DE69404483D1 - Permanentmagnet-Vorrichtung zur Verwendung in Magnetron-Plasma-Prozessen - Google Patents

Permanentmagnet-Vorrichtung zur Verwendung in Magnetron-Plasma-Prozessen

Info

Publication number
DE69404483D1
DE69404483D1 DE69404483T DE69404483T DE69404483D1 DE 69404483 D1 DE69404483 D1 DE 69404483D1 DE 69404483 T DE69404483 T DE 69404483T DE 69404483 T DE69404483 T DE 69404483T DE 69404483 D1 DE69404483 D1 DE 69404483D1
Authority
DE
Germany
Prior art keywords
permanent magnet
magnet device
plasma processes
magnetron plasma
magnetron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69404483T
Other languages
English (en)
Other versions
DE69404483T2 (de
Inventor
Ken Ohashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Application granted granted Critical
Publication of DE69404483D1 publication Critical patent/DE69404483D1/de
Publication of DE69404483T2 publication Critical patent/DE69404483T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
DE69404483T 1993-01-08 1994-01-10 Permanentmagnet-Vorrichtung zur Verwendung in Magnetron-Plasma-Prozessen Expired - Fee Related DE69404483T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5017979A JP2899190B2 (ja) 1993-01-08 1993-01-08 マグネトロンプラズマ用永久磁石磁気回路

Publications (2)

Publication Number Publication Date
DE69404483D1 true DE69404483D1 (de) 1997-09-04
DE69404483T2 DE69404483T2 (de) 1997-12-04

Family

ID=11958847

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69404483T Expired - Fee Related DE69404483T2 (de) 1993-01-08 1994-01-10 Permanentmagnet-Vorrichtung zur Verwendung in Magnetron-Plasma-Prozessen

Country Status (4)

Country Link
US (1) US5512872A (de)
EP (1) EP0606097B1 (de)
JP (1) JP2899190B2 (de)
DE (1) DE69404483T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5659276A (en) * 1995-07-12 1997-08-19 Shin-Etsu Chemical Co., Ltd. Magnetic field generator for magnetron plasma
DE19614599A1 (de) * 1996-04-13 1997-10-16 Singulus Technologies Gmbh Vorrichtung zur Kathodenzerstäubung
US5863399A (en) * 1996-04-13 1999-01-26 Singulus Technologies Gmbh Device for cathode sputtering
GB9718947D0 (en) * 1997-09-05 1997-11-12 Nordiko Ltd Vacuum sputtering apparatus
US6892970B2 (en) 2002-12-18 2005-05-17 Robert Bosch Gmbh Fuel injector having segmented metal core
EP1710829A1 (de) * 2005-04-05 2006-10-11 Applied Films GmbH & Co. KG Magnetanordnung für ein Planar-Magnetron
KR100793356B1 (ko) * 2005-12-13 2008-01-11 삼성에스디아이 주식회사 스퍼터링 장치
JP4617279B2 (ja) * 2006-08-10 2011-01-19 信越化学工業株式会社 磁気回路および磁場印加方法
JP5145342B2 (ja) * 2007-08-24 2013-02-13 株式会社アルバック 透明導電膜の形成方法
EP2197044A4 (de) * 2007-09-19 2012-06-27 Ulvac Inc Solarbatterie-herstellungsverfahren
US20100193352A1 (en) * 2007-09-19 2010-08-05 Ulvac, Inc. Method for manufacturing solar cell
WO2009046325A1 (en) 2007-10-04 2009-04-09 Hussmann Corporation Permanent magnet device
US8209988B2 (en) * 2008-09-24 2012-07-03 Husssmann Corporation Magnetic refrigeration device
TWI384510B (zh) * 2010-11-12 2013-02-01 Ind Tech Res Inst 均勻磁場產生設備及其磁場產生單元
KR20140003570A (ko) 2011-01-24 2014-01-09 히타치 긴조쿠 가부시키가이샤 마그네트론 스퍼터링용 자장 발생 장치
KR20140109427A (ko) 2012-01-30 2014-09-15 미쓰비시덴키 가부시키가이샤 자기회로
US20140124359A1 (en) * 2012-11-02 2014-05-08 Intermolecular, Inc. New Magnet Design Which Improves Erosion Profile for PVD Systems
RU2528536C1 (ru) * 2013-01-09 2014-09-20 Открытое акционерное общество "Научно-исследовательский институт полупроводникового машиностроения" Магнитный блок распылительной системы
US10410889B2 (en) 2014-07-25 2019-09-10 Applied Materials, Inc. Systems and methods for electrical and magnetic uniformity and skew tuning in plasma processing reactors
WO2018101444A1 (ja) * 2016-11-30 2018-06-07 国立研究開発法人産業技術総合研究所 マグネトロンスパッタリング装置、及び、磁場形成装置
CN111192807A (zh) * 2018-11-15 2020-05-22 北京中科信电子装备有限公司 一种新型中束流平行透镜磁铁

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3781592A (en) * 1972-06-08 1973-12-25 Raytheon Co Radial magnetized magnet
GB1580574A (en) * 1976-06-21 1980-12-03 Kumakura S Annular magnet assembly
US4283647A (en) * 1979-08-30 1981-08-11 The Singer Company Annular segment permanent magnet single air gap electric motor
JPS57188679A (en) * 1981-05-18 1982-11-19 Kokusai Electric Co Ltd Sputtering source for thin film forming device
CA1266199A (en) * 1985-01-28 1990-02-27 Waldemar H. Greiner Damper construction
US4622122A (en) * 1986-02-24 1986-11-11 Oerlikon Buhrle U.S.A. Inc. Planar magnetron cathode target assembly
US4717876A (en) * 1986-08-13 1988-01-05 Numar NMR magnet system for well logging
JPH0726203B2 (ja) * 1987-05-11 1995-03-22 松下電器産業株式会社 マグネトロンスパッタリング装置
JPH0813174B2 (ja) * 1990-08-29 1996-02-07 松下電器産業株式会社 永久磁石付回転機の回転子

Also Published As

Publication number Publication date
JP2899190B2 (ja) 1999-06-02
US5512872A (en) 1996-04-30
JPH06207271A (ja) 1994-07-26
EP0606097A1 (de) 1994-07-13
EP0606097B1 (de) 1997-07-30
DE69404483T2 (de) 1997-12-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee