DE69413898D1 - Vorrichtung und Verfahren zur thermischen Reinigung mittels Stickstofftrifluorid - Google Patents

Vorrichtung und Verfahren zur thermischen Reinigung mittels Stickstofftrifluorid

Info

Publication number
DE69413898D1
DE69413898D1 DE69413898T DE69413898T DE69413898D1 DE 69413898 D1 DE69413898 D1 DE 69413898D1 DE 69413898 T DE69413898 T DE 69413898T DE 69413898 T DE69413898 T DE 69413898T DE 69413898 D1 DE69413898 D1 DE 69413898D1
Authority
DE
Germany
Prior art keywords
nitrogen trifluoride
thermal cleaning
cleaning
thermal
trifluoride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69413898T
Other languages
English (en)
Inventor
Bruce Alan Huling
Charles Anthony Schneider
George Martin Engle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
GEC Inc
Original Assignee
Air Products and Chemicals Inc
GEC Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Products and Chemicals Inc, GEC Inc filed Critical Air Products and Chemicals Inc
Application granted granted Critical
Publication of DE69413898D1 publication Critical patent/DE69413898D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Detergent Compositions (AREA)
  • Chemical Vapour Deposition (AREA)
DE69413898T 1993-07-26 1994-07-19 Vorrichtung und Verfahren zur thermischen Reinigung mittels Stickstofftrifluorid Expired - Lifetime DE69413898D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9742493A 1993-07-26 1993-07-26
US21689594A 1994-03-23 1994-03-23

Publications (1)

Publication Number Publication Date
DE69413898D1 true DE69413898D1 (de) 1998-11-19

Family

ID=26793241

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69413898T Expired - Lifetime DE69413898D1 (de) 1993-07-26 1994-07-19 Vorrichtung und Verfahren zur thermischen Reinigung mittels Stickstofftrifluorid

Country Status (5)

Country Link
US (1) US5797195A (de)
EP (1) EP0636707B1 (de)
JP (1) JP2614827B2 (de)
DE (1) DE69413898D1 (de)
TW (1) TW241375B (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5714011A (en) * 1995-02-17 1998-02-03 Air Products And Chemicals Inc. Diluted nitrogen trifluoride thermal cleaning process
JPH0929002A (ja) * 1995-07-17 1997-02-04 Teisan Kk ガス回収装置
US5688359A (en) * 1995-07-20 1997-11-18 Micron Technology, Inc. Muffle etch injector assembly
US5868852A (en) * 1997-02-18 1999-02-09 Air Products And Chemicals, Inc. Partial clean fluorine thermal cleaning process
JP3563565B2 (ja) * 1997-06-09 2004-09-08 東京エレクトロン株式会社 排気装置および排気方法
JP4598952B2 (ja) * 1998-06-08 2010-12-15 アドバンスト テクノロジー マテリアルズ，インコーポレイテッド 化学物質デリバリー・システムのパージ方法
US6395099B1 (en) 1999-02-08 2002-05-28 Micron Technology Method of processing selected surfaces in a semiconductor process chamber based on a temperature differential between surfaces
FR2791809B1 (fr) * 1999-04-01 2001-06-15 Air Liquide Procede et dispositif de traitement d'articles stockes dans des conteneurs et appareil de stockage dote d'un tel dispositif
US6544842B1 (en) 1999-05-01 2003-04-08 Micron Technology, Inc. Method of forming hemisphere grained silicon on a template on a semiconductor work object
US6863019B2 (en) * 2000-06-13 2005-03-08 Applied Materials, Inc. Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas
KR100464663B1 (ko) * 2001-06-29 2005-01-03 주식회사 하이닉스반도체 세정 장치 및 그를 이용한 웨이퍼 세정 방법
US6858264B2 (en) * 2002-04-24 2005-02-22 Micron Technology, Inc. Chemical vapor deposition methods
US20030216041A1 (en) * 2002-05-08 2003-11-20 Herring Robert B. In-situ thermal chamber cleaning
US6955707B2 (en) * 2002-06-10 2005-10-18 The Boc Group, Inc. Method of recycling fluorine using an adsorption purification process
US6857433B2 (en) 2002-07-22 2005-02-22 Air Products And Chemicals, Inc. Process for cleaning a glass-coating reactor using a reactive gas
US6818566B2 (en) * 2002-10-18 2004-11-16 The Boc Group, Inc. Thermal activation of fluorine for use in a semiconductor chamber
JP4519037B2 (ja) * 2005-08-31 2010-08-04 東京エレクトロン株式会社 加熱装置及び塗布、現像装置
JP5109376B2 (ja) 2007-01-22 2012-12-26 東京エレクトロン株式会社 加熱装置、加熱方法及び記憶媒体
JP5133013B2 (ja) * 2007-09-10 2013-01-30 東京エレクトロン株式会社 成膜装置の排気系構造、成膜装置、および排ガスの処理方法
WO2016182648A1 (en) * 2015-05-08 2016-11-17 Applied Materials, Inc. Method for controlling a processing system
JP6371738B2 (ja) * 2015-05-28 2018-08-08 株式会社東芝 成膜装置
CN116251803B (zh) * 2023-04-12 2023-09-22 东莞市晟鼎精密仪器有限公司 基于微波等离子干法清洗氮化硅涂层的石墨舟清洗设备

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3630051A (en) * 1970-02-19 1971-12-28 Graham Mfg Co Inc Cold trap ice-removal means for vacuum drying systems
US4488506A (en) * 1981-06-18 1984-12-18 Itt Industries, Inc. Metallization plant
JPS60198394A (ja) * 1984-03-21 1985-10-07 Anelva Corp 真空処理装置の排気装置
GB2183204A (en) * 1985-11-22 1987-06-03 Advanced Semiconductor Mat Nitrogen trifluoride as an in-situ cleaning agent
US4796562A (en) * 1985-12-03 1989-01-10 Varian Associates, Inc. Rapid thermal cvd apparatus
FR2616884B1 (fr) * 1987-06-19 1991-05-10 Air Liquide Procede de traitement d'effluents gazeux provenant de la fabrication de composants electroniques et appareil d'incineration pour sa mise en oeuvre
JPH01306580A (ja) * 1988-06-01 1989-12-11 Mitsubishi Electric Corp エツチング装置
US5186120A (en) * 1989-03-22 1993-02-16 Mitsubishi Denki Kabushiki Kaisha Mixture thin film forming apparatus
JP3004696B2 (ja) * 1989-08-25 2000-01-31 アプライド マテリアルズ インコーポレーテッド 化学的蒸着装置の洗浄方法
US5250323A (en) * 1989-10-30 1993-10-05 Kabushiki Kaisha Toshiba Chemical vapor growth apparatus having an exhaust device including trap
US5203956A (en) * 1990-01-08 1993-04-20 Lsi Logic Corporation Method for performing in-situ etch of a CVD chamber
US5211796A (en) * 1990-01-08 1993-05-18 Lst Logic Corporation Apparatus for performing in-situ etch of CVD chamber
JPH0798648B2 (ja) * 1990-01-10 1995-10-25 セントラル硝子株式会社 Ｎｆ３ガスの精製方法
US5127365A (en) * 1990-02-27 1992-07-07 Kabushiki Kaisha Toshiba Vertical heat-treatment apparatus for semiconductor parts
JPH05154334A (ja) * 1991-12-11 1993-06-22 Fujitsu Ltd 半導体製造装置の排気ポンプシステム

Also Published As

Publication number Publication date
EP0636707B1 (de) 1998-10-14
JP2614827B2 (ja) 1997-05-28
TW241375B (de) 1995-02-21
EP0636707A3 (de) 1995-07-19
JPH07169729A (ja) 1995-07-04
EP0636707A2 (de) 1995-02-01
US5797195A (en) 1998-08-25

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Legal Events

Date Code Title Description
8332 No legal effect for de