur herstellung von hochfesten verbundwerkstoffen mit keramischer matrix
JP6411448B2 (ja) 2013-03-15 2018-10-24 ロールス−ロイス コーポレイション セラミックスマトリックス複合材料及びセラミックスマトリックス複合材料を製造する製造方法
WO2014144926A1 (en) 2013-03-15 2014-09-18 Sio2 Medical Products, Inc. Coating method
US11066745B2 (en) 2014-03-28 2021-07-20 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
US11077233B2 (en) 2015-08-18 2021-08-03 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE603069A (de) † 1960-04-26
FR2225396B1 (de) * 1973-04-10 1978-02-10 Electro Refractaire
US5254374A (en) † 1992-04-08 1993-10-19 The United States Of America As Represented By The United States Department Of Energy Chemical vapor infiltration using microwave energy

Also Published As

Publication number Publication date
EP0725767A1 (de) 1996-08-14
DE69417052D1 (de) 1999-04-15
JP3490087B2 (ja) 2004-01-26
CA2175045A1 (en) 1995-05-04
WO1995011868A1 (fr) 1995-05-04
DE69417052T3 (de) 2005-01-20
JPH09504263A (ja) 1997-04-28
DE69417052T2 (de) 1999-10-21
EP0725767B2 (de) 2004-05-12
US5652030A (en) 1997-07-29
CA2175045C (en) 2004-02-17
FR2711647A1 (fr) 1995-05-05
FR2711647B1 (fr) 1996-01-19
EP0725767B1 (de) 1999-03-10

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