DE69407613T2 - Vollfeldmaske-beleuchtungsverbesserungsverfahren und -vorrichtung - Google Patents

Vollfeldmaske-beleuchtungsverbesserungsverfahren und -vorrichtung

Info

Publication number
DE69407613T2
DE69407613T2 DE69407613T DE69407613T DE69407613T2 DE 69407613 T2 DE69407613 T2 DE 69407613T2 DE 69407613 T DE69407613 T DE 69407613T DE 69407613 T DE69407613 T DE 69407613T DE 69407613 T2 DE69407613 T2 DE 69407613T2
Authority
DE
Germany
Prior art keywords
enhancement method
full field
field mask
lighting enhancement
mask lighting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69407613T
Other languages
English (en)
Other versions
DE69407613D1 (de
Inventor
William Partlo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cymer Inc
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc filed Critical Cymer Inc
Application granted granted Critical
Publication of DE69407613D1 publication Critical patent/DE69407613D1/de
Publication of DE69407613T2 publication Critical patent/DE69407613T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
    • G03F7/2006—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light using coherent light; using polarised light
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Laser Beam Processing (AREA)
DE69407613T 1993-09-30 1994-09-30 Vollfeldmaske-beleuchtungsverbesserungsverfahren und -vorrichtung Expired - Fee Related DE69407613T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12941493A 1993-09-30 1993-09-30
PCT/US1994/011008 WO1995009068A1 (en) 1993-09-30 1994-09-30 Full field mask illumination enhancement methods and apparatus

Publications (2)

Publication Number Publication Date
DE69407613D1 DE69407613D1 (de) 1998-02-05
DE69407613T2 true DE69407613T2 (de) 1998-06-04

Family

ID=22439822

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69407613T Expired - Fee Related DE69407613T2 (de) 1993-09-30 1994-09-30 Vollfeldmaske-beleuchtungsverbesserungsverfahren und -vorrichtung

Country Status (9)

Country Link
US (1) US5601733A (de)
EP (1) EP0724498B1 (de)
KR (1) KR100259969B1 (de)
AU (1) AU7921894A (de)
CA (1) CA2173141A1 (de)
DE (1) DE69407613T2 (de)
HK (1) HK1008732A1 (de)
SG (1) SG45356A1 (de)
WO (1) WO1995009068A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19520187C1 (de) * 1995-06-01 1996-09-12 Microlas Lasersystem Gmbh Optik zum Herstellen einer scharfen Beleuchtungslinie aus einem Laserstrahl
US6040552A (en) * 1997-01-30 2000-03-21 Jain; Kanti High-speed drilling system for micro-via pattern formation, and resulting structure
EP0881515B1 (de) 1997-05-29 2004-03-17 Corning Incorporated Raumfilter für einen Hochleistungslaserstrahl
DE19724061C2 (de) * 1997-06-07 2001-11-22 Univ Stuttgart Strahlwerkzeuge Vorrichtung zur Laserbearbeitung eines Werkstückes
TW498184B (en) * 1999-06-04 2002-08-11 Asm Lithography Bv Method of manufacturing a device using a lithographic projection apparatus, and device manufactured in accordance with said method
US6577380B1 (en) * 2000-07-21 2003-06-10 Anvik Corporation High-throughput materials processing system
US6515257B1 (en) * 2001-03-26 2003-02-04 Anvik Corporation High-speed maskless via generation system
DE10138847A1 (de) * 2001-08-15 2003-02-27 Zeiss Carl Blende für eine Integratoreinheit
GB0222342D0 (en) * 2002-09-26 2002-11-06 British Nuclear Fuels Plc Surface treatment of concrete
JP3869352B2 (ja) * 2002-11-12 2007-01-17 日鉱金属株式会社 金属箔の熱量測定方法、表面特性の調整方法、レーザー穴開け方法又は熱量測定装置
US6740847B1 (en) * 2003-03-10 2004-05-25 Siemens Vdo Automotive Corporation Method of forming multiple machining spots by a single laser
US7394594B2 (en) 2006-05-08 2008-07-01 Bright View Technologies, Inc. Methods for processing a pulsed laser beam to create apertures through microlens arrays
US8610986B2 (en) * 2009-04-06 2013-12-17 The Board Of Trustees Of The University Of Illinois Mirror arrays for maskless photolithography and image display
EP2733514B1 (de) * 2012-11-16 2020-09-30 PerkinElmer Cellular Technologies Germany GmbH Mikroskopvorrichtung zur strukturierten Beleuchtung einer Probe
DE102013204442A1 (de) 2013-03-14 2014-10-02 Carl Zeiss Smt Gmbh Optischer Wellenleiter zur Führung von Beleuchtungslicht
CN103279014B (zh) * 2013-06-14 2016-01-20 苏州苏大维格光电科技股份有限公司 纳米图形化衬底制备装置与方法
CA3002392A1 (en) * 2015-10-30 2017-05-04 Seurat Technologies, Inc. Additive manufacturing system and method
EP3411170A4 (de) * 2016-01-28 2020-02-12 Seurat Technologies, Inc. Generative fertigung, system und verfahren zur räumlichen wärmebehandlung
WO2017194393A1 (en) * 2016-05-11 2017-11-16 Asml Netherlands B.V. Radiation conditioning system, illumination system and metrology apparatus, device manufacturing method

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3773404A (en) * 1972-06-30 1973-11-20 Western Electric Co Telecentric lens
US3972599A (en) * 1974-09-16 1976-08-03 Caterpillar Tractor Co. Method and apparatus for focussing laser beams
US4128752A (en) * 1976-12-15 1978-12-05 Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of National Defence Laser micromachining apparatus
US4156124A (en) * 1977-04-14 1979-05-22 Optical Engineering, Inc. Image transfer laser engraving
EP0282593B1 (de) * 1986-07-08 1993-09-15 Kabushiki Kaisha Komatsu Seisakusho Vorrichtung zum formen eines laserstrahls
JPS63192584A (ja) * 1987-02-05 1988-08-09 Toshiba Corp レ−ザマ−キング用マスク
DK160357C (da) * 1987-12-08 1991-08-12 Flemming Olsen Optiksystem til lasermaerkning
US4915981A (en) * 1988-08-12 1990-04-10 Rogers Corporation Method of laser drilling fluoropolymer materials
JPH02175090A (ja) * 1988-12-27 1990-07-06 Isamu Miyamoto レーザビーム成形装置
GB8916133D0 (en) * 1989-07-14 1989-08-31 Raychem Ltd Laser machining
US5223693A (en) * 1990-04-28 1993-06-29 Mitsubishi Denki Kabushiki Kaisha Optical machining apparatus
US5389954A (en) * 1990-11-21 1995-02-14 Canon Kabushiki Kaisha Laser process apparatus for forming holes in a workpiece
JP3285214B2 (ja) * 1991-03-22 2002-05-27 株式会社日立製作所 レーザ加工用光学装置
US5473408A (en) * 1994-07-01 1995-12-05 Anvik Corporation High-efficiency, energy-recycling exposure system

Also Published As

Publication number Publication date
EP0724498A4 (de) 1996-08-28
AU7921894A (en) 1995-04-18
HK1008732A1 (en) 1999-05-14
CA2173141A1 (en) 1995-04-06
DE69407613D1 (de) 1998-02-05
EP0724498B1 (de) 1997-12-29
KR960704673A (ko) 1996-10-09
WO1995009068A1 (en) 1995-04-06
KR100259969B1 (ko) 2000-06-15
EP0724498A1 (de) 1996-08-07
SG45356A1 (en) 1998-01-16
US5601733A (en) 1997-02-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee